• Proceedings of the KIEE Conference
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• 1989.11a
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• pp.145-148
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• 1989

Plasma diagnostics using Langmuir Probe is of wide application because of its simplicity in measurement of electron temperatures and densities. Current methods using simple circuit and analog meters, however, have troubles when they are applied to time-varying or thermal plasmas. To overcome these problems and expand the area of applicability, we have designed fast electronic voltage sweeping circuit in which we can detect digital data. Diagnostics using our digital Langmuir Probe is performed in various kinds of plasmas and the results are shown. Our method can be applied to measuring electron temperature and density of high temperature or time-varying plasmas. And we expect further knowledge of each state of plasma.

• Proceedings of the KIEE Conference
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• 1997.07e
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• pp.1657-1659
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• 1997

Electron temperature and electron density were measured in a radio-frequency inductively coupled plasma (RFICP) using a probe measurements. Measurement was conducted in an argon discharge for pressures from 10 [mTorr] to 40 [mTorr] and input rf power from 100 [W] to 800 [W], Ar flow rate from 5 [sccm] to 30 [sccm], Spatial distribution electron temperature and electron density were measured for discharge with same aspect ratio (R/L=2). Electron temperature and electron density were discovered depending on both pressure and power, Ar flow rate. Electron density was increased with increasing input power and in creasing pressure, increasing Ar flow rate. Radial distribution of the electron density was peaked in the plasma center. Normal distribution of the electron density was peaked in the center between quartz plate and substrate. From these results, We found out the generation mechanism of Radio-Frequency Inductively Coupled Plasma.

• Proceedings of the Korea Air Pollution Research Association Conference
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• 2002.11a
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• pp.350-351
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• 2002

대기 중 부유 입자상물질(에어로졸)은 지구 대기 환경과 기후, 그리고 인체 건강에 영향을 미치는 까닭에, 에어로졸을 효과적으로 분석하는 방법을 개발하는 연구는 매우 중요하다. 특히 한국과 일본에서는 매년 봄 중국에서 발원하여 동북부 아시아로 이동하는 황사(Asian Dust) 현상이 매우 중요한 관심 대상이다. 이것은 황사 입자가 중국의 공업단지인 중국 북동부를 거쳐오면서, 황산염이나 질산염, 해염 입자와 반응하여 한국이나 일본, 태평양으로 이동시킬 수 있다는 점에서 중요하게 여겨진다. (중략)

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.208-208
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• 1999

It is found that with increasing power, the measured electron energy distribution by Langmuir probe evolves into a Druyvesteyn-like electron energy distribution in the low-pressure regime of 1mTorr in a small inductively coupled plasma. Electron bounce resonance is introduced to explain the transition of the electron energy distribution against the rf power, The energy diffusion coefficients which determine the shape of the electron energy distribution in elastic range are calculated with and without electron bounce resonance. This electron energy distribution transition is well explained by the electron bounce resonance.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1844-1847
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• 1996

In the paper, we have obtained electron energy distribution function (EEDF) in plasma by using two differentiators. In addition, we have investigated the comparision of the EEDFs by sawtooth and triangle waveform voltages. It is found that as pressure is decreased, electron density is decreased, and plasma potential is increased. And as the position of probe moves the outer of plasma, plasma potential is decreased, and electron temperature is decreased.

• Applied Microscopy
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• v.45 no.3
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• pp.131-134
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• 2015

Here we show how by processing energy dispersive X-ray spectrometry (EDS) data obtained using highly sensitive, new generation EDS detectors in the AZtec LayerProbe software we can obtain data of sufficiently high quality to non-destructively measure the number of layers in two-dimensional (2D) $MoS_2$ and $MoS_2/WSe_2$ and thereby enable the characterization of working devices based on 2D materials. We compare the thickness measurements with EDS to results from atomic force microscopy measurements. We also show how we can use electron backscatter diffraction (EBSD) to address fabrication challenges of 2D materials. Results from EBSD analysis of individual flakes of exfoliated $MoS_2$ obtained using the Nordlys Nano detector are shown to aid a better understanding of the exfoliation process which is still widely used to produce 2D materials for research purposes.

• Nuclear Engineering and Technology
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• v.56 no.9
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• pp.3961-3968
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• 2024

The Korea Atomic Energy Research Institute (KAERI) is developing a novel Two-Region Arc Plasma Ion Source (TRAP) as a negative hydrogen (deuterium) ion source for a Neutral Beam Injection (NBI) system in a fusion tokamak. The TRAP ion source is based on a two-region configuration, comprising a high energy electron region that creates highly vibrationally excited molecules and a low electron temperature region that generates negative ions by attaching electrons to molecules. This configuration can be achieved by optimizing the filament position and magnetic cusp field. In order to optimize the TRAP configuration, the plasma parameters are investigated under various operating conditions, such as filament position, gas pressure, and arc power. Electron density and temperature are determined using Langmuir probe measurements. In this paper, the detailed experimental results are described and discussed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.11a
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• pp.461-462
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• 2007

• 한국전자현미경학회:학술대회논문집
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• 1999.05a
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• pp.47-47
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• 1999

• Biomedical Science Letters
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• v.2 no.2
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• pp.257-265
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• 1996

Simple stain and electron microscopic in situ hybridization is studied and applied for the identification of rabbit haemorrhagic disease viral RNA in a unicrylated preparation of the liver after innoculation of rabbit haemorrhagic disease virus. Hybridization for detection of viral RNA in unicryl embedded tissues using complementary 84 bases oligonucleotide probe labelled by biotin CE-phosphoramidite compared with 4717∼4800 sequences of rabbit haemorrhagic disease virus, modified hybridization protocol and antibiotin antibody-l0nm gold as signal marker. The best results were obtained in 0.02% glutaraldehyde, Unicryl resin cell block, biotinylated oligonucleotide probes, antibiotin-l0nm gold. In this report, RHD viral RNA was distributed widely within the mitochondria and nucleus of liver cell by electron microscopic in situ hybridization. In situ hybridization has become a standard method for localizing DNA or RNA sequences in tissue or celt preparation. In situ hybridization is detected the virus genome in the cells and tissue as specifically compared with others nucleic acid hybridization method.