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검색결과 552건 처리시간 0.08초

Development of Wafer Bond Integrity Inspection System Based on Laser Transmittance

  • Jang, Dong-Young;Ahn, Hyo-Sok;Mehdi, Sajadieh.S.M.;Lim, Young-Hwan;Hong, Seok-Kee
    • 마이크로전자및패키징학회지
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    • 제17권2호
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    • pp.29-33
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    • 2010
  • Among several critical topics in semiconductor fabrication technology, particles in addition to bonded surface contaminations are issues of great concerns. This study reports the development of a system which inspects wafer bond integrity by analyzing laser beam transmittance deviations and the variations of the intensity caused by the defect thickness. Since the speckling phenomenon exists inherently as long as the laser is used as an optical source and it degrades the inspection accuracy, speckle contrast is another obstacle to be conquered in this system. Consequently speckle contrast reduction methods were reviewed and among the all remedies have been established in the past 30 years the most adaptable solution for inline inspection system is applied. Simulation and subsequently design of experiments has been utilized to discover the best solution to improve irradiance distribution and detection accuracy. Comparison between simulation and experimental results has been done and it confirms an outstanding detection accuracy achievement. Bonded wafer inspection system has been developed and it is ready to be implemented in FAB in the near future.

현호색의 Acetylcholinesterase 활성 저해 성분 및 그 작용기전 (An Acetylcholinesterase Inhibitor Isolated from Corydalis Tuber and Its Mode of Action)

  • 황세영;장영표;변순정;전미희;김영중
    • 생약학회지
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    • 제27권2호
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    • pp.91-95
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    • 1996
  • In the course of searching for acetylcholinesterase inhibitors from crude drugs, it was found that total MeOH extract of Corydalis Tuber showed significant inhibitory effect on acetylcholinesterase. To isolate acetylcholinesterase inhibitors from Corydalis Tuber, total MeOH extract of the the crude drug was subjected to activity guided fractionation. The MeOH extract was suspended in water and fractionated with methylene chloride and subjected to acid-base fractionation. Silica gel column chromatography of the basic fraction which showed significant inhibitory effect on acetylcholinesterase was carried out and 5 subfractions (1-5) were obtained. From subtraction 4, compound I was isolated. The structure of isolated compound I was identified by spectroscopic parameters of $^1H-NMR$, $^{13}C-NMR$, EI-MS and FAB-MS. The compound I was identified as berberine. It was found from the Lineweaver-Burk plot that berberine was a reversible and specific inhibitor of acetylcholinesterase having 90% inhibitory effect at the concentration of $2.5{\mu}M$.

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두충엽 함유 퀘르세틴배당체의 함량 표준화 및 계절적 변화 (Standardization and Seasonal Variation of Quercetin Glycoside in Eucommiae Folium)

  • 함인혜;이승재;김호현;강인호;진희억;황완균
    • 생약학회지
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    • 제33권3호통권130호
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    • pp.194-199
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    • 2002
  • The radix and folium of Eucommia ulmoides(Eucommiaceae) has been used for backache, atrophy of the leg and knee, enuresis, hypertension. In order to evaluate to quality of folium, we have been isolated a main compound as a standard compound, which was elucidated $quercetin-3-O-{\beta}-D-xylopyranosyl(l{\rightarrow}2)-{\beta}-D-glucopyranoside$ through it's physicochemical data and IR, FAB-Mass, $^{13}C-NMR$ and $^{1}H-NMR$ analysis. It was analyzed by HPLC system using 17% $CH_3CN$ as a solvent system. The amount of $quercetin-3-O-{\beta}-D-xylopyranosyl(l{\rightarrow}2)-{\beta}-D-glucopyranoside$ from Eucommiae folium was in the range of $0.056{\pm}0.022$ mg(n=7) and also from the results of analysis through seasonal variation$(June{\sim}October)$ September and October have been evaluated to be very high in it's content.

