• Journal of the Semiconductor & Display Technology
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• v.11 no.2
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• pp.59-62
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• 2012

This test method covers a procedure for measuring particle removal characteristic of equipment fan filter unit(EFFU) installed inside of semiconductor process equipments, FPD manufacturing equipments and so on. Since EFFU is a combination of air filter and the assembly of fan, motor and frame, the integrity of these parts is very important for the performance of EFFU. So a conventional particle removal test method for air filters is not suitable for EFFU particle removal performance. This test method defines an evaluation method for EFFU which is installed inside an enclosed space to remove particles that are generated inside process equipment. The particle removal performance of EFFUs is usually depending on the performance of filter media and air flow rate. To understand a performance of an EFFU, the filter media characteristic, air flow rate and the integrity of EFFU parts should be considered simultaneously. This test method is intended to demonstrate the system performance of an EFFU and successfully evaluated EFFU performance characteristics.

• Proceedings of the SAREK Conference
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• 2008.11a
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• pp.452-457
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• 2008

We performed a study on the contaminant transfer in a clean space for the location of product and fan filter unit using computational fluid dynamics analysis. To simplify the real product moving process, three different non-moving cases regrading the locations of product were selected: no product, at the lower side, and at the upper and lower sides. And to investigate the characteristics of the contaminant transfer, the arrangement of fan filter units was varied. Local mean air-age and contaminant distribution were used as evaluation indices. From the results, the contaminant transfer to the product was the most when the products were simultaneously located at the upper and lower sides. And the contaminant was easily exhausted regardless of the location of product when the fan filter units were properly arranged at the top side of the clean space.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.15 no.9
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• pp.751-761
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• 2003

We performed the numerical analysis on the airflow characteristics in the two type of cleanroom systems, which are the axial fan type (AFT) and the fan filter unit (FFU). A computational fluid dynamic model was applied to investigate and compare the nonuniformity, the deflection angle and the air ventilation effectiveness of the two designs of cleanrooms when dampers are adjusted and not adjusted. And the flow-resistance models of the various components were used in this simulation. We know that the airflow characteristics of the cleanrooms are largely affected by damper adjusting And we also find out that the FFU system is superior to the AFT system through the comparison of the cleanroom performance indices.

• Air Cleaning Technology
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• v.3 no.3 s.11
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• pp.12-25
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• 1990

• Air Cleaning Technology
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• v.15 no.1 s.56
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• pp.77-83
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• 2002

• Transactions of the Korean Society of Mechanical Engineers B
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• v.37 no.7
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• pp.709-716
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• 2013

A fan filter unit (FFU) is a device which supplies clean air from the ceiling in a clean room. With an increase in its size, velocity variation occurs within the exhaust plane and this damage the product quality or productivity. Hence, a guide vane is installed inside the device to enhance the velocity uniformity. Because the vane reduces the flow rate for a given pumping power, an optimum design is required to achieve velocity uniformity while minimizing the flow rate reduction at the same time. To find a geometry that satisfies these requirements, a series of numerical simulations has been conducted while changing the angle and length of the guide vanes. By changing the geometry of the side guide vane, the velocity uniformity increased by 3.7% and the flow rate decreased by 1.5%. For the center guide vane, the velocity uniformity increased by 2.9% and the flow rate decreased by 0.7%.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2014.04a
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• pp.121-121
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• 2014

