• Title/Summary/Keyword: Cu Oxide

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New Ruthenium Complexes for Semiconductor Device Using Atomic Layer Deposition

  • Jung, Eun Ae;Han, Jeong Hwan;Park, Bo Keun;Jeon, Dong Ju;Kim, Chang Gyoun;Chung, Taek-Mo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.363-363
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    • 2014
  • Ruthenium (Ru) has attractive material properties due to its promising characteristics such as a low resistivity ($7.1{\mu}{\Omega}{\cdot}cm$ in the bulk), a high work function of 4.7 eV, and feasibility for the dry etch process. These properties make Ru films appropriate for various applications in the state-of-art semiconductor device technologies. Thus, it has been widely investigated as an electrode for capacitor in the dynamic random access memory (DRAM), a metal gate for metal-oxide semiconductor field effect transistor (MOSFET), and a seed layer for Cu metallization. Due to the continuous shrinkage of microelectronic devices, better deposition processes for Ru thin films are critically required with excellent step coverages in high aspect ratio (AR) structures. In these respects, atomic layer deposition (ALD) is a viable solution for preparing Ru thin films because it enables atomic-scale control of the film thickness with excellent conformality. A recent investigation reported that the nucleation of ALD-Ru film was enhanced considerably by using a zero-valent metallorganic precursor, compared to the utilization of precursors with higher metal valences. In this study, we will present our research results on the synthesis and characterization of novel ruthenium complexes. The ruthenium compounds were easy synthesized by the reaction of ruthenium halide with appropriate organic ligands in protic solvent, and characterized by NMR, elemental analysis and thermogravimetric analysis. The molecular structures of the complexes were studied by single crystal diffraction. ALD of Ru film was demonstrated using the new Ru metallorganic precursor and O2 as the Ru source and reactant, respectively, at the deposition temperatures of $300-350^{\circ}C$. Self-limited reaction behavior was observed as increasing Ru precursor and O2 pulse time, suggesting that newly developed Ru precursor is applicable for ALD process. Detailed discussions on the chemical and structural properties of Ru thin films as well as its growth behavior using new Ru precursor will be also presented.

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The Optimal Resource Development for Analysing Data of Deposit Types' Ore Reserves of Oversea Metal Resource (해외 금속자원에 대한 광상유형별 자료 분석을 통한 효과적인 자원개발)

  • Yoo, Bong-Chul;Lee, Jong-Kil;Lee, Gil-Jae;Lee, Hyun-Koo
    • Economic and Environmental Geology
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    • v.41 no.6
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    • pp.773-795
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    • 2008
  • The major import minerals of South Korea are copper ore, lead-zinc ore, iron ore, manganese ore and molybdenum ore. Oversea resources development of South Korea have 92 projects in 14 nations of Asia, 29 projects in 10 nations of America and Europe, and 14 projects in 9 nations of Middle Asia and Africa. But, most projects of them are found in Australia, China, Mongolia and Indonesia. The most projects of the Australia, China and Indonesia are interested in coal and a little projects of them have manganese, iron, lead-zinc, nickel, copper, gold, molybdenum, rare earth elements and uranium. The most projects of the Mongolia are interested in gold and rare earth elements. Representative ore deposits models of metal resources are Orogenic lode deposits, Volcanogenic massive sulphide deposits, Porphyry deposits, Sedimentary exhalative deposits, Mississippi valley type deposits, Iron oxide copper-gold deposits and Magmatic nickel-copper-platinum group element deposits based on global distribution, reverses and grades of their deposits models. If oversea mineral resources will be examined the mineral reserves, mineral mine production and ore deposits models of nations and then survey and investigate of mineral resources, we may be maintained ore body of high grade at survey area and decrease the investment risk.

Effect of V2O5 Content and Pre-Sintering Atmosphere on Adhesive Property of Glass Frit for Laser Sealing of OLED (OLED 레이저 실링용 글라스 프릿에서 V2O5 함량 및 가소성 분위기가 접합 특성에 미치는 영향)

