• 한국정밀공학회지
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• 제19권1호
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• pp.65-70
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• 2002

An analysis method for calculating motion accuarcy of double sides hydrostatic table is proposed in this paper. In this method, profiles of each rails are assumed as periodic function, therefore it is represented as the sum of spacial frequencies. Bearing clearance at any position rail is depended on the variation of linear, angular motion error of table and the form errors of both sides of a rail. Finite element method is applied to calculate pressure distributions in bearing clearance. In order to simplify the analyzing process, double sides table model is converted into equivalent single side table model. Results calculated by the proposed modeling method agree well with the results directly caculated by double sides modeling method, and also agree well with experimental results. From the theoretical and experimental analysis, it is verified that the proposed analysis method is very effective to analyze the motion accuracy of double sides hydrostatic table.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.188-192
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• 2000

An analysjs model for calculation the motion accuarcy of double sides hydrostatic table is proposed in thn paper. For the analysis of motion accuracy, profiles of each rails are assumed as periodic function, and represented using Fourier coefficients. Variahon of bearing clearance is represented as the vanation of linear, angular displacement of table and profiles of rails. Motion accuracy is calculated in the basis of finite element analysis on the pressure dutributmn of table. In order to improve calculating time in the analysis of motion accuracy, The proposed modeling method converts double sides table to single side table equivalently Results by the proposed method 1s compared with directly caculated results mdyhcally, and also compared wlth experimental results. From the theoretical and experimental analysis, it is confirmed that the proposed modeling mothod is very effective to analyze the motion accuracy of dauble sides hydrostatic table.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.425-428
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• 1997

Effectiveness of corrective machining algorithm is verified experimentally in this paper by performing corrective lapping work to single side and double sides hydrostatic tables. Lapping is applied as machining method. Machining information is calculated from measured motion errors by applying the algorithm, without information on rail profile. It is possible to acquire 0.13pm of linear motion error, 1.40arcsec of angular motion error in the case of single side table, and 0.07pm of linear motion error, 1.42arcsec of angular motion error in the case of double sides table. The experiment is performed by the unskilled person after he experienced a little of preliminary machining. Experimental results show that corrective machining algorithm is very effective, and anyone can improve the accuracy of hydrostatic table by using the algorithm.

• 한국정밀공학회지
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• 제19권6호
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• pp.70-76
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• 2002

Effectiveness of corrective machining algorithm is verified experimentally in this paper by performing corrective machina work practically to single side and double sides hydrostatic tables. Lapping is applied as machining method. Machining information is calculated from measured motion errors by applying the algorithm, without information on rail profile. It is possible to acquire 0.13$\mu$m of linear motion error, 1.40arcsec of angular motion error in the case of single side table, and 0.07$\mu$m of linear motion error, 1.42arcsec of angular motion error in the case of double sides table. The experiment is performed by an unskilled person after he experienced a little of preliminary machining training. Experimental results show that corrective machining algorithm is very effective, and anyone can improve the accuracy of hydrostatic table by using the algorithm.

• International Journal of Precision Engineering and Manufacturing
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• 제4권2호
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• pp.57-63
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• 2003

A new method using a transfer function was proposed in the previous paper for analyzing motion errors of hydrostatic tables. The calculated motion errors by the new method, named as the transfer (unction method (TFM), were compared with the results by the conventional multi pad method, and the validity of the proposed method was theoretically verified. In this paper, the relationship between rail form error and motion errors of a hydrostatic table is examined theoretically in order to comprehand so-called 'the averaging effect of an oil film', and the characteristics of the motion errors in a hydrostatic table is tested. The tested hydrostatic table has three single-side pads in the vertical direction and three pairs of double-sides pads in the horizontal direction. The motion errors are tested for three rails which have different form errors. The experimental results are compared with the theoretical results calculated by the TFM, and both results show good agreement. From the results, it is shown that the TFM is very effective to analyze the motion errors of hydrostatic tables.

• 대한치과교정학회지
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• 제16권2호
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• pp.43-51
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• 1986

The highly accurate laser holographic interferemotry method was used to determine in what way low-magnitude forces during maxillary expansion are transmitted to the entire maxillary complex and its surrounding structures. The experiments were carried out on a dryed human skull which had a perfectly preserved, normally aligned maxillary dental arch and intact alveolar process. The skull was fixed within a constructed metal frame which ensured maximal stability of the object. The optical equipment and the object were mounted on antivibration table. Interferograms were taken on the lateral and frontal sides of the maxillary complex, using the 10mW He-Ne laser and the double-exposure method. Analysis of the fringe pattern on the recorded object surface was performed by graphically determining the deformation curves related to the bony surface in selected horizontal and vertical planes. On the basis of this study, the following conclusions can be drawn: 1. The density of the interference fringes was gradually increased with the degree of expansion force. 2. Mechanical reactions on the maxillary complex, circummaxillary sutures, and surrounding bones were clearly visible, even with the lowest loading degree. 3. The amount of bone displacement was greater in application of the force after $90^{\circ}$ turn than in initial application of the same force. 4. The direction of interference fringes on the bony surface was similar at all loading degrees.