• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.429-429
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• 2000

Micro positioning mechanism is the key technology in many fields, such as scanning electron microscopy (SEM), x-ray lithography, mask alignment and micro-machining. In the paper, a 3DOF parallel-type micro-positioning mechanism is proposed. This mechanism uses piezo-actuators and Flexure hinge to control x, y and $\theta$ motion. It is shown both analytically and numerically that 2 DOF flexure hinge model was better precision than 1 DOF flexure hinge design.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.2
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• pp.168-175
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• 2003

In this research, a bridge-type flexure hinge mechanism is developed and optimized to amplify the displacement of a multilayer piezostack. Developed hinge mechanism has three-dimensional structure to reduce link size, so it have high amplification ratio with respect to small size. A flexure hinge is assumed to be 6 degree-of-freedom spring elements and matrix methods are used to model a hinge mechanism. To verify derived matrix model, a displacement and frequency experiments are performed. The analysis result shows that the displacemental error between matrix model and experiments is below 10 percents and the deformation of hinge in parasitic direction should be considered In hinge modeling. Using developed matrix model, an optimal design is performed to maximize the performance of hinge mechanism.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.9 s.174
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• pp.130-136
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• 2005

This paper presents an optimal design and the performance evaluation of two-axis nano positioning stage with round notched flexure hinges. A flexure hinge mechanism with round notched flexure hinges is to guide the linear motions of a moving plate in the nano positioning stage. A Min-Max algorithm is applied to the design of the flexure hinge mechanism for nano positioning stage. In the design process, the structure of the flexure hinge mechanism is fixed, then the radius of a round hole and the width of two round holes are chosen as design variables, and finally the do sign variables are calculated by the Min-Max algorithm. The machined flexure hinge mechanism, stack type PZTs for actuation and capacitance type displacement sensors for position measurement are assembled into the nano positioning stage. The experimental results of the manufactured nano positioning stage show the first modal resonance frequency of 197 Hz, the operating range of 40 um, and the resolution of 3 nm.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.3 s.168
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• pp.61-67
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• 2005

A dynamic model for flexure hinge-based compliant mechanisms is derived. The dynamic model of the previous works do not well describe the behaviors of rigid bodies in the compliant mechanism when the length of the flexure hinge is long. In this study, the effect on the length of the flexure hinge is pointed out and then the dynamic model is derived to overcome the length effect. For verification, modal analyses are carried out using the proposed dynamic model and FEM (Finite Element Method). Finally they are compared by the terms of modal frequency. As the result, the proposed dynamic model can be used in design and analysis of the compliant mechanism.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1638-1642
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• 2003

Piezoactuator using a flexure hinge mechanism is often used in the precision stages. When the total size of the hinge mechanism become small compared with the deformation of the hinge mechanism, the geometrical nonlinearity makes a considerable error in the output displacement. In this research, the incremental method based on the matrix method is developed to model the effect of the geometrical nonlinearity. Developed modeling method is applied to derive the error of output displacement of the bridge-type hinge mechanism and its results are derived with respect to the design parameters. This method can be easily used to the design optimization of the hinge mechanism and analysis results show that the geometrical nonlinearity error should be considered to achieve a high accuracy to the piezoactuators.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.12
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• pp.88-94
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• 2007

A flexure hinge-based compliant stage driven by stack-type piezoelectric elements has high precision motion but small operational range due to the characteristics of the piezoelectric element. Since the common flexure hinges can be broken by excessive deflection when the displacement is amplified by a high amplification ratio, a flexure hinge mechanism for large deflection is required. A cartwheel-type flexure hinge has an advantage of larger deflection compared with the common flexure hinges. This study presents a rotation stage with cartwheel-type flexure hinges driven by a stack-type piezoelectric element. The characteristics and the performance of the rotation stage are described by the terms of principal resonance frequency, amplification ratio of rotational displacement, maximum rotational displacement and block moment, in which the terms are analyzed by geometric parameters of the rotation stage. The analyzed results will be used as the guideline of the design of the rotation stage.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.789-790
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• 2010

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.5 no.1
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• pp.39-44
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• 2006

Ultra precision positioning mechanism has been widely used on semiconductor manufacturing equipments, optical spectrum analyzers and cell manipulations. Ultra precision positioning mechanism consists of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design and analyze the micro stage that is one of the equipments embodied in ultra precision positioning mechanism. The micro stage consists of PZT actuators and flexure hinges. The structural design of flexure hinge is optimized by using RSM and FEM. The control factors concerned with the design of flexure hinges of stage and arms are optimized by minimizing the equivalent stress on the hinge and maximizing 1st natural frequency based on RSM and FEM simulation under various kinds of design conditions.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.7 no.2
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• pp.60-65
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• 2008

The high-technology industries including a semi-conductor and an information communication need an ultra-precision technology from the technological points of view. Nano technology based on an ultra-precision technology is being studied to overcome the delicate technology that may occur in the semi-conductor fields. Then, the transferring equipment with high resolution and long displacement becomes an important technology. The goal of this study is to analyze the displacement magnification mechanism driven by piezoelectric actuator which has high resolution and fast response characteristics using flexure hinge with the merits of soft displacement, negligible back-lash and stick-slip, and no-lubrication. The analyses to reduce the magnification losses occurred during the magnification process are performed using ANSYS software based on FEM. The five design variables such as arm thickness, thickness of hinge, radius of hinge, length of input side at the 1st lever and magnification ratio of 1st lever are optimized to induce the maximum magnification ratio using Taguchi method.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.7
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• pp.851-858
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• 2011

Nanopositioning technologies play an important role in the progress of electronics, optics, bio-engineering and various nano-scale technologies. As a result, various practical nanopositioning methods have been successfully introduced. Flexure mechanism is a valuable method in nanopositioning because of smooth and friction-free motion and the infinitesimal movement near to sub-nm. In this study a modularized nanopositioner based on parallelogram four-bar linkage structure with right-circular flexure hinge was developed. The positioning performance of a single axis nanopositioner and a XY nanopositioner which was extended from single axis one were demonstrated using control experiments. Consequently, it was shown that the developed single axis nanopositioner possessed high performance and could be extended to various multi-axis nanopositioners.