  • Jeong, HyeonJin;Lee, Mijai;Lee, Youngjin;Kim, Jin-Ho;Jeon, Dae-Woo;Hwang, Jonghee;Lee, Jungsoo;Yang, Yunsung;Youk, Sookyung;Park, Tae-Ho;Moon, Yun-Gon
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.29 no.8
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    • pp.489-493
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    • 2016
  • In this study, the effect of vanadium oxide ($V_2O_5$) content and pre-sintering atmosphere on sealing property of glass frit that consisted of $V_2O_5-BaO-ZnO-P_2O_5-TeO_2-CuO-Fe_2O_3-SeO_2$ was investigated by XPS (X-ray photoelectron spectroscopy). The content of V2O5 was changed to 15, 30, and 45 mol%, and the pre-sintering was carried out in air and $N_2$ condition, respectively. XPS analysis conducted before and after laser irradiation with identical sample. Before laser treatment, glass frits that were pre-sintered at air condition showed both $V^{4+}$ and $V^{5+}$, but the valence state was changed to $V^{5+}$ after laser irradiation when the glass frits contained 30 and 45 mol% $V_2O_5$; this change led to non-adhesive property. On the other hand, glass frits that were pre-sintered at $N_2$ condition exhibited only $V^{4+}$ and it showed fine adhesion irrespective of the $V_2O_5$ content. As a result, the existence of $V^{4+}$ seems to be a major factor for controlling the adhesive property of glass frit for laser sealing.

Geochemical Environments of Copper-bearing Ore Mineralization in the Haman Mineralized Area (함안지역 함 동 광화작용의 지화학적 환경)

  • Choi, Sang-Hoon
    • Economic and Environmental Geology
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    • v.42 no.1
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    • pp.1-8
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    • 2009
  • The Haman mineralized area is located within the Cretaceous Gyeongsang Basin along the southeastern part of the Korean peninsula. Almost all occurrences in the Haman area are representative of copper-bearing polymetallic hydrothermal vein-type mineralization. Within the area are a number of fissure-filling hydrothermal veins which contain tourmaline, quartz and carbonates with Fe-oxide, base-metal sulfide and sulfosalt minerals. The Gunbuk, Jeilgunbuk and Haman mines are each located on such veins. The ore and gangue mineral paragenesis can be divided into three distinct stages: Stage I, tourmaline + quartz + Fe-Cu ore mineralization; Stage II, quartz + sulfides + sulfosalts + carbonates; Stage III, barren calcite. Equilibrium thermodynamic data combined with mineral paragenesis indicate that copper minerals precipitated mainly within a temperature range of $350^{\circ}C$ to $250^{\circ}C$. During early mineralization at $350^{\circ}C$, significant amounts of copper ($10^3$ to $10^2\;ppm$) could be dissolved in weakly acid NaCl solutions. For late mineralization at $250^{\circ}C$, about $10^0$ to $10^{-1}\;ppm$ copper could be dissolved. Equilibrium thermodynamic interpretation indicates that the copper in the Haman-Gunbuk systems could have been transported as a chloride complex and the copper precipitation occurred as a result of cooling accompanied by changes in the geochemical environments ($fs_2$, $fo_2$, pH, etc.) resulting in decrease of solubility of copper chloride complexes.

The anti-inflammatory influence of fermented soy products containing a fermented Rhus verniciflua extract on lipopolysaccharide (LPS)-treated RAW 264.7 cells (LPS 유도 RAW264.7세포에서 발효 옻 추출물을 함유한 장류의 항염증 효과)

  • Lim, Hyun Ji;Kim, Hyoun-Young;Lee, Jeong-Mi;Kim, Hyun Ju
    • Korean Journal of Food Science and Technology
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    • v.50 no.6
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    • pp.642-652
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    • 2018
  • Rhus verniciflua (RV) Stokes is a herbal medicine that helps improve blood circulation by stimulating digestion, removing extravasated blood, and raising body temperature. The purpose of this research was to study the anti-inflammatory effect of fermented soy products (FSP) containing a fermented RV (FRV) extract on lipopolysaccharides (LPS)-treatedd RAW 264.7 cells. Treatment with FRV extracts (1, 10, $100{\mu}g/mL$) downregulated nitric oxide (NO) and pro-inflammatory cytokines as compared to the LPS-treated group. Besides, the RV extract treatment suppressed the expression of genes related to pro-inflammatory cytokines, matrixins, inflammation, and apoptosis, while increasing the expression of genes involved in the antioxidant system. Furthermore, RVS extract upregulated antioxidant enzymes, such as glutathione, Cu,Zn-SOD, and catalase without changes in the Nrf2-Keap1 pathway. FSP (doenjang, ganjang) containing FRV extracts (0.1, 1, or $10{\mu}g/mL$) significantly decreased the NO and IL-6 levels in an FSP after 8 weeks of fermentation, but not the expression of genes involved in the inflammation and antioxidant system. These result indicate that an FRV extract and FSPs have a potential application in inflammatory conditions.

