• 센서학회지
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• 제30권1호
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• pp.1-9
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• 2021

This mini review summarizes some of the recent advances in machine-learning (ML)-driven chemical and biological sensors. Specific focus is on field-effect-transistor (FET)-based sensors with a description of their structures and detection mechanisms. Key ML techniques are briefly reviewed for an audience not familiar with the basic principles. We mainly discuss two aspects: (1) data analysis based on ML and (2) ML applied to sensor design. In conclusion, the challenges and opportunities for the advancement of ML-based sensors are briefly considered.

• 센서학회지
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• 제33권3호
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• pp.185-185
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• 2024

• 한국재료학회지
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• 제24권10호
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• pp.532-537
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• 2014

In this study, highly sensitive hydrogen micro gas sensors of the multi-layer and micro-heater type were designed and fabricated using the micro electro mechanical system (MEMS) process and palladium catalytic metal. The dimensions of the fabricated hydrogen gas sensor were about $5mm{\times}4mm$ and the sensing layer of palladium metal was deposited in the middle of the device. The sensing palladium films were modified to be nano-honeycomb and nano-hemisphere structures using an anodic aluminum oxide (AAO) template and nano-sized polystyrene beads, respectively. The sensitivities (Rs), which are the ratio of the relative resistance were significantly improved and reached levels of 0.783% and 1.045 % with 2,000 ppm H2 at $70^{\circ}C$ for nano-honeycomb and nano-hemisphere structured Pd films, respectively, on the other hand, the sensitivity was 0.638% for the plain Pd thin film. The improvement of sensitivities for the nano-honeycomb and nano-hemisphere structured Pd films with respect to the plain Pd-thin film was thought to be due to the nanoporous surface topographies of AAO and nano-sized polystyrene beads.

• 한국전기전자재료학회논문지
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• 제32권4호
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• pp.307-312
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• 2019

Transient earth voltage (TEV) signals propagate on metal surfaces when partial discharge (PD) occurs due to the deterioration of insulation performance in the operation of gas-insulated switchgears (GIS). A TEV sensor has advantages of high sensitivity and convenient installation for detecting PD defects. However, the TEV sensor depends on imports in domestic and detailed studies have not been conducted. In this study, a sensor was designed and fabricated by the TEV principle and its response characteristics were evaluated for detecting PD defects, which were simulated as protrusion on conductor (POC), protrusion on enclosure (POE), and free moving particle (FMP) defects. Finally, the PD-induced TEV signals were measured and phase-resolved partial discharge (PRPD) patterns were analyzed to identify the type of defect.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 하계학술대회 논문집
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• pp.471-474
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• 2000

A flat type microgas sensor was fabricated on the p-type silicon wafer with low stress S $i_3$ $N_4$, whose thickness is 2${\mu}{\textrm}{m}$ using MEMS technology and its characteristics were investigated. W $O_3$thin film as a sensing material for detection of N $O_2$gas was deposited using a tungsten target by sputtering method, followed by thermal oxidation at several temperatures (40$0^{\circ}C$~$600^{\circ}C$) for one hour. N $O_2$gas sensitivities were investigated for the W $O_3$thin films with different annealing temperatures. The highest sensitivity when operating at 20$0^{\circ}C$ was obtained for the samples annealed at $600^{\circ}C$. As the results of XRD analysis, the annealed samples had polycrystalline phase mixed with triclinic and orthorhombic structures. The sample exhibit higher sensitivity when the system has less triclinic structure. The sensitivities, $R_{gas}$ $R_{air}$ operating at 20$0^{\circ}C$ to 5 ppm N $O_2$of the sample annealed at $600^{\circ}C$ were approximately 90. 90.

• 한국가스학회지
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• 제17권2호
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• pp.28-35
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• 2013

대도시 내에 밀집하여 증가하고 있는 대형 복합 건축물은 그 규모와 복잡성으로 인해 유해가스 관련 사고발생시 대형 재난으로의 확대 가능성이 상존한다. 이에 대한 대응책으로, 다종의 유해가스를 감지하는 복합 가스 센서와 이로부터 수집한 정보를 활용한 조기 경보 시스템이 연구되고 있다. 이와 같은 센서 기반 재난 전조 감시 시스템의 효과적인 적용과 운영을 위해서는 적합한 기준이 먼저 마련되어야 한다. 본 연구에서는 유해가스의 감지와 조기 경보 발령을 위한 경보 기준 농도를 제시하고, 각 경보 단계별로 대응 활동과 정보 전파 등 재난 대응 체계를 제안하였다. 재난 감시 기준을 통해 유해가스 관련사고 발생 시 조기에 위험을 감지하여 사고의 경과에 따라 효과적인 대응을 이끌어 낼 수 있다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 추계학술대회 논문집
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• pp.521-522
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• 2006

• 센서학회지
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• 제5권3호
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• pp.41-48
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• 1996

SOx 가스를 고감도로 감지할 수 있는 SAW 가스 센서를 개발하였다. 이는 SAW device 위에 SOx 가스에 감응하는 재료를 박막으로 증착함으로써 고감도의 마이크로 센서형으로 한 것이다. SOx 감응 재료로서 CdS를 선정하였으며, 이를 SAW device 위에 박막화하기 위해 초음파 분무 노즐을 이용한 분무 열분해의 박막 증착공정을 응용하였다. 초음파 분무 노즐을 통하여 생성된 균일하고 미세한 입자들은 기판위에서 안정한 열분해 환경을 조성함으로써 센서 감응막을 위한 넓은 표면적의 박막을 증착 시켰는데 기판의 온도는 $300^{\circ}C$ 내외에서 최소 50 nm수준의 결정립의 박막을 얻었다. 이렇게 하여 얻은 SAW 가스 센서는 $SO_{2}$ 가스에 감응하였으며 재현성도 보였다. 다른 가스의 존재하에서 $SO_{2}$ 가스에 대한 선택성에 관하여는 계속적인 연구가 필요하다.

• 센서학회지
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• 제31권6호
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• pp.455-460
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• 2022

Brush-like ZnO hierarchical nanostructures decorated with MgxZn1-xO (x = 0.1, 0.2, 0.3, 0.4, and 0.5) were fabricated and examined for application to a gas sensor. They were synthesized using vapor phase growth (VPG) on indium tin oxide (ITO) substrates. To generate electronic accumulation at ZnO surface, MgZnO nanoparticles were prepared by sol-gel method, and the ratio of Mg and Zn was adjusted to optimize the device for NO₂ gas detection. As the electrons in the accumulation layer generated by the heterojunction reacted faster and more frequently with the gas, the sensitivity and speed improved. When tested as sensing materials for gas sensors at 100 ppm NO₂ at 300℃, these MgZnO decorated ZnO nanostructures exhibited an improvement from 165 to 514 times compared to pristine ZnO. The response and recovery time of the MgZnO decorated ZnO samples were shorter than those of the pristine ZnO. Various analyzing techniques, including field-emission scanning electron microscopy (FESEM), energy-dispersive X-ray spectroscopy (EDS), and X-ray powder diffraction (XRD) were employed to confirm the growth morphology, atomic composition, and crystalline information of the samples, respectively.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2004년도 춘계학술발표대회 및 제6회 신소재 심포지엄
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• pp.86-86
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• 2004