• Title/Summary/Keyword: Fringe-field

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Defect Inspection of Extreme Ultra-Violet Lithography Mask (극자외선 리소그래피용 마스크의 결함 검출)

  • Yi Moon-Suk
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.43 no.8 s.350
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    • pp.1-5
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    • 2006
  • At-wavelength inspection system of extreme Ultra-violet lithography was developed and the inspection results were compared with the optical mask inspection system by cross correlation experiments. In at-wavelength EUV mask inspection system, a raster scan of focused euv light is used to illuminate euv light to mask blank and specularly and non-specularly reflected euv light are detected by photo diode and microchannel plate. The cross correlation results between at-wavelength inspection tool and optical inspection tool shows strong correlation. Far-field scattering fringe pattern from programmed phase and opqque defect, which were detected by phosphor plate and CCD camera shows that distinct diffraction fringes were observed with fringe spacing dependent on the defect size.

A study on Electro-Optical Characteristics of the UV Aligned FFS Cell on the Organic Layer (유기막에 UV 배향한 FFS 액정셀의 전기광학특성)

  • Han, Jeong-Min;Hwang, Jeoung-Yeon;Kim, Byoung-Yong;Han, Jin-Woo;Kim, Jong-Hwan;Lee, Sang-Keuk;Oh, Yong-Cheul;Seo, Dae-Shik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.11a
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    • pp.278-279
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    • 2006
  • In this study, we investigated the electro-optical (EO) characteristic of fringe-field switching (FFS) mode cell by the two kinds of ultraviolet (UV) alignment method on the organic thin film (polyimide Pl). The suitable organic layers for FFS cell and the aligning capabilities of nematic liquid crystal (NLC) using the in-situ photo-alignment method were studied. An unstable V-T curve of UV-aligned FFS-LCD with conventional photo-alignment method can be achieved. However, a stable V-T curve of UV-aligned FFS-LCD with in-situ photo-alignment method (1h), and V-T curve of UV-aligned FFS-LCD with in-situ photo-alignment method was much stable comparing with that of other UV-aligned FFS-LCD's, As a result, more stable EO performance of UV-aligned FFS-LCD with in-Situ photo-alignment method is obtained than that of the other UV-aligned FFS-LCD's.

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Landscape Information Visualization of Landscape Potential Index in Hilly Openspace Conservation of Urban Fringe Area (도시주변 녹지경관의 보전.관리에 있어 경관잠재력 지표의 경관정보화와 가시화 연구)

  • Cho, Tong-Buhm
    • Journal of Korean Society of Rural Planning
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    • v.7 no.1 s.13
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    • pp.37-48
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    • 2001
  • The purpose of this study is to suggest the landscape potential index for visualizing landscape information in the conservation of hilly landscape in urban fringe. For the visual and quantitative approach to topological landscape assessment, numerical entity data of DEM(digital elevation model) were processed with CAD-based utilities that we developed and were mainly focused on analysis of visibility and visual sensitivity. Some results, with reference in assessing greenbelt area of Eodeung Mt. in Gwangju, proved to be considerable in the landscape assessment of suburban hilly landscapes. 1) Since the viewpoints and viewpoint fields were critical to landscape structure, randomized 194 points(spatially 500m interval) were applied to assessing the generalized visual sensitivity, we called. Because there were similar patterns of distribution comparing to those by 56 points and 18 Points given appropriately, it could be more efficient by a few viewpoints which located widely. 2) Regressional function was derived to represent the relationships between probabilities of visibility frequency and the topological factors(topological dominance, landform complexity and relational aspect) of target field. 3) Visibility scores of each viewpoint were be calculated by summing the visual sensitivity indices within a scene. The scores to the upper part including ridge line have been more representative to overall distributions of visual sensitivities. Also, with sum of deviations of sensitivity indices from each single point's specific index to the weighting values of view points could be estimated rotationally. 4) The deviational distributions of visual sensitivity classes in the topological unit of target field were proved to represent the visual vulnerability of the landform. 5) Landscape potential indices combined with the visual sensitivity and the DGN(degree of green naturality) were proposed as visualized landscape information distributed by topological unit.

