• 한국전기전자재료학회논문지
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• 제19권11호
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• pp.1010-1013
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• 2006

Hydrogenated Diamond-like carbon (DLC) films were Prepared by the radio frequency plasma enhanced chemical vapor deposition (RF PECVD) method on silicon substrates using methane $(CH_4)$ and hydrogen $(H_2)$ gas for the application to solid lubricant of MEMS devices. We have checked the influence of varying RF power on tribological properties of DLC film. We have checked their performance as two kinds of method such as FFM (Friction Force Microscope) and BOD (Ball-on Disk) measurement. The friction coefficients and the contact number of cycles to steady state decreased as the increase of RF power with FFM and BOD measurement, respectively.

• 한국전기전자재료학회논문지
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• 제19권7호
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• pp.631-635
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• 2006

The properties of metal interlayered DLC films between the Si substrate and the DLC films were studied. DC magnetron sputtering method has been used to deposit intermediate layers of metals. And RF-PECVD method has been employed to synthesize DLC onto substrates of the silicon and metal layers. After we used metal Inter-layers, such as chromium, nickel, titanium and we studied tribological properties of the DLC films. The thickness of films were observed by field emission scanning electron microscope (FE-SEM). Also the surface morphology of the films were observed by an atomic force microscope (AFM). The crystallographic properties of the films were analyzed with X-ray diffraction (XRD), the friction coefficients were investigated by AFM in friction force microscope (FFM) mode. Tribological performances of the films were estimated by nano-indenter, stress tester measurement.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.61-62
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• 2002

In order to clarify the contact mechanism between specimen surface and probe tip in the surface observation by the AFM (atomic force microscope) or the FFM (friction force microscope), several molecular dynamics simulations have been performed. In the simulation, a 3-dimensional simulation model is proposed where the specimen and the probe are assumed to consist of mono-crystal line copper and a carbon atom respectively and the effect of cantilever stiffness is also taken into considered. The surface observation process on a well-defined Cu{100} is simulated. The influences of cantilever stiffness on the reactive force images and the behavior of probe tip were evaluated. As a resuIt, several phenomena similar to those observed by the actual surface observation experiment, such as double-slip behavior and dispersion in the stick-slip wave period were observed.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.791-794
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• 2003

DLC thin films were prepared by microwave plasma-enhanced chemical vapor deposition method on silicon substrates using methane ($CH_4$) and hydrogen ($H_2$) gas mixture. The negative DC bias ($-450V{\sim}-550V$) was applied to enhance the adhesion between the film and the substrate. The films were characterized by Raman spectrometer. The surface morphology was observed by an atomic force microscope (AFM). And also, the friction coefficients were investigated by AFM in friction force microscope (FFM) mode, which were compared with the pin-on-disc (POD) measurement.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.842-845
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• 2003

DLC thin films were prepared by microwave plasma-enhanced chemical vapor deposition method on silicon substrates using methane ($CH_4$) and hydrogen ($H_2$) gas mixture. The negative DC bias ($-450V{\sim}-550V$) was applied to enhance the adhesion between the film and the substrate. The films were characterized by Raman spectrometer. The surface morphology was observed by an atomic force microscope (AFM). And also, the friction coefficients were investigated by AFM in friction force microscope (FFM) mode, which were compared with the pin-on-disc (POD) measurement.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.167-168
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• 2002

In this study, the effects of oxide layer formed on the wear tracks of TiN coated silicon wafer on friction characteristics were investigated. Silicon wafer was used for the substrate of coated disk specimens, which were prepared by depositing TiN coating with $1\;{\mu}m$ in coating thickness. AISI 52100 steel balls were used for the counterpart. The tests were performed both in air for forming oxide layer on the wear track and in nitrogen to avoid oxidation. This paper reports characterization of the oxide layer effects on friction characteristics using X-ray diffraction (XRD). scanning electron microscopy (SEM) and friction force microscope (FFM).

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.181-181
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• 2008

DLC (Diamond-like Carbon) 박막은 높은 내마모성과 낮은 마찰 계수, 화학적 안정성 및 적외선 영역에서의 높은 투과율과 낮은 광 반사도, 높은 전기저항과 낮은 유전율, 전계방출특성 등 여러 가지 장점을 가진 물질이다[1]. 최근에는 DLC 박막의 여러 장점들과 산과 염기 유기용매에 대한 화학적 안정성으로 인하여 인조관절에서 인공심장의 판막에 이르기까지 의공학 관련 부품소재로 응용되고 있으며 내구성과 안정성에 있어서 탁월한 성능을 보여주고 있다. 또한 DLC 박막의 높은 경도와 낮은 마찰 계수, 부드러운 박막 표면 (수nm의 RMS 거칠기)의 장점을 살려 마그네틱 미디어와 하드디스크의 슬라이딩 표면에 사용되어지고, MEMS (Micro-Electro Mechanical System) 소자와 MMAs (Moving Mechanical Assemblies)의 고체윤활코팅으로 활용하여 미세기계의 내구성과 성능 향상을 도모할 수 있다. 이와 같이 DLC 박막은 다양한 분야에 응용되고 있으며, 박막이 지닌 여러 가지 장점들로 인하여 더 많은 분야에 응용될 가능성을 지닌 물질이다. 그러나 수 ${\mu}m$이상의 두께에서 박막이 높은 잔류응력 (residual stress)을 가지고, 열에 취약하여 이의 개선에 관한 연구들이 진행되어 지고 있다 [2]. 따라서 사용되는 목적에 따라 용도에 맞는 양질의 DLC 박막을 합성하기 위해선 합성 장치의 개발과 다양한 실험을 통한 최적의 합성조건 도출 등의 노력이 요구된다. 또한 DLC 박막 합성시의 여러 가지 증착 방법에 따른 박막 물성에 대한 재현성 확보 및 박막 증착에 관한 명확한 메커니즘 규명이 아직까지는 불분명하여 이에 관한 연구가 시급하다. 따라서 본 연구에서는 MEMS 소자와 MMAs의 고체윤활코팅으로 사용가능한 DLC 박막을 RF PECVD (Plasma Enhanced Vapor Deposition) 방식으로 합성하고 후열처리 온도에 따른 DLC 박막의 마찰계수 변화를 박막에 훼손을 주지 않는 FFM (Friction Force Microscopy) 방식을 사용하여 분석하였다.