• JSTS:Journal of Semiconductor Technology and Science
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• 제2권2호
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• pp.102-110
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• 2002

In this paper, we present the fabrication of tunable capacitors and 3-dimensional inductors. This work was related to fabricated 3-dimensional device for need of micro device in developing new intelligence age. This device was fabricated by electroplating used electroplating PR and high-vacuum evaporation of metal. Fabricated micro-inductor is consisted of air-bridge on electroplating rod and electroplated core. Micro-capacitor is consisted of thin metal membrane and electroplated core. Electroplating material is used Cu metal solvent. Air-gap between metal-layers function as almost perfect isolation layer. The most advantage of our micro-inductor and micro-capacitor compared to present device is a possibility that can fabricate on RF MEMS(microelectro-mechanical systems) application with high performance and various function. In this paper, we present the fabrication of tunable capacitors and 3-dimensional inductors. This work was related to fabricated 3-dimensional device for need of micro-device in developing new intelligence age. This device was fabricated by electroplating used electroplating PR and high-vacuum evaporation of metal. Fabricated micro-inductor is consisted of air-bridge on electroplating rod and electroplated core. Micro-capacitor is consisted of thin metal membrane and electroplated core. Electroplating material is used Cu metal solvent. Air-gap between metal-layers function as almost perfect isolation layer. The most advantage of our micro-inductor and micro-capacitor compared to present device is a possibility that can fabricate on RF MEMS application with high performance and various functions.

• 방사선산업학회지
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• 제11권3호
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• pp.173-179
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• 2017

The small-scale electroplating device was designed and fabricated for Ni-63 sealed source (foil type) with a high specific activity needed for production of betavoltaic battery. The condition of Ni electroplating was optimized by using fabricated electroplating device to establish a Ni-63 electroplating condition on the Ni foil. The results showed that the optimum surface morphology and thickness of Ni deposit was obtained for 1,758 seconds at a current density of $15mA{\cdot}cm^{-2}$ with 0.5% tween 20. Radioisotope Ni-63 electroplating was implemented under established condition. The radioactivity of Ni-63 sealed source was calculated to $28mCi{\cdot}cm^{-2}$, and the thickness of Ni-63 deposit was about $2.4{\mu}m$.

• 대한기계학회논문집B
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• 제26권4호
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• pp.524-530
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• 2002

Micro electric spark discharge device was fabricated on a FOTURAN glass wafer using MEMS processing technique and its performance of electron discharge and subsequent formation of ignition kernel were tested. Micro electric spark device is an essential subsystem of a power MEMS that has been under development in this laboratories. In a combustion chamber of sub millimeter scale depth, spark electrodes are formed by electroplating Ni on a base plate of FOTURAN glass wafer. Optimization of spark voltage and spark gap is crucial for stable ignition and endurance of the electrodes. Namely, wider spark gaps insures stable ignition but requires higher ignition voltage to overcome the spark barrier. Also, electron discharge across larger voltage tends to erode the electrodes limiting the endurance of the overall system. In the present study, the discharge characteristics of the proptotype ignition device was measured in terms of electric quantities such as voltage and currant with spark gap and end shape as parameters. Discharge voltage shows a little decrease in width of less than 50㎛ and increases with electrode gap size. Reliability test shows no severe damage over 10$\^$6/ times of discharge test resulting in satisfactory performance for application to proposed power MEMS devices.

• 전기학회논문지
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• 제56권8호
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• pp.1436-1440
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• 2007

Beryllium copper has been known to be an important material for the various fields of industry because it can be used for mechanical and electrical/electronic components that are subjected to elevated temperatures (up to $400^{\circ}C$ for short times). Blade type tip for probing the cells of liquid crystal display(LCD) was fabricated using beryllium copper foil. The dry film resist was employed as a mask for patterning of the blade type tip. The beryllium copper foil was etched using hydrochloric acidic iron-chloride solution. The concentration, temperature, and composition ratio of hydrochloric acidic iron-chloride solution affect the etching characteristics of beryllium copper foil. Nickel with the thickness of $3{\mu}m$ was electroplated on the patterned copper beryllium foil for enhancing its hardness, followed by electroplating gold for increasing its electrical conductivity. Finally, the dry film resist on the bridge was removed and half of the nickel was etched to complete the blade type tip.

• 한국자기학회지
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• 제18권2호
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• pp.49-53
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• 2008

50 nm pitch의 magnetic dot pattern을 갖는 hard disk drive용 patterned media를 nanoimprint lithography(NIL) patterning과 electroplating 공정을 이용하여 제작하고 자기 및 결정구조 특성을 관찰하였다. Patterned media는 Si(100) wafer 위에 Ru(20nm)/Ta(5 nm)/$SiO_2$(100 nm)를 순차적으로 증착한 후 nanoimprint lithography를 이용하여 25 nm half pitch의 hole pattern을 형성하고 그 후 패터닝된 기판을 plasma ashing 공정을 이용하여 기판의 Ru층을 노출시킨뒤 electroplating을 이용하여 Co-Pt 합금막을 증착하여 제작하였다. Magnetic force microscopy(MFM) 분석을 이용하여 제작된 각각의 magnetic dot pattern이 single domain 특성과 수직자기이방성을 가지고 있음을 확인하였고, superconducting quantum interference device(SQUID) 분석을 통하여 2900 Oe이상의 높은 수직방향 보자력을 확인하였다.