비스-카바졸 유기염료를 이용한 염료감응태양전지 (Organic Sensitizers based on Bis-carbazole for Dye-Sensitized Solar Cells)

  • 김효정;변여진;남정은;김대환;강진규
    • 한국태양에너지학회:학술대회논문집
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    • 한국태양에너지학회 2012년도 춘계학술발표대회 논문집
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    • pp.397-399
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    • 2012
  • Dye-sensitized solar cells (DSSCs) have received considerable attention as the most promising candidates for renewable energy systems in recent years. Among these, organic dyes which have many advantages such as large absorption coefficients, customized molecular design for desired photophysical and photochemical properties, inexpensiveness and environment-friendliness, are suitable as photosensitizers for DSSCs. We have studied on the design and synthesis of two organic dyes (BECZ 1 and BECZ 2) with a 9-ethyl-9H-carbazole core for dye-sensitized solar cells (DSSCs). Two organic dyes comprised of two 9-ethyl-9H-carbazole moiety as electron-donor, two types of cyanoacrylic acid moiety acting as acceptor. In addition, n-ethyl unit introduced for increasing the solubility and the donating power. The obtained organic dyes were comprehensively characterized by NMR, GC-MS, FAB-MS and UV/Vis spectroscopies. DSSCs sensitized by the dyes BECZ1 and BECZ2 produced ${\eta}$ value 3.31% and a ${\eta}$ value 3.21%.

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Reduction of Contact Resistance Between Ni-InGaAs Alloy and In0.53Ga0.47As Using Te Interlayer

  • Li, Meng;Shin, Geon-Ho;Lee, Hi-Deok;Jun, Dong-Hwan;Oh, Jungwoo
    • Transactions on Electrical and Electronic Materials
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    • 제18권5호
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    • pp.253-256
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    • 2017
  • A thin Te interlayer was applied to a Ni/n-InGaAs contact to reduce the contact resistance between Ni-InGaAs and n-InGaAs. A 5-nm-thick Te layer was first deposited on a Si-doped n-type $In_{0.53}Ga_{0.47}As$ layer, followed by in situ deposition of a 30-nm-thick Ni film. After the formation of the Ni-InGaAs alloy by rapid thermal annealing at $300^{\circ}C$ for 30 s, the extracted specific contact resistivity (${\rho}_c$) reduced by more than one order of magnitude from $2.86{\times}10^{-4}{\Omega}{\cdot}cm^2$ to $8.98{\times}10^{-6}{\Omega}{\cdot}cm^2$ than that of the reference sample. A thinner Ni-InGaAs alloy layer with a better morphology was obtained by the introduction of the Te layer. The improved interface morphology and the graded Ni-InGaAs layer formed at the interface were believed to be responsible for ${\rho}_c$ reduction.

셀 레벨에서의 OPTICS 기반 특질 추출을 이용한 칩 품질 예측 (A Prediction of Chip Quality using OPTICS (Ordering Points to Identify the Clustering Structure)-based Feature Extraction at the Cell Level)

  • 김기현;백준걸
    • 대한산업공학회지
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    • 제40권3호
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    • pp.257-266
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    • 2014
  • The semiconductor manufacturing industry is managed by a number of parameters from the FAB which is the initial step of production to package test which is the final step of production. Various methods for prediction for the quality and yield are required to reduce the production costs caused by a complicated manufacturing process. In order to increase the accuracy of quality prediction, we have to extract the significant features from the large amount of data. In this study, we propose the method for extracting feature from the cell level data of probe test process using OPTICS which is one of the density-based clustering to improve the prediction accuracy of the quality of the assembled chips that will be placed in a package test. Two features extracted by using OPTICS are used as input variables of quality prediction model because of having position information of the cell defect. The package test progress for chips classified to the correct quality grade by performing the improved prediction method is expected to bring the effect of reducing production costs.

반도체 제조업에서의 RFID Active 태그를 이용한 위치추적 시스템 구축 사례 및 스케줄링 개선 방안에 관한 연구 (Case Study on Location Tracking System using RFID Active Tag and Improvement of Scheduling System in Semiconductor Manufacturing)

  • 김갑용;채명신;유재언
    • 산업공학
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    • 제21권2호
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    • pp.229-236
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    • 2008
  • Recently, ubiquitous computing paradigm considers as a tool for making innovation and competitive strength in manufacturing industry like other industries. Particularly, the location-based service that enables us to trace real-time logistics make effective management of schedules for inventory control, facilities and equipments, jobs planning, and facilitate the processes of information management and intelligence, which relate with ERP and SCM in organizations. Our study tries to build the location-based system for products of semiconductors in manufacturing place and suggests the good conditions and effective tracking procedures for positions of products. Our study show that the system is good for the saving of time in tracking products, however, it has to be improved in terms of accuracy. The study verifies the application of RFID technology in manufacturing industry and suggests the improvement of photograph process through RFID. In addition, our research introduces the future operation of FAB in semiconductors' processes that relate with real-time automation and RFID in manufacturing company.

