Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1996.07c
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- Pages.1844-1847
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- 1996
A Study on the Comparision of Electron Energy Distribution Function measured by sawtooth and triangle waveform probe bias voltages
톱니파 및 삼각파 프로브 bias 전압에 의해 측정된 전자에너지 분포함수의 비교에 관한 연구
- Kim, D.H. (Department of Electrical Engineering, Pusan National University) ;
- Shin, J.H. (Department of Electrical Engineering, Dong Eui University) ;
- Kim, G.S. (Department of Electrical Engineering, Dong Myung Junior Collage) ;
- Park, Y.C. (Department of Electrical Engineering, Pusan National University) ;
- Cho, J.S. (Department of Electrical Engineering, Pusan National University) ;
- Park, C.H. (Department of Electrical Engineering, Pusan National University)
- 김두환 (부산대 전기공학과) ;
- 신중흥 (동의대 전기공학과) ;
- 김규섭 (동명전문대 전기과) ;
- 박영찬 (부산대 전기공학과) ;
- 조정수 (부산대 전기공학과) ;
- 박정후 (부산대 전기공학과)
- Published : 1996.07.22
Abstract
In the paper, we have obtained electron energy distribution function (EEDF) in plasma by using two differentiators. In addition, we have investigated the comparision of the EEDFs by sawtooth and triangle waveform voltages. It is found that as pressure is decreased, electron density is decreased, and plasma potential is increased. And as the position of probe moves the outer of plasma, plasma potential is decreased, and electron temperature is decreased.
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