• Title/Summary/Keyword: DO 센서

Search Result 1,062, Processing Time 0.029 seconds

Analysis of Acoustic Emission Signal Sensitivity to Variations in Thin-film Material Properties During CMP Process (CMP 공정중 박막 종류에 따른 AE 신호 분석)

  • Park, Sun Joon;Lee, Hyun Seop;Jeong, Hae Do
    • Transactions of the Korean Society of Mechanical Engineers A
    • /
    • v.38 no.8
    • /
    • pp.863-867
    • /
    • 2014
  • In this study, an acoustic emission (AE) sensor was used for measuring the abrasive and molecular-scale phenomena in chemical mechanical polishing (CMP). An AE sensor is a transducer that converts a mechanical wave into an electrical signal, and is capable of acquiring high-level frequencies from materials. Therefore, an AE sensor was installed in the CMP equipment and the signals were measured simultaneously during the polishing process. In this study, an AE monitoring system was developed for investigating the sensitivity of the AE signal to (a) the variations in the material properties of the pad, slurry, and wafer and (b) the change in conditions during the CMP process. This system was adapted to Oxide and Cu CMP processes. AE signal parameters including AE raw frequency, FFT, and amplitude were analyzed for understanding the abrasive and molecular-level phenomena in the CMP process. Finally, we verified that AE sensors with different bandwidths could function in complementary ways during CMP process monitoring.

Hydrocarbon Gas-sensing Properties of Catalytic Combustion Type Gas Sensor (접촉연소식 가스센서의 탄화수소계 가스 감응 특성)

  • Lee, Dae-Sik;Lee, Sang-Mun;Nam, Ki-Hong;Han, Sang-Do;Lee, Duk-Dong
    • Journal of Sensor Science and Technology
    • /
    • v.8 no.4
    • /
    • pp.327-332
    • /
    • 1999
  • Catalytic combustion type gas sensors were fabricated by using noble metal(Pt and Pd) added ${\gamma}-Al_2O_3$ powder with specific surface area of $200\;m^2/g$. The fabricated sensor showed power consumption of 500 mW at the operating voltage of 1.75 V and high sensitivity of about 120 mV for butane, methane, or propane 100%LEL, respectively. The sensor properties also showed good linearity to hydrocarbon gas concentration variation, reproductivity and stability for relative humidity variation. And it showed high stability in butane ambient for 100 days.

  • PDF

Air Pollution Monitoring RF-Sensor System Trackable in Real Time (실시간 위치탐지 기능을 갖춘 대기오염 모니터링 RF-Sensor 시스템)

  • Kim, Jin-Young;Cho, Jang-Ho;Jeon, Il-Tae;Jung, Dal-Do;Kang, Joon-Hee
    • Journal of Korean Society for Geospatial Information Science
    • /
    • v.18 no.2
    • /
    • pp.21-28
    • /
    • 2010
  • Air pollution monitoring has attracted a lot of interests because it affects directly to the human life quality. The most of the current air pollution monitoring stations use the expensive and bulky instruments and are only installed in the specific area. Therefore, it is difficult to install them to as many places as people need. In this work, we constructed a low price and small size Radio Frequency(RF) sensor system to solve this problem. This system also had the measurement range similar to the ones used in the air pollution forecast systems. This system had the sensor unit to measure the air quality, the central processing unit for air quality data acquisition, the power unit to supply the power to every units, and the RF unit for the wireless transmission and reception of the data. This system was easy to install in the field. We also added a GPS unit to track the position of the RF-sensor in real time by wireless communication. For the various measurements of the air pollution, we used CO, $O_3$, $NO_2$ sensors as gas sensors and also installed a dust sensor.

CCD Non-uniformity Correction Method based on Pixel Non-Linearity Model (픽셀 비선형성 모델을 기반으로 한 영상센서 불균일 특성 보정)

  • Kim, Young-Sun;Kong, Jong-Pil;Heo, Haeng-Pal;Park, Jong-Euk;Yong, Sang-Soon
    • Aerospace Engineering and Technology
    • /
    • v.9 no.1
    • /
    • pp.28-34
    • /
    • 2010
  • All pixels of image sensor do not react uniformly when the light of same radiance enters into the camera. This non-uniformity has a direct influence on the image quality. However we can overcome it by calibration process under the special test-setup. Usually it is used the algorithm to get the correction coefficients under the specific illumination condition. But, this method has drawback in the very low or very high illumination due to pixel non-linearity. This paper describes the robust algorithm, which calculates the correction coefficients based on the pixel non-linearity model, against thew hole radiance. The paper shows the non-uniformity test results with the own camera and the specified test equipments as well. The results shows the best performance over the entire radiance when this method is applied.

A Medium Access Control Protocol for Sensor Data in Powerline Communications (전력선통신방식에서 센서데이터 전달을 위한 MAC 프로토콜 설계)

  • Jin, Kyo-Hong;Choi, Pyung-Suk;Park, Mu-Hun
    • Journal of the Korea Institute of Information and Communication Engineering
    • /
    • v.10 no.2
    • /
    • pp.257-263
    • /
    • 2006
  • With the ever increasing demand for data communication methods, powerline communication has become in interesting alternative method for data communication in home networking. For the purpose of home safety, several sensors will be installed at door, windows, gas alarm, etc. When considering home networking, the sensor data as well as other types of data should be supported in powerline communication. Usually the sensor data do not have priority over isochronous traffics (voice, video traffic), but in the case of urgent situation at home, the data of sensor being aware of the situation should be transmitted earlier than others. The objective in this paper is to develop a method for supporting an urgent data in home networking using powerline communication. We propose a modified algorithm of HomePlug 1.0 and show the results of computer simulation.

