• 한국염색가공학회지
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• 제26권2호
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• pp.99-105
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• 2014

In this study, $TiO_2$ and Ag powders were deposited on the PET fabric using an atomizer in order to study the characteristics of particle deposited fabric. To improve the particle deposition, the surface of the fabric was pre-treated with an electron beam and its effect was studied with the deposition of those elements on the fabric. The SEM was used to observe the morphology of the deposition fabric and through the EDS analysis, the deposition of $TiO_2$ and Ag was confirmed. Also, the absorbance of the particle deposited fabric was measured using the Methylene Blue to verify the photolysis nature of $TiO_2$. Moreover, the antibiotic nature of Ag on the surface of the PET fabric was identified through the antibiosis test.

• 한국초전도ㆍ저온공학회논문지
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• 제9권1호
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• pp.18-21
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• 2007

Highly textured MgO template by ion-beam-assisted deposition(IBAD) was successfully fabricated using a continuous reel-to-reel(R2R) mode. To enlarge the deposition area, the previous IBAD system was modified into the system with 14-pass and five heating zone. Every processing step was carried out using this multi-turn IBAD system. The overall process consists of R2R electropolishing of a hastelloy C276 tape, deposition of $Al_2O_3$ diffusion barrier, $Y_2O_3$ seed layer, IBAD-MgO and homoepi-MgO layer. The IBAD-MgO templates were fabricated using the IBAD system with 216 cm-length deposition zone and 32 cm diameter ion source. The texture of MgO films developed during the IBAD process was monitored by in-situ reflection high energy electron diffraction(RHEED) to optimize the IBAD process. Recently, 100 m long IBAD-MgO tape with in-plane texture of $\Delta{\phi}<10^{\circ}$ was successfully fabricated using the modified IBAD system. In this report, the detailed deposition condition of getting a long length IBAD-MgO template with a good epitaxy is described.

• 한국대기환경학회지
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• 제12권1호
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• pp.101-112
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• 1996

Dry and wet deposition is an impertant removal mechanism of the amobient aerosol in the atmospheric environment. Since the deposition flut provides adverse impacts on various encironmental media including aquatic and ecological system as well as human health, it is essential to quantitatively estimate the removal fluxes of many air pollutants. Thus, the purposes of this experimental study are to investigate seasonal deposition flux variations of the total dustfall and various inorganic elements in the local ambient air and then to finally estimate their dry deposition velocities. To perform the study, the total of 90 dustfall samples were collected from January, 1994 thru February, 1995 in 5 different cities of Korea including Seoul, Suwon, Daejon, Kwangju, and Kangrung. Each sample was analyzed by an AAS and an ICP to determine the quantities of the 11 inorganic elements, such as Zn, Cd, Cr, K, Na, Pb, Ca, Fe, Mn, Mi, and Cu. As results, deposition fluxes, soluble/insoluble fractions, and deposition velocities for each element were extensively investigated. The resulting dry deposition velocities of some elements in Suwon were estimated by ranges of 0.57 .sim. 0.87 cm/sec for Zn, 0.35 .sim. 0.45 cm/sec for Pb, 1.25 .sim. 3.52 cm/sec for Ca, 0.21 .sim. 0.48 cm/sec for Fe, 0.95 .sim. 9.31 cm/sec for Mn, and 2.08 cm/sec for Cu.

• 한국식품영양과학회지
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• 제28권1호
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• pp.178-190
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• 1999

This study was conducted to develop a simulation model for the growth dynamics of pigs and to describe quantitatively protein deposition depending on the amino acid composition of feed protein. In the model it is assumed that the essential processes that determine the utilization of feed protein in the whole body are protein synthesis, breakdown of protein, and oxidation of amino acid. Besides, it is also assumed that occurrence of protein deposition depends on genetic potential and amino acid composition of feed protein. The genetic potential for the protein deposition is the maximum capacity of protein synthesis, being dependent on the protein mass of the whole body. To describe the effect of amino acid composition of feed on the protein deposition, a factor, which consist of ten amino acid functions and lie between 0 and 1, is introduced. Accordingly a model was developed, which is described with 15 flux equations and 11 differential equations and is composed of two compartments. The model describes non linear structure of the protein utilization system of an organism, which is in non steady state. The objective function for the simulation was protein deposition(g/day) cal culated according to the empirical model, PAF(product of amino acid functions) of Menke. The mean of relative difference between the simulated protein deposition and PAF calculated values, lied in a range of 11.8%. The simulated protein synthesis and breakdown rates(g/day) in the whole body showed a parallel behavior in the course of growth.

• 공업화학
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• 제34권4호
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• pp.383-387
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• 2023

범용적으로 고진공 성막 장비에서 사용되는 quartz crystal microbalance (QCM)는 두꺼운 필름이 quartz 위에 성막되는 경우, 크리스탈 고유의 진동에 영향을 주어 사용이 어려워진다. 본 논문에서는 실시간 필름 증착 공정 중에 센서의 손상이 없는 광학적 계측 방식을 통해 필름의 성막 속도를 측정하는 방법을 연구하였다. 기체 이동 경로로 지나가는 페럴린 가스 중 다이머에 의한 레이저의 산란 정도를 측정하여, 페럴린 공정의 분해부 온도가 감소할수록 페럴린 가스 중 다이머의 비율이 증가하는 것을 성공적으로 확인하였다. 또한, 성막된 필름의 특성을 확인한 결과, 분해부 온도가 감소할수록 필름의 두께와 haze가 증가한 것을 확인할 수 있었다. 우리는 연구 결과를 통해 개발한 안정적인 실시간 성막 속도 계측 시스템을 이용함으로써, 진공 공정을 통해 성막하는 페럴린 필름의 정밀한 성막 속도 제어에 활용하고자 한다.

