• 제목/요약/키워드: Dry Process

검색결과 1,761건 처리시간 0.035초

Reactive Ion Etching of a-Si for high yield and low process cost

  • Hur, Chang-Wu
    • Journal of information and communication convergence engineering
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    • 제5권3호
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    • pp.215-218
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    • 2007
  • In this paper, amorphous semiconductor and insulator thin film are etched using reactive ion etcher. At that time, we experiment in various RIE conditions (chamber pressure, gas flow rate, rf power, temperature) that have effects on quality of thin film. The using gases are $CF_4,\;CF_4+O_2,\;CCl_2F_2,\;CHF_3$ gases. The etching of a-Si:H thin film use $CF_4,\;CF_4+O_2$ gases and the etching of $a-SiO_2,\;a-SiN_x$ thin film use $CCl_2F_2,\;CHF_3$ gases. The $CCl_2F_2$ gas is particularly excellent because the selectivity of between a-Si:H thin film and $a-SiN_x$ thin film is 6:1. We made precise condition on dry etching with uniformity of 5%. If this dry etching condition is used, that process can acquire high yield and can cut down process cost.

Orchargrass의 식생 구조 IIV. 영년초지에서의 건물생산 (Vegetation Structure of Orchrdrrass Sward IV. Dry matter production in permanent pasture)

  • 이주삼
    • 한국초지조사료학회지
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    • 제9권2호
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    • pp.77-81
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    • 1989
  • This experiment was conducted to elucidate the changes of dry matter production in permanent pasture and its relation with relative yield of the 1st cutting, regrowth capacity, and persistance of orchardgrass sward, based on the data of preceeding The results were summarized as follows; 1. Relationship between relative yield of the 1st cutting and regrowth capacity were changed by the times of established pasture. Thus, the relative yield of the 1st cutting have negative significant correlation (P < -0.001) with regrowth capacity. 2. Regrowth capacity(RC) was positively significant correlations with the dry weight of plant (DW/pl.), number of tillers per plant (NT/pl.), plant size(PS) and distance between adjacent plants (DIS) of the 1st cutting. Also, regrowth capacity(RC) was positively correlations with the dry weight of plant (DW/pl.), number of tillers per plant (NT/pl.), stubble diameter(DIA), stubble area(SB), plant size(PS) and distance between adjacent plants(D1S) of the 2nd cutting. 3. The coefficients of regression of the 1st cutting showed a tendency to slightly decrease, on the other hand, the 2nd cutting and total yield were tended to increase by the times of established pasture. 4, Between the regrowth capacity and persistency were may deeply concerned to the changes of dry matter production in permanent pasture. 5. The process of dry matter production in permanent pasture can be shown in following diagrams.

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양이온성 PVAm - 음이온성 PAM 건조지력증강제 시스템의 크라프트지 적용 사례 (Application of Cationic PVAm - Anionic PAM Dry Strength Aids System on a Kraft Paper Mill)

  • 조병욱;류정용;손동진;송봉근
    • 펄프종이기술
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    • 제42권3호
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    • pp.50-57
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    • 2010
  • A mill trial was performed in a kraft paper mill in order to evaluate the possibility of utilizing dual polymer dry strength aids system consisting of cationic PVAm and anionic PAM. It was found that the cationic PVAm - anionic PAM dry strength additives can improve paper strength without significantly disturbing the stability of the kraft papermaking process when virgin UKP was used as a furnish. Tensile strength (25.3% in machine direction, 48.4% in cross machine direction), elongation of paper (31.6%, 15.6%) and tensile energy absorption (48%, 54%) were improved. Air permeability of the kraft paper was improved as well (22%). Tear strength was decreased with PVAm dry strength aids system, but it can be compensated with decreasing refining degree. In addition, the mill trial results indicate that highly air permeable kraft sack paper can be produced by the addition of PVAm dry strength agents at the stock with reduced freeness.

스크류 형 건식진공펌프 기술 현황 및 응용 (Screw-type Dry Vacuum Pump Technology and Application in Semiconductor Process)

  • 노명근;황태경;박제우
    • 한국진공학회지
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    • 제17권4호
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    • pp.292-301
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    • 2008
  • 반도체 및 디스플레이 공정과 같이 진공의 높은 청결도의 진공이 필수적으로 요구되어 지는 산업분야가 확대됨에 따라 건식진공펌프의 중요성은 급격히 증대되어 왔다. 다단루츠형 진공펌프와 함께 건식진공펌프 양대 축의 하나를 형성하는 스크류형 건식진공펌프는 공정부산물 발생이 많은 고 난이도 응용분야에서 그 장점을 발휘하여 왔다. 최근 들어 에너지 효율이 획기적으로 개선된 스크류형 건식진공펌프의 개발이 활발히 진행되고 있다. 이 총설논문에서는 스크류형 건식진공펌프의 전반적 기술사항들을 살펴보고 실제 반도체 공정에의 응용 및 스크류형 건식진공펌프의 향후 발전 방향에 대하여 살펴보았다.