Design of Dispersed Clustering Algorithm for Efficient Energy Management in Wireless Sensor Network (무선 센서 네트워크에서 효율적인 에너지 관리를 위한 분산형 클러스터링 알고리즘 설계)

  • Jeon, Min-Ho;Kang, Chul-Gyu;Oh, Chang-Heon
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
    • /
    • 2011.10a
    • /
    • pp.839-842
    • /
    • 2011
  • Lately Various researches on energy harvesting techniques for wireless sensor networks have been performed to overcome the power limitation of sensor nodes. In wireless sensor networks with harvesting techniques, sensor nodes exploit environmental energy, such as solar or wind energy, as the power sources of the nodes. Existing energy constrained environment routing protocols may not be suitable for energy harvesting based wireless sensor networks because they do not consider the accumulated energy from harvesting devices. In addition, the paths which aren't dispersed shorten the network lifetime. Therefore, in this paper, the algorithm that the path between each node is dispersed is proposed. In case of using the algorithm to be proposed through the simulator it showed that path of the node is variously reflected.

  • PDF

Design and Implementation of Realtime Information Service based on Ubiquitous Sensor Network Using MySQL and Tiny-DB (Tiny-DB와 MySQL을 이용한 유비쿼터스 센서 네트워크 기반의 실시간 정보 서비스 설계 및 구현)

  • Kang, Kyoung-Ok;Kim, Yong-Woo;Kwon, Hoon;Kim, Bu-Rim;Kim, Do-Hyeun
    • Journal of the Korea Academia-Industrial cooperation Society
    • /
    • v.7 no.2
    • /
    • pp.175-181
    • /
    • 2006
  • Wireless sensor network forms the self-organization network, and transfers the information among sensor nodes that have computing technology ability and wireless communication ability. The recent sensor network is study for low-power, micro, low cost of node is proceeded. Recently, the research of application services in wireless sensor networks is proceeded. Therefore, in this paper, we design the prototype of the real-time information service that support a user the information of temperature, illumination etc. And, we implement the alarm application service fer the disaster prevention on Internet base on IPv4/IPv6. We develop the module of the extract information using the query processing based on TinyOS, and the module of the server's database using MySQL data base management system and JDBC. Additionally, we develop the client module that receive the real-time sensing data using ODBC in Internet based on IPv4/IPv6.

  • PDF

The Design of a Wind Speed & Direction Module and a DSP Sensor Interface System for the Meteorological System (기상계측시스템을 위한 풍향.풍속모듈 및 DSP 센서 인터페이스시스템 설계)

  • Song, Do-Ho;Joo, Jae-Hun;Ock, Gi-Tae;Kim, Sang-Gab;Choi, Jung-Keyng
    • Journal of the Korea Institute of Information and Communication Engineering
    • /
    • v.11 no.8
    • /
    • pp.1478-1485
    • /
    • 2007
  • In this paper, a meteorological system including a wind speed & direction module and the DSP(Digital Signal Processor) sensor interface circuit board are proposed. This DSP system accepts and process the informations from a wind speed & direction module, the atmospheric pressure sensor, the ambient air temperature sensor and transfers it to the PC monitoring system. Especially, a wind speed & direction module and a DSP hardware are directly designed and applied. A wind speed & direction module have a construction that it have four film type RID(Resistive Temperature Detectors) resistive sensor adhered around the circular metal body heated constantly by heating coil for obtaining vector informations about wind. By this structure, the module is enabled precise measurement having a robustness about vibration, humidity, corrosion. A sensor signal processing circuit is using TMS320F2812 TI(Texas Instrument) Corporation high speed DSP. An economical meteorological system could be constructed through the data from wind speed & direction module and by the fast processing of DSP interface circuit board.

Evaluation of functional wireless sensor node based Ad-hoc network for indoor healthcare monitoring (실내 건강모니터링을 위한 Ad-hoc기반의 기능성 무선센서노드 평가)

  • Lee, Dae-Seok;Do, Kyeong-Hoon;Lee, Hun-Jae
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
    • /
    • 2009.05a
    • /
    • pp.313-316
    • /
    • 2009
  • A novel approach for electrocardiogram (ECG) analysis within a functional sensor node has been developed and evaluated. The main aim is to reduce data collision, traffic over loads and power consumption in healthcare applications of wireless sensor networks (WSN). The sensor node attached on the patient's bodysurface around the heart can perform ECG analysis based on a QRS detection algorithm to detect abnormal condition of the patient. Data transfer is activated only after detected abnormality in the ECG. This system can reduce packet loss during transmission by reducing traffic overload. In addition, it saves power supply energy leading to more reliable, cheap and user-friendly operation in the WSN based ubiquitous health monitoring.

  • PDF

IoT Sensor Flow Control Application System (IoT 센서 흐름 제어 어플리케이션 시스템)

  • Lim, Hyeok;Yu, Dong-Gyun;Jeong, Do-Hyeong;Ryu, Seung-Han;Jung, Hoe-Kyung
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
    • /
    • 2016.10a
    • /
    • pp.887-888
    • /
    • 2016
  • Internet data for IoT(Internet of Things) period was changed in such a way that the data is done by sharing information for the user. However, in the existing system IoT environment for the user to utilize the system it has a problem does not take into account the individual characteristics. And there must be an intermediate vectors are capable of controlling problems such as Dongle. In this paper, through the flow sensor control applications as a way to solve this problem to control the flow of the sensor according to the characteristics desired by the user. Due to this makes it possible to easily manage the sensor compared to conventional IoT environment. Accordingly, the user must manage the sensor through the application regardless of time and place. So it is believed to reduce the unnecessary power consumption is possible effective control sensor.

  • PDF