• 한국진공학회지
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• 제9권3호
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• pp.197-206
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• 2000

(hfc)Cu(1,5-COD)(1,1,1,5,5,5-hexafluoro-2,4-pentadionato Cu(I) 1,5-cyclooctadine) 증착원을 이용하여 MOCVD(Metal Organic Chemical Vapor Deposition) Cu박막을 형성하였고, 운반기체가 MOCVD Cu 증착 특성에 미치는 영향에 관하여 조사하였다. 증착된 Cu 박막은 $H_2$ 운반 기체를 사용한 경우 Ar을 운반기체로 사용한 경우에 비하여 증착률의 증가와 더불어 낮은 비저항을 갖는 박막을 얻을 수 있었다. 또한 표면 거칠기의 개선과 강한 (111) 우선 배향성을 나타내는 박막을 얻을 수 있었으나 접착성의 경우에 있어서는 H$_2$운반 기체를 사용한 경우 감소하는 결과를 나타내었다. 이러한 접착성 감소의 원인은 AES분석에서 확인된 바와 같이 박막내부에 존재하는 F의 영향인 것으로 사료된다. H(hfac) ligand의 첨가 효과에 대하여 조사한 결과에서는 Ar 운반 기체를 사용한 경우 H(hfac)첨가시 증착률의 향상이 이루어졌으나 $H_2$운반 기체의 경우 큰 변화를 나타내지 않았고, 비저항의 경우에는 운반 기체와 관계없이 감소하는 결과를 보여 H(hfac) 사용이 증착 특성 개선에 효과적으로 나타났다. 따라서 본 연구에서는 운반기체 변화 및 H(hfac) ligand의 첨가 실험을 통해 MOCVD Cu의 증착기구를 조사하였으며, 이러한 공정조건의 변화가 Cu 박막의 표면거칠기 개선과 동시에 비저항을 낮추는 역할을 하는 것으로 나타났다.

• 한국전기전자재료학회논문지
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• 제11권6호
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• pp.458-464
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• 1998

This paper gives characterization of substrate and PZT(53/47) thin film deposited by metalorganic decomposition, which is concerned in deposition process and device fabrication process, to fabricate micro electro mechanical system (MEMS) device with piezoelectric material. The PZT thin films deposited by MOD at 700^{\circ}C$ for 30 minutes had a polycrystallinity, that is, no substrate dependence, while different interface were developed depending on the bottom electrodes. Such a structural variation could influence on not only the properties of the PZT film but also etching process for fabricating MEMS devices. Therefore the electrode structure is a very important factor in the deposition of the PZT film during etching process by HF acid for MEMS device with piezoelectric material. Piezoelectric coefficients of the PZT films on the different substrates were 40 and 80 pm/V at an applied voltage of 4V. Based in these results, it was possible for deposition of the PZT film by MOD to apply MEMS device fabrication process based on piezoelectricity after selection of proper bottom electrode.

• 한국재료학회지
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• 제12권8호
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• pp.661-668
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• 2002

A study was made to examine the electrical, compositional, structural and morphological properties of Ag thin films deposited by DC magnetron sputtering in $O_2$ atmosphere with deposition temperature from room temperature to 15$0^{\circ}C$ using in-line sputter system. The Ag films deposited at temperature above $100^{\circ}C$ in oxygen atmosphere gave a similar specific resistivity to and even lower oxygen content than those deposited using pure Ar sputter gas The Ag films deposited with pure Ar gas was mainly composed of crystallites with [111] preferred orientation, while, for those deposited in oxygen atmosphere, more than 50% of the volume was composed of crystallites with [100] orientation. The difference in the micro structure did not cause any difference in the specific resistivity of Ag films. The results showed that the transparent conducting oxide films and the Ag films could be processed sequentially in the same deposition chamber with careful control of deposition temperature, which might result in a cost reduction for constructing the large scale in-line deposition system.

• 한국표면공학회지
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• 제29권5호
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• pp.430-436
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• 1996

We have grown superconducting thin films on various substrates using a pulsed laser deposition (PLD) method. $YBa_2Cu_3O_7-\delta$ (YBCO) superconducting thin films with the superconducting transition temperature ($T_{c. offset}$) of 87K were grown on Si substrates using yittria-stabilized zirconia (YSZ) and $CeO_2$ double buffer layers. We have developed a large area pulsed laser deposition system. The system was designed to deposit up to 6 different materials on a large area substrate up to 7.5cm in diameter without breaking a vacuum. The preliminary runs of the deposition of YBCO superconducting thin films on $SrTiO_3$ substrate using this system showed a very uniform thickness profile over the entire substrate holder area. $T_{c}$ of the deposited YBCO thin film, however, was scattered depending on the position and the highest value was 85K.

• 한국표면공학회지
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• 제36권2호
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• pp.122-127
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• 2003

Ti - Si - N hard films were deposited on SKD11 steel substrates by a hybrid deposition system, where TiN was deposited by AIP method while Si was incorporated by sputtering one. The microstructure of Ti-Si-N films was revealed to be a composite of TiN crystallites and amorphous Si3N4 by instrumental analyses. The highest hardness value of about 45 Gpa was obtained at the Si content of around 7.7 at.%. With increase of Si content, the size of TiN crystallites was reduced and their distribution was changed from aligned to randomly orientated states. Surface roughness of Ti-Si-N film also decreased with increase of Si content.