Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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A Study on Tribological Properties of Diamond-like Carbon Thin Film for the Application to Solid Lubricant of MEMS Devices

MEMS 소자의 고체윤활박막으로 활용하기 위한 다이아몬드상 카본 박막의 트라이볼로지 특성 분석

  • 최원석 (성균관대학교 플라스마 응용 표면기술 연구센터) ;
  • 홍병유 (성균관대학교 정보통신공학부)
  • Published : 2006.11.01
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Abstract

Hydrogenated Diamond-like carbon (DLC) films were Prepared by the radio frequency plasma enhanced chemical vapor deposition (RF PECVD) method on silicon substrates using methane $(CH_4)$ and hydrogen $(H_2)$ gas for the application to solid lubricant of MEMS devices. We have checked the influence of varying RF power on tribological properties of DLC film. We have checked their performance as two kinds of method such as FFM (Friction Force Microscope) and BOD (Ball-on Disk) measurement. The friction coefficients and the contact number of cycles to steady state decreased as the increase of RF power with FFM and BOD measurement, respectively.

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References

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