Effects of wilting on silage quality: a meta-analysis

  • Muhammad Ridla;Hajrian Rizqi Albarki;Sazli Tutur Risyahadi;Sukarman Sukarman
    • Animal Bioscience
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    • 제37권7호
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    • pp.1185-1195
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    • 2024
  • Objective: This meta-analysis aimed to evaluate the impact of wilted and unwilted silage on various parameters, such as nutrient content, fermentation quality, bacterial populations, and digestibility. Methods: Thirty-six studies from Scopus were included in the database and analyzed using a random effects model in OpenMEE software. The studies were grouped into two categories: wilting silage (experiment group) and non-wilting silage (control group). Publication bias was assessed using a fail-safe number. Results: The results showed that wilting before ensiling significantly increased the levels of dry matter, water-soluble carbohydrates, neutral detergent fiber, and acid detergent fiber, compared to non-wilting silage (p<0.05). However, wilting significantly decreased dry matter losses, lactic acid, acetic acid, butyric acid, and ammonia levels (p<0.05). The pH, crude protein, and ash contents remained unaffected by the wilting process. Additionally, the meta-analysis revealed no significant differences in bacterial populations, including lactic acid bacteria, yeast, and aerobic bacteria, or in vitro dry matter digestibility between the two groups (p>0.05). Conclusion: Wilting before ensiling significantly improved silage quality by increasing dry matter and water-soluble carbohydrates, as well as reducing dry matter losses, butyric acid, and ammonia. Importantly, wilting did not have a significant impact on pH, crude protein, or in vitro dry matter digestibility.

습·건열 열고정 조건이 스트레치 직물의 역학특성과 의류형성성능에 미치는 영향 (Effect of Wet and Dry Thermal Setting Conditions of Stretch Fabric to Fabric Mechanical Property and Garment Formability)

  • 김현아;김승진
    • 한국의류산업학회지
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    • 제20권1호
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    • pp.83-92
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    • 2018
  • This paper investigated garment formability and fabric mechanical properties of one-way and two-way stretch fabrics according to the thermal treatment methods. One-way and two-way stretch fabrics were woven using 75d and 150d PET/spandex covering yarns and then these were wet thermal treated with four kinds of finishing machines. The fabric mechanical properties of these stretch fabrics specimens were measured and compared with the regular PET fabrics. The stretch ratio of one-way stretch fabric was ranged 12 to 26 percentage, 15 to 45 percentage for 2-way stretch fabrics and 4 to 10 percentage for regular fabrics. Garment formability of stretch fabric was superior than that of regular fabrics, in addition, 2-way stretch fabric was better than one-way. The garment formability of the stretch fabrics treated with CPB and Lava wet thermal machines showed the highest values, and the stretch ratio of these 2-way stretch fabrics was also the highest, which was ranged 20 to 45 percentage. This phenomenon was assumed to be due to high extensibility and bending rigidity with low shear modulus of the 2-way stretch fabric treated with CPB and Lava wet thermal machines. It was shown that the garment formability of stretch fabrics treated without dry thermal treatment was higher than that of dry thermal treated fabrics. It revealed that high stretch fabric was available under the condition of low process tension in the wet and dry thermal treatments of the finishing process, which makes high garment formability.

습윤준설토와 노건조준설토의 약품처리 후 공학적 특성에 관한 실험적 연구 (An Experimental Study on Engineering Characteristics of Wet Dredged Soil and Dry Dredged Soil after Chemical Treatment)