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A Transflective Liquid Crystal Display Driven by the Fringe Field Using a Liquid Crystal with a Negative Dielectric Anisotropy

  • Kim, Jin-Ho;Her, Jung-Hwa;Lim, Young-Jin;Kumar, Pankaj;Lee, Seung-Hee;Park, Kyoung-Ho;Lee, Joun-Ho;Kim, Byeong-Koo
    • Transactions on Electrical and Electronic Materials
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    • v.11 no.3
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    • pp.134-137
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    • 2010
  • We have proposed a transflective liquid crystal display (LCD) driven by the fringe field using a liquid crystal (LC) with a negative dielectric anisotropy. The device used different twist angles of the liquid crystals (LC) in the transmissive (T) and the reflective (R) regions when voltage is applied. With the optimization of the pixel electrode width and the distance between them, the LC directors in the R- and T-regions can be rotated by about $22.5^{\circ}$ and $45^{\circ}$ on an average, respectively. As a result, a high image quality transflective LCD with a single gap, a single gamma, and a wide viewing angle characteristics in both the R- and T- regions can be realized.

Temperature Field Measurements of Hele-Shaw Convection Cell Using a Holographic Interferometry (홀로그래픽 간섭계를 이용한 Hele-Shaw Convection Cell 내부 온도장 측정)

  • Kim, Seok;Lee, Sang-Joon
    • Proceedings of the KSME Conference
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    • 2001.06e
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    • pp.530-535
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    • 2001
  • Variations of temperature field in a Hele-Shaw convection cell (HSC) were measured using a holographic interferometry with varying Rayleigh number. Experimental results show a steady flow pattern at low Rayleigh numbers and a time-dependent periodic flow at high Rayleigh numbers. Especially, the period of oscillation at $Ra = 6.35{\times}10^6$ was 62 seconds. Two different measurement methods of holographic interferometry, double-exposure method and real-time method, were employed to measure the temperature field variations of HSC convective flow. In the double-exposure method, unwanted waves can be eliminated and reconstruction images are clear, but transient flow structure cannot be observed clearly. On the other hand, transient flow can be observed and reconstructed well using the real-time method. However, the fringe patterns reconstructed by the real-time method contain more noise, compared with the double-exposure method. The two holographic interferometer techniques employed complementary in this study were proved to be useful for analyzing the temperature field variations of unsteady thermal fluid flows.

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Temperature Field Measurements of Hele-Shaw Convection Cell Using a Holographic Interferometry (홀로그래픽 간섭계를 이용한 Hele-Shaw Convection Cell 내부 온도장 측정)

  • Kim, Seok;Lee, Sang-Joon
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.25 no.11
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    • pp.1624-1631
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    • 2001
  • Variations of temperature field in a Hele-Shaw convection cell (HSC) were measured using a holographic interferometry with varying Rayleigh number. Experimental results show a steady flow pattern at low Rayleigh numbers and a time-dependent periodic flow at high Rayleigh numbers. Especially, the period of oscillation at Ra = 6.35 $\times$ 10$^{6}$ was 62 seconds. Two different measurement methods of holographic interferometry, double-exposure method and real-time method, were employed to measure the temperature field variations of HSC convective flow. In the double-exposure method, unwanted waves can be eliminated and reconstruction images are clear, but transient flow structure cannot be observed clearly. On the other hand, transient flow can be observed and reconstructed well using the real-time method. However, the fringe patterns reconstructed by the real-time method contain more noise, compared with the double-exposure method. The two holographic interferometer techniques employed complementary in this study were proved to be useful fur analyzing the temperature field variations of unsteady thermal fluid flows.

