Applied Chemistry for Engineering (공업화학)

The Korean Society of Industrial and Engineering Chemistry (한국공업화학회)
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In-situ Deposition Rate Measurement System to Improve the Accuracy of the Film Formation Process

성막 공정 정밀도 향상을 위한 실시간 성막 속도 측정 시스템

  • Somi Park (Department of Creative Convergence Engineering, Hanbat National University) ;
  • Seung-Yo Baek (Department of Creative Convergence Engineering, Hanbat National University) ;
  • Hyun-Bin Kim (Department of Creative Convergence Engineering, Hanbat National University) ;
  • Jonghee Lee (Department of Creative Convergence Engineering, Hanbat National University) ;
  • Jae-Hyun Lee (Department of Creative Convergence Engineering, Hanbat National University)
  • 박소미 (한밭대학교 창의융합학과) ;
  • 백승요 (한밭대학교 창의융합학과) ;
  • 김현빈 (한밭대학교 창의융합학과) ;
  • 이종희 (한밭대학교 창의융합학과) ;
  • 이재현 (한밭대학교 창의융합학과)
  • Received : 2023.04.27
  • Accepted : 2023.05.13
  • Published : 2023.08.10
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Abstract

The quartz crystal microbalance (QCM), commonly used in high vacuum deposition, becomes difficult to use when a thick film is deposited on the quartz, affecting the crystal's inherent vibration. In this study, a non-destructive optical measurement method was developed to measure the film's deposition rate during the in-situ film deposition process. By measuring the scattered laser intensity caused by the dimer in the parylene gas passing through the gas flow path, it was successfully confirmed that the ratio of the dimer in the parylene gas increases as the pyrolysis temperature decreases. Additionally, it was noted that the film's thickness and haze increase as the pyrolysis temperature decreases by confirming the characteristics of the visible parylene films. Through the research results, we aim to utilize the stable in-situ film deposition rate measurement system to control the precise film deposition rate of parylene films.

범용적으로 고진공 성막 장비에서 사용되는 quartz crystal microbalance (QCM)는 두꺼운 필름이 quartz 위에 성막되는 경우, 크리스탈 고유의 진동에 영향을 주어 사용이 어려워진다. 본 논문에서는 실시간 필름 증착 공정 중에 센서의 손상이 없는 광학적 계측 방식을 통해 필름의 성막 속도를 측정하는 방법을 연구하였다. 기체 이동 경로로 지나가는 페럴린 가스 중 다이머에 의한 레이저의 산란 정도를 측정하여, 페럴린 공정의 분해부 온도가 감소할수록 페럴린 가스 중 다이머의 비율이 증가하는 것을 성공적으로 확인하였다. 또한, 성막된 필름의 특성을 확인한 결과, 분해부 온도가 감소할수록 필름의 두께와 haze가 증가한 것을 확인할 수 있었다. 우리는 연구 결과를 통해 개발한 안정적인 실시간 성막 속도 계측 시스템을 이용함으로써, 진공 공정을 통해 성막하는 페럴린 필름의 정밀한 성막 속도 제어에 활용하고자 한다.

Keywords

Acknowledgement

이 논문은 교육부에서 지원하는 국립연구재단의 기초과학연구지원사업(2018R1A6A1A03026005)및 2022년도 정부(산업통상자원부)의 재원으로 한국산업기술진흥원의 지원을 받아 수행된 연구입니다. (P0012744, 2022년 산업혁신인재성장지원사업)

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