Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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An Analysis of Tribological Properties of Metal Interlayered DLC Films Prepared by PECVD Method

PECVD로 증착된 금속층을 포함하는 DLC 박막의 기계적 특성 분석

  • 전영숙 (성균관대학교 정보통신공학부) ;
  • 최원석 (성균관대학교 플라스마 응용 표면기술 연구센터) ;
  • 홍병유 (성균관대학교 정보통신공학부)
  • Published : 2006.07.01
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Abstract

The properties of metal interlayered DLC films between the Si substrate and the DLC films were studied. DC magnetron sputtering method has been used to deposit intermediate layers of metals. And RF-PECVD method has been employed to synthesize DLC onto substrates of the silicon and metal layers. After we used metal Inter-layers, such as chromium, nickel, titanium and we studied tribological properties of the DLC films. The thickness of films were observed by field emission scanning electron microscope (FE-SEM). Also the surface morphology of the films were observed by an atomic force microscope (AFM). The crystallographic properties of the films were analyzed with X-ray diffraction (XRD), the friction coefficients were investigated by AFM in friction force microscope (FFM) mode. Tribological performances of the films were estimated by nano-indenter, stress tester measurement.

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References

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