Test and Evaluation of a Newly Built Multi-purpose Transmission Type Polariscope (다목적 투과형 편광기 시험 및 평가)

  • Baek Tae Hyun;Kim Myung Soo;Lee Choon Tae;Kim Whan;Park Tae Guen
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.1
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    • pp.73-81
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    • 2005
  • A multi-purpose polariscope is developed by applying an electro-mechanical control system to a diffused transmission-type circular polariscope. A conventional polariscope is only good for manual control of optical elements. The new polariscope system is devised to be controlled through two stepping motors and two magnetic clutches. The developed system has both functions of a conventional linear- and circular-polariscope. The new polariscope can be used not only for the point-wise measurement using Tardy compensation technique but also for the full-field fringe analysis using conventional and/or phase measuring techniques, if applicable.

A Study on the Development of the Dynamic Photoelastic Hybrid Method for Two Dissimilar Isotropic Bi-Materials (두 상이한 등방성 이종재료용 동적 광탄성 하이브리드법 개발에 관한 연구)

  • Sin, Dong-Cheol;Hwang, Jae-Seok;Gwon, O-Seong
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.25 no.3
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    • pp.434-442
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    • 2001
  • When the interfacial crack of two dissimilar isotropic bi-materials is propagated with constant velocity along the interface, stress and displacement components are derived in this research. The dynamic photoelastic experimental hybrid method for bimaterial is introduced. It is assured that stress components and dynamic photoelastic hybrid method developed in this research are valid. Separating method of stress component is introduced from only dynamic photoelastic fringe patterns. Crack propagating velocity of interfacial crack is 80∼85% (in case of aluminum, 24.3∼25.9%) of Rayleigh wave velocity of epoxy resin. The near-field stress components of crack-tip are similar with those of pure isotropic material under static or dynamic loading, but very near-field stress components of crack-tip are different from those.

Development of the Dynamic Photoelastic Hybrid Method for Propagating Interfacial Crack of Isotropic/Orthotropic Bi-materials (등방성/직교이방성 이종재료의 진전 계면균열에 대한 동적 광탄성 실험 하이브리드 법 개발)

  • Hwang, Jae-Seok;Sin, Dong-Cheol;Kim, Tae-Gyu
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.25 no.7
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    • pp.1055-1063
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    • 2001
  • When the interfacial crack of isotropic/orthotropic bi-materials is propagated with constant velocity along the interface, stress and displacement components are derived in this research. The dynamic photoelastic experimental hybrid method for the bimaterial is introduced. It is assured that stress components and dynamic photoelastic hybrid developed in this research are valid. Separating method of stress components is introduced from only dynamic photoelastic fringe patterns. Crack propagating velocity of interfacial crack is 69∼71% of Rayleigh wave velocity of epoxy resin. The near-field stress components of bonded interface of bimaterial are similar with those of pure isotopic material and two dissimilar isotropic bimaterials under static or dynamic loading, but very near-field stress components of bonded interface of bimaterial are different from those.

A Study on the Evaluation of the Optical Head of a Near-field Optical Recording System and Interference Pattern Analysis (근접장 광기록 헤드의 광학적 성능 평가와 정렬 오차에 대한 간섭 무늬 패턴 분석에 대한 연구)

  • Yoon Hyoung Kil;Gweon Dae Gab;Lee Jun Hee;Jung Jae Hwa;Oh Hyung Ryeol
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.5 s.170
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    • pp.80-86
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    • 2005
  • Optical performance evaluation results and an interference fringe pattern analysis of alignment errors for an optical head of a near-field receding (NFR) system are presented. The focusing unit is an optical head of a NFR system and is composed of a solid immersion lens (SIL) and an objective lens (OL). Generally, the size of the focusing unit is smaller than that of the conventional optical recording head. Hence there are difficulties to assemble the small focusing unit precisely. We composed an evaluation system with an interferometer and evaluated some focusing unit samples aligned and assembled by manual and present the obtained results. Using the conventional optical tool, Code V, a tolerance analysis of the alignment error between the SIL and the objective lens and an interference pattern analysis for the assembly error are executed. Then, through an analysis of the simulation results, the conceptual auto-alignment methodology using a neural network approach is considered.