본 연구에서는 반도체 제조의 Diffusion 공정설비의 FFU (Fan Filter Unit) 진동에 의해 발생한 wafer 불량 현상을 규명 및 개선하였다. EFEM(Equipment Front End Module)의 Loading 부에 장착된 FOUP(Front Opening Unified Pod)에 들어 있는 Wafer 들이 설비 EFEM 하부로 떨어져 깨지거나 FOUP 내에서 겹침 현상이 발생하는 것을 확인하였다. 이에 생산현장의 모든 Diffusion 공정 설비를 조사하였으며, 그 결과 A 사(社)의 특정 설비에서만 발생되는 현상임을 확인하였다. 해당 A사(社)설비군에서만 월 평균 10 건의 Slot Mapping Error 가 발생하였으며, 이로 인해 Wafer가 재 제조된 매수가 월 평균 53 매로 확인되었다. 따라서 본 연구는 A 사(社)설비에서 발생하는 Mapping Error 의 원인 규명 및 개선을 위해 추진되었다. 총 12 개의 항목을 불량 발생 원인 후보 군으로 선정 후 예비 진단한 결과 FFU(Fan Filter Unit)에 의한 문제 발생 가능성이 가장 높을 것으로 추정되었다. 이에 따라 4 개의 서로 다른 물리적 환경/조건에서 진동을 측정하였으며, 최종 평가 결과 Motor 와 Blade 의 불균형에서 기인한 진동이 설비의 loader 부에 직접적으로 영향을 주는 것을 확인하였다. 진동 문제를 해결하기 위해 고 RPM blade 에서 저 RPM 및 유량 감소를 보완할 수 있는 신규모델로 교체하였다. 신규 Module(blade/motor) 장착 후 Load port 에서의 진동 측정 결과 개선 전 대비 91% 감소하였으며, 결과적으로 Slot mapping error 발생 건수가 50% 이상 감소되는 효과와 Wafer 재 제조 매수도 월 평균 약 43% 감소하는 효과를 얻을 수 있었다.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.05a
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• pp.778-784
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• 2002

FFU are used increasingly by the microeleceronics industry to provide clean recirculating air for the fabrication of integrated circuits and laminar flow air. There may be several hundred ffu in a large cleanroom, covering 100% of the ceiling area. Hence, there is of often knowledge in the inside and outside of the country the flu give rise to noise & vibration trouble to microelectronics industry. Noise ＆ Vibration control for satisfication about noise ＆ vibration criteria in TFT-LCD factory cleanroom be in need of exact noise & vibration data of accurence from utility & equipment that can be exert a bad influence upon cleanroom. In this pater, hence we found out noise and vibration properities of ffu by using experimental method. And, we performed noise ＆ vibration analysis about noise it vibration level in cleanroom using semiempirical method for quantative approach about noise ＆ vibration level in cleanroom.

• Proceedings of the SAREK Conference
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• 2008.06a
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• pp.517-522
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• 2008

Ventilation rate and filter were selected to simultaneously satisfy indoor air quality and minimize energy consumption in residential housing. The concentrations of indoor particles were calculated using an adapted mass balance model for various ventilation airflow rates. To satisfy the guidelines for indoor concentrations of particles, the minimum ventilation rates of 1.0/h, 0.6/h and 0.4/h were required for MERV11, MERV13 and MERV14, respectively. And the fan power consumptions induced by ducts, a heat exchanger and a filter were calculated for various ventilation airflow rates. The increase in the ventilation rate caused a dramatic increase in the power consumption, but the filter performance did not have much of an effect on the fan power for ventilation airflow rates lower than 0.4/h. The use of the ventilation filter of MERV 14 was suggested at a ventilation rate of 0.4/h when the fan power consumptions were considered in addition to the indoor concentrations of particles and $CO_2$. The use of the MERV14 filter at a ventilation rate of 0.6/h could be more effective than the additional use of an indoor air cleaner when the residential housing unit was ventilated.

• Proceedings of the SAREK Conference
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• 2009.06a
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• pp.1507-1512
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• 2009

Flow field in a roller conveyor system, induced from the movement of a cassette in which glasses for flat panel display are loaded, is numerically studied in this paper. Contamination on the glass surface by dust particles produced from mechanical friction between roller and cassette is predicted from the analysis results of flow fields. Results show that a large swirl flow is formed under the moving cassette with constant speed. This swirl flow is confined only under the cassette because two main streams from the backward and the fan filter unit on the top ceiling are sufficiently strong. Therefore, it can be said that possibility of the contamination by the particles originated from the friction is relatively low. It is also revealed that flow direction between glass plates is changed according to the speed of the cassette movement due to the shear force of glass plates.