Progress in Superconductivity and Cryogenics (한국초전도ㆍ저온공학회논문지)

The Korean Society of Superconductivity and Cryogenics (한국초전도저온학회)
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Fabrication of IBAD-MgO template by continuous reel-to-reel process

연속 reel-to-reel 공정을 이용한 IBAD-MgO template 제조

  • 고경필 (서울대학교 재료공학부) ;
  • 하홍수 (한국전기연구원 초전도재료연구그룹) ;
  • 김호겸 (주식회사 서남) ;
  • 유권국 (주식회사 서남) ;
  • 고락길 (한국전기연구원 초전도재료연구그룹) ;
  • 문승현 (주식회사 서남) ;
  • 오상수 (한국전기연구원 초전도재료연구그룹) ;
  • 유상임 (서울대학교 재료공학부)
  • Published : 2007.03.31
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Abstract

Highly textured MgO template by ion-beam-assisted deposition(IBAD) was successfully fabricated using a continuous reel-to-reel(R2R) mode. To enlarge the deposition area, the previous IBAD system was modified into the system with 14-pass and five heating zone. Every processing step was carried out using this multi-turn IBAD system. The overall process consists of R2R electropolishing of a hastelloy C276 tape, deposition of $Al_2O_3$ diffusion barrier, $Y_2O_3$ seed layer, IBAD-MgO and homoepi-MgO layer. The IBAD-MgO templates were fabricated using the IBAD system with 216 cm-length deposition zone and 32 cm diameter ion source. The texture of MgO films developed during the IBAD process was monitored by in-situ reflection high energy electron diffraction(RHEED) to optimize the IBAD process. Recently, 100 m long IBAD-MgO tape with in-plane texture of $\Delta{\phi}<10^{\circ}$ was successfully fabricated using the modified IBAD system. In this report, the detailed deposition condition of getting a long length IBAD-MgO template with a good epitaxy is described.

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References

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