Metal Speciation in the Lagoon Sediment Interstitial Water from the Northeast Coast, Korea (동해안 석호 퇴적물의 간극수에 함유된 금속류의 화학종 분포)

  • Kim, Dong-Jin;Kim, Min-Chul;Yoo, Jin-Yull;Kwon, Sang-Yong;Seo, Yong-Chan;Yang, Jae-E.;Oh, Seung-Yoon;Ok, Yong-Sik
    • Journal of Korean Society of Environmental Engineers
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    • v.30 no.7
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    • pp.712-720
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    • 2008
  • Sediment and interstitial water samples from ten lagoons in the Northeastern coastal part of South Korea were analyzed to obtain the concentrations of metals and inorganic ligand. These data, coupled with pH and ionic strength, were used to compute the aqueous speciation of the metals in the interstitial water using the MINTEQA2 equilibrium program. The K and Na were almost entirely present as the free aqua ions, but Co, Cd, Ni, Pb and Zn were existed as various metal-ligand complexes. Metals such as Al, As, and Cr formed 3$\sim$4 metal-ligand complexes. In the interstitial water with high chloride concentrations, almost all of the metals were dominated by free aqua ions. Metals of Cd, Co, Ni, Pb and Zn were bound as chloride-metal complexes of the type M$^{x+}$ + xCl$^-$, and Fe, Mn and Mg were dominated by sulfate equilibria(M$^{2+}$ + SO$_4{^{2-}}$). Hg(II) was speciated as HgCl$_2$(aq), HgCl$_3{^-}$ and HgCl$_4{^-}$. However, in the interstitial water with low chloride concentrations, Hg(II) and Cd(II) were existed as chloride-metal complexes, metals of Cu, Mg, Mn, Ni, Pb and Zn were dominated by sulfate equilibria, and the speciation of Fe(II) was bound as Fe(OH)$_2{^+}$, Fe(OH)$_3$(aq). However, Al, As and Cr were dominated by hydroxy-metal and oxide-metal species in nearly all of the lagoons.

Study on Contents of Paeoniflorin and Inorganic Components in Paeony Roots (시판(市販) 작약(芍藥)의 Paeoniflorin 및 무기성분(無機成分) 함량(含量))

  • Chung, Sang-Hwan;Suh, Dong-Hwan;Park, No-Kwuan;Lee, Suk-Hee;Kim, Ki-Jae;Lee, Kwang-Seok;Choi, Boo-Sul;Kang, Gaung-Hee
    • Korean Journal of Medicinal Crop Science
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    • v.1 no.2
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    • pp.178-183
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    • 1993
  • This study was carried out to investigate the contents of ash and inorganicelements in the herbaceous paeony roots collected from the markets of 9 regions in Korea. The contents of paeoniflorin ranged from 2.14% to 3.7%, and the average was 2.87%. The mean contents of ash was 4.2% and acid insoluble ash content was 0.55%. Total nitrogen of herbaceous paeony roots was 0.7%, phosphorus 0.69%, potassium 0.73%, calcium monoxide 1.02% and ferric oxide 82.15ppm respectively. The content of zinc ranged from 19.80ppm to 103.02ppm and the average was 34.59ppm ; this value showed some differences than other elements were, and the mean content of magnesium was 0.25%. The cadmium content showed 0.31ppm copper 4.95ppm, and plumbum 20.47ppm respectively. As above results, we could say that there was no health problems with local products, if we use a the herb medicine.

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Janggunite, a New Mineral from the Janggun Mine, Bonghwa, Korea (경북(慶北) 봉화군(奉化郡) 장군광산산(將軍鑛山産) 신종광물(新種鑛物) 장군석(將軍石)에 대(對)한 광물학적(鑛物學的) 연구(硏究))

