Characteristics of Contaminant Transfer in a Clean Space for the Location of Product and Fan Filter Unit

청정공간에서 제품과 팬필터유닛의 위치에 따른 오염물질의 전파 특성

  • Kim, Hyouk-Soon (Graduated School of Mechanical and Information Engineering, University of Seoul) ;
  • Noh, Kwang-Chul (Department of Mechanical Engineering, Yonsei University) ;
  • Lee, Young-Koo (Clean Room Airflow Control Team, LG Display Co. Ltd.) ;
  • Oh, Myung-Do (Department of Mechanical and Information Engineering, University of Seoul)
  • 김혁순 (서울시립대학교 대학원 기계정보공학과) ;
  • 노광철 (연세대학교 기계공학부) ;
  • 이영구 ((주)LG Display CR기류팀) ;
  • 오명도 (서울시립대학교 기계정보공학과)
  • Published : 2008.11.21

Abstract

We performed a study on the contaminant transfer in a clean space for the location of product and fan filter unit using computational fluid dynamics analysis. To simplify the real product moving process, three different non-moving cases regrading the locations of product were selected: no product, at the lower side, and at the upper and lower sides. And to investigate the characteristics of the contaminant transfer, the arrangement of fan filter units was varied. Local mean air-age and contaminant distribution were used as evaluation indices. From the results, the contaminant transfer to the product was the most when the products were simultaneously located at the upper and lower sides. And the contaminant was easily exhausted regardless of the location of product when the fan filter units were properly arranged at the top side of the clean space.

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