Purification and Characterization of Novel Antimicrobial Peptide from the Skin of the Hagfish , Eptatretus burgeri

  • Hwang, Eun-Young;Seo, Jung-Kil;Kim, Chan-Hee;Go, Hye-Jin;Kim, Eun-jung;Chung, Joon-Ki;Rye, Hong-Soo;Park, Nam-Gyu
    • Preventive Nutrition and Food Science
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    • 제4권1호
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    • pp.28-32
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    • 1999
  • A novel antimicrbial peptide , named HFS-I, was isolated and characterized from the skin of the hagfish, Eptatretus bugeri. The decapeptide with a molecular mass of 1279.5 Da was purified to homogeneity using a gel-filtration column, ion-exchange and C18 reverse-phase high performance liquid chromatograpy . The complete amino acid sequence of HFS-I, which was determined by a combination of an automated amino acid sequencing and FAB-MS, was F-P-W-W-L-S-G-K-Y-P-NH2. Comparison of the amino acid sequence with those of other known antimicrobial peptides revealed that HFS-I was a novel antimicrobial peptide. HFS-I showed a weak antimicrobial activity in vitro aganinst a broad spectrum of microorganism without hemolytic acitivity.

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Oxovanadium(IV) Complexes Containing VO(ONS) Basic Core: Synthesis, Structure, and Spectroscopic Properties

  • Jang, Yoon-Jung;Lee, Uk;Koo, Bon-Kweon
    • Bulletin of the Korean Chemical Society
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    • 제26권1호
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    • pp.72-76
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    • 2005
  • Some mononuclear oxovanadium(IV) complexes having the general formula [VOL(bidentate)] (1-4) of which L is tridentate ONS-donor salicylaldehyde S-methyldithiocarbazate (sal-mdtc$^{2-}$) or salicylaldehyde 4- phenylthiosemicarbazate (sal-phtsc$^{2-}$) and bidentate stands for 2,2'-bipyridyl (bpy) or 1,10-phenanthroline (phen) have been synthesized. The complexes were characterized by elemental analyses, FAB mass, UV, IR spectroscopy, and cyclic voltammetry. Two of the complexes [VO(sal-mdtc)(bpy)] (1) and [VO(sal-mdtc) (phen)] (2) were crystallographically characterized. The structures revealed that vanadium atom is octahedrally coordinated by the O, N, and S donor atoms of the tridentate ligand, the two N atoms of bidentate ligand, and the oxo atom. The oxygen donor, occupying an apical position has a trans-labilizing effect, resulting in elongation of the V-N bond. The cyclic voltammograms of the complexes exhibited one cathodic response in the range −d1.45 $\sim$ −f1.52 V due to the reduction of V(IV) to V(III).

녹차 중 카테킨류의 신속 분리 및 동정법 (Rapid Separation and Indentification Method of Tea Catechins)

  • 이정희;이용문;문동철
    • 분석과학
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    • 제5권3호
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    • pp.333-338
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    • 1992
  • 녹차 중 탄닌성분들인 에피갈로카테킨, 에피갈로카테킨 갈레이트는 세파덱스 LH-20 컬럼에서 물-아세톤의 혼합용리에 의하여 신속하게 분리되어 용출하였다. 용출액은 280nm에서 흡광도의 변화를 측정한 결과 4개의 분획으로 검출되었다. 각 분획을 그대로 고속원자충격 질량분석장치에 도입하여 탄닌성분들을 동정할 수 있었다. 에피갈로카테킨, 에피갈로카테민 갈레이트는 역상 HPLC에서 용출된 피크면적으로 계산한 결과, 70% 이상의 높은 수율로 얻을 수 있었다. 본 방법에 의하여 보고된 방법들보다 탄닌성분들을 신속하게 동정할 수 있고, 고순도로 얻을 수 있었다.

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