  • Kim, Soo Jin
    • Economic and Environmental Geology
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    • v.8 no.3
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    • pp.117-124
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    • 1975
  • Wet chemical analysis (for $MnO_2$, MnO, and $H_2O$(+)) and electron microprobe analysis (for $Fe_2O_3$ and PbO) give $MnO_2$ 74.91, MnO 11.33, $Fe_2O_3$ (total Fe) 4.19, PbO 0.03, $H_2O$ (+) 9.46, sum 99.92%. 'Available oxygen determined by oxalate titration method is allotted to $MnO_2$ from total Mn, and the remaining Mn is calculated as MnO. Traces of Ba, Ca, Mg, K, Cu, Zn, and Al were found. Li and Na were not found. The existence of (OH) is verified from the infrared absorption spectra. The analysis corresponds to the formula $Mn^{4+}{_{4.85}}(Mn^{2+}{_{0.90}}Fe^{3+}{_{0.30}})_{1.20}O_{8.09}(OH)_{5.91}$, on the basis of O=14, 'or ideally $Mn^{4+}{_{5-x}}(Mn^{2+},Fe^{3+})_{1+x}O_{8}(OH)_{6}$ ($x{\approx}0.2$). X-ray single crystal study could not be made because of the distortion of single crystals. But the x-ray powder pattern is satisfactorily indexed by an orthorhombic cell with a 9.324, b 14.05, c $7.956{\AA}$., Z=4. The indexed powder diffraction lines are 9.34(s) (100), 7.09(s) (020), 4.62(m) (200, 121), 4.17(m) (130), 3.547(s) (112), 3.212(vw) (041), 3.101(s) (300), 2.597(w) (013), 2.469(m) (331), 2.214(vw)(420), 2.098(vw) (260), 2.014 (vw) (402), 1.863(w) (500), 1.664(w) (314), 1.554(vw) (600), 1.525(m) (601), 1.405(m) (0.10.0). DTA curve shows the endothermic peaks at $250-370^{\circ}C$ and $955^{\circ}C$. The former is due to the dehydration: and oxidation forming$(Mn,\;Fe)_2O_3$(cubic, a $9.417{\AA}$), and the latter is interpreted as the formation of a hausmannite-type oxide (tetragonal, a 5.76, c $9.51{\AA}$) from $(Mn,\;Fe)_2O_3$. Infrared absorption spectral curve shows Mn-O stretching vibrations at $515cm^{-1}$ and $545cm^{-1}$, O-H bending vibration at $1025cm^{-1}$ and O-H stretching vibration at $3225cm^{-1}$. Opaque. Reflectance 13-15%. Bireflectance distinct in air and strong in oil. Reflection pleochroism changes from whitish to light grey. Between crossed nicols, color changes from yellowish brown with bluish tint to grey in air and yellowish brown to grey through bluish brown in oil. No internal reflections. Etching reactions: HCl(conc.) and $H_2SO_4+H_2O_2$-grey tarnish; $SnCl_2$(sat.)-dark color; $HNO_3$(conc.)-grey color; $H_2O_2$-tarnish with effervescence. It is black in color. Luster dull. Cleavage one direction perfect. Streak brownish black to dark brown. H. (Mohs) 2-3, very fragile. Specific gravity 3.59(obs.), 3.57(calc.). It occurs as radiating groups of flakes, flower-like aggregates, colloform bands, dendritic or arborescent masses composed of fine grains in the cementation zone of the supergene manganese oxide deposits of the Janggun mine, Bonghwa-gun, southeastern Korea. Associated minerals are calcite, nsutite, todorokite, and some undetermined manganese dioxide minerals. The name is for the mine, the first locality. The mineral and name were approved before publication by the Commission on New Minerals and Mineral Names, I.M.A.

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Physico-Chemical Properties of Aggregate By-Products as Artificial Soil Materials (골재 부산물의 용토재 활용을 위한 특성 분석)

  • Yang, Su-Chan;Jung, Yeong-Sang;Kim, Dong-Wook;Shim, Gyu-Seop
    • Korean Journal of Soil Science and Fertilizer
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    • v.40 no.5
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    • pp.418-428
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    • 2007
  • Physical and chemical properties of the aggregate by-products including sludge and crushed dust samples collected from the 21 private companies throughout the country were analyzed to evaluate possible usage of the by-products as artificial soil materials for plantation. The pH of the materials ranged from 8.0 to 11.0. The organic matter content was $2.85g\;kg^{-1}$, and the total nitrogen content and available phosphate content were low as 0.7 percents and $12.98mg\;kg^{-1}$, respectively. Exchangeable $Ca^{2+}$, $Mg^{2+}$, $K^+$, and $Na^+$ were 2.29, 0.47, 0.02 and $0.05cmol\;kg^{-1}$, respectively. Heavy metal contents were lower than the limits regulated by environmental law of Korea. Textural analysis showed that most of the materials were silt loam with low water holding capacity ranged from 0.67 to 7.41 percents, and with low hydraulic conductivity ranged from 0.4 to $2.8m\;s^{-1}$. Mineralogical analysis showed that the aggregate by product materials were mostly composed of silicate, alumina and ferric oxides except calcium oxide dominant materials derived from limestones. The primary minerals were quartz, feldspars and dolomites derived from granite and granitic gneiss materials. Some samples derived from limestone material showed calcite and graphite together with the above minerals. According to the result, it can be concluded that the materials could be used as the artificial soil material for plantation after proper improvement of the physico-chemical properties and fertility.