• 한국전기전자재료학회논문지
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• 제16권12S호
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• pp.1237-1241
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• 2003

In this paper, we report a novel RF-MEMS packaging technology with lightweight, small size, and short electric path length. To achieve this goal, we used the ultra thin silicon substrate as a packaging substrate. The via holes lot vortical feed-through were fabricated on the thin silicon wafer by wet chemical processing. Then, via holes were filled and micro-bumps were fabricated by electroplating. The packaged RF device has a reflection loss under 22 〔㏈〕 and a insertion loss of -0.04∼-0.08 〔㏈〕. These measurements show that we could package the RF device without loss and interference by using the vertical feed-through. Specially, with the ultra thin silicon wafer we can realize of a device package that has low-cost, lightweight and small size. Also, we can extend a 3-D packaging structure by stacking assembled thin packages.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 추계학술대회 논문집 전기물성,응용부문
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• pp.95-96
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• 2006

ITO thin film is generally fabricated by various methods such as spray, CVD, evaporation, electron gun deposition, direct current electroplating, high frequency sputtering, and reactive DC sputtering. However, some problems such as peaks, bumps, large particles, and pin-holes on the surface of ITO thin film were reported, which caused the destruction of color quality, the reduction of device life time, and short-circuit. Chemical mechanical polishing (CMP) process is one of the suitable solutions which could solve the problems.

• 한국과학예술포럼
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• 제20권
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• pp.421-428
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• 2015

전기/하이브리드 자동차, 도금용 정루기 등에 들어가는 전력변환장치는 SCR, MOSFET, IGBT와 같은 스위칭 소자가 필수적으로 사용되며 이를 구동하기 위해서는 Gate Driver가 역시 필수적으로 사용된다. 본 논문에서는 대용량 전력변환장치에 사용되는 스위칭소자 SCR/IGBT를 구동하는데 필요한 Gate Driver를 제안한다. 제안된 Gate Driver는 4개의 BJT를 이용한 H-Bridge를 포함하며, 이는 입력된 DC 전력을 AC로 변환하여 Transformer를 통하여 Isolate 된 전원을 생성한다. 또한 Gate 제어 신호는 입력 전원과 Isolated된 전원이 연결된 Photo Coupler를 통해 Isolate된 제어 신호로 변환하여 실제 SCR/IGBT를 구동한다. 본 논문에서는 Simulation을 통해서 설계된 555 Timer를 통한 H-Bridge 동작을 검증하며 시제품을 제작하여 27V 50,000A 급의 도금용 정류기를 구동시켜 파형을 확인함으로써 제안된 Gate Driver의 타당성을 검증한다.

• Corrosion Science and Technology
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• 제23권3호
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• pp.215-220
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• 2024

Recently, the demand for Zn-Ni electrogalvanized steel sheets for home appliances and automobiles is increasing. Products should have a thick plating (30 to 40 g/m²) on both side with a thin thickness (≤ 0.8 mm) and the highest surface quality. By a high current density operation, current is concentrated in the edge part of the steel sheet, resulting in large surface dent defects due to dendritic plating. This can lead to a low productivity due to low line speed operation. To solve this problem, this study aimed to identify factors influencing dendritic plating. A cylindrical electroplating device was manufactured. Effects of cut edge shape and thickness of steel plate, current density, temperature, flow rate, electrolyte concentration, and pH on dendrite generation of Zn-Ni electroplating were examined. To investigate effect of edge shape of the steel sheet, the steel sheet was manufactured using three processing methods: shearing, polishing after shearing, and laser. Relative effects thickness and cut edge processing methods of the steel plate, current density, temperature, flow rate, electrolyte concentration, and pH of plating solution on dendrite plating were investigated. To prevent dendrite plating, an edge mask was manufactured and its application effect was investigated.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1994년도 하계학술대회 논문집 A
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• pp.85-87
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• 1994

Feeding biological cells one by one is the key point in the manipulation of cells. The conventional valve systems have many difficulties in feeding cells one by one, because they shut the whole flow of fluids when they are closed and have possibilities of breaking the fragile cells. They need some other equipments for continuous supply of suspension and to protect the cells. We design a check valve for feeding biological cells one by one using polyimide all the silicon substrate. The cells are fed by hydraulic pressure through the isotropically etched cavity. When the suspension flows continuously along the channel the valve is bent by hydraulic pressure and a cell is fed to the outlet. We have studied a cell fusion device fabricated with polyimide and electroplating. If the designed check valve is located in front of the cell fusion device it is helpful to fuse two different kinds of cells.