  • 장용채;박기윤;박종철;이인규
    • 한국지반환경공학회 논문집
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    • 제13권3호
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    • pp.71-76
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    • 2012
  • 자연상태의 퇴적물과 준설과정을 거친 준설토 사이에는 퇴적물이 안정상태에서 교란되기 때문에 수질의 탁도가 좋지 않으며, 다시 침강 시 체적변화가 발생한다. 이에 수질의 탁도를 좋게하고 준설토의 부유물질의 침강을 촉진하기 위하여 투입되는 응결제 및 응집제의 양에 따라 준설토는 다양한 특징을 보인다. 본 연구에서는 자연상태의 습윤준설토와 노건조준설토에 약품회사 A, B, C사의 약품투입량에 따른 준설토의 부유물질(SS)측정, 체적변화 및 침강속도의 특성분석을 파악하고자 연구를 수행하였다. 실험 결과 습윤준설토와 노건조준설토의 약품량이 많을수록 부유물질(SS)측정은 낮아지고, 체적변화율은 증가하는 경향을 보이고 있으며, 침강속도는 빨라지는 경향을 보였다. 또한 습윤준설토와 노건조준설토의 약품량의 차이는 노건조준설토 경우 $100{\pm}5^{\circ}C$에서 건조시키기 때문에 유기물 및 미생물이 소멸하여 적은 양으로도 약품에 민감한 반응을 보이는 것으로 판단된다.

후막 Na β"-Alumina 복합 고체 전해질 및 Gel-Type 유황 양극을 활용한 상온형 Na-S 전지의 특성 평가 (Room Temperature Na/S Batteries Using a Thick Film of Na β"-Alumina Composite Electrolyte and Gel-Type Sulfur Cathode)

  • 이진실;유학균;이윤기;김재광;주종훈
    • 한국전기전자재료학회논문지
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    • 제33권5호
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    • pp.411-417
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    • 2020
  • In this study, we introduce a Na β"-alumina composite thick film as a solid electrolyte, to reduce the resistance of electrolyte for a Na/S battery. An alumina/zirconia composite material was used to enhance the mechanical properties of the electrolyte. A solid electrolyte of about 40 ㎛ thick was successfully fabricated through the conversion and tape-casting methods. In order to investigate the effect of the surface treatment process of the solid electrolyte on the battery performance, the electrolyte was polished by dry and wet processes, respectively, and then the Na/S batteries were prepared for analyzing the battery characteristics. The battery with the dry process performed much better than the battery made with the wet process. As a result, the battery manufactured by the dry process showed excellent performance. Therefore, it is confirmed that the surface treatment process of the solid electrolyte has an important effect on the battery capacity and coulombic efficiency, as well as the interface reaction.

플라즈마 처리에 의한 마스크 특성 변화 (The Characteristic Variation of Mask with Plasma Treatment)

  • 김좌연;최상수;강병선;민동수;안영진
    • 한국전기전자재료학회논문지
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    • 제21권2호
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    • pp.111-117
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    • 2008
  • We have studied surface roughness, contamination of impurity, bonding with some gas element, reflectance and zeta potential on masks to be generated or changed during photolithography/dry or wet etching process. Mask surface roughness was not changed after photolithography/dry etching process. But surface roughness was changed on some area under MoSi film of Cr/MoSi/Qz. There was not detected any impurity on mask surface after plasma dry etching process. Reflectance of mask was increased after variable plasma etching treatment, especially when mask was treated with plasma including $O_2$ gas. Blank mask was positively charged when the mask was treated with Cr plasma etching gas($Cl_2:250$ sccm/He:20 $sccm/O_2:29$ seem, source power:100 W/bias power:20 W, 300 sec). But this positive charge was changed to negative charge when the mask was treated with $CF_4$ gas for MoSi plasma etching, resulting better wet cleaning. There was appeared with negative charge on MoSi/Qz mask treated with Cr plasma etching process condition, and this mask was measured with more negative after SC-1 wet cleaning process, resulting better wet cleaning. This mask was charged with positive after treatment with $O_2$ plasma again, resulting bad wet cleaning condition.

볼 엔드밀 가공환경 조건이 고경도 강재의 절삭 특성에 미치는 영향 (Effect of Ball End Mill Cutting Environments on Machinability of Hardened Tool Steel)

  • 이영주;원시태;허장회;박동순
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2003년도 추계학술대회논문집
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    • pp.245-250
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    • 2003
  • This research conducted milling tests to study effects of cutting environment conditions of ball end mills on the characteristics of hard milling process. KP4 steels and STD11 heat treated steels were used as the workpiece and WC-Co ball end mill tools with TiAIN coated were utilized in the cutting tests. Dry cutting without coolant and semi-dry cutting using botanical oil coolant were conducted and MQL (Minimum Quantity Lubricant) device was used to spray coolant. Cutting forces, tool wear and surface roughness were measured in the cutting tests. Results showed that dry cutting of KP4 and hardened STD11 specimens produced better surface quality and wear performance than MQL spray cutting did.

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