Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2014.02a
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- Pages.363-363
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- 2014
New Ruthenium Complexes for Semiconductor Device Using Atomic Layer Deposition
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Jung, Eun Ae
(Thin Film Materials Research Group Korea Research Institute of Chemical Technology) ;
- Han, Jeong Hwan (Thin Film Materials Research Group Korea Research Institute of Chemical Technology) ;
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Park, Bo Keun
(Thin Film Materials Research Group Korea Research Institute of Chemical Technology) ;
- Jeon, Dong Ju (Thin Film Materials Research Group Korea Research Institute of Chemical Technology) ;
- Kim, Chang Gyoun (Thin Film Materials Research Group Korea Research Institute of Chemical Technology) ;
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Chung, Taek-Mo
(Thin Film Materials Research Group Korea Research Institute of Chemical Technology)
- Published : 2014.02.10
Abstract
Ruthenium (Ru) has attractive material properties due to its promising characteristics such as a low resistivity (