• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2012.11a
• /
• pp.141-141
• /
• 2012

고종횡비 10:1 비아를 Si wafer 상에 형성하기 위해 $7{\mu}m$ 직경의 마스크로 포토작업하여 Cr층을 100nm 스퍼터링하여 PR(photo resistor) 대신의 에칭 barrier 막으로 사용하였다. 얼라인, 노광, 현상을 거쳐 Cr에칭, PR 제거후 ICP(inductively coupled plasma) 공정으로 Si deep etching하여 via 직경 $10.16{\mu}m$, 깊이 $102.5{\mu}m$의 고종횡비 비아를 형성하였다. 구리필링도금을 위해서 필수적인 seed layer는 단층 또는 다층의 금속막을 스퍼터링 법으로 형성하였다. 형성된 seed layer 단면을 FE-SEM(Field emission scanning electron microscope)으로 관찰하여 내부에 seed 층의 형성 유무를 확인하였다.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.02a
• /
• pp.302-302
• /
• 2013

본 연구는 이온질화시 self-sputtering에 의한 AISI D2 소재의 표면경화에 대한 연구를 진행하였다. 이를 위해 이온질화시 질소가스와 아르곤 가스를 이용해 이온질화를 수행하였다. 이에 대한 결과는 optical micrograph (OM), scanning electron microscopy (SEM), X-ray diffraction(XRD), transmission electron microscopy (TEM)를 이용해 분석하였다. 실험결과, 소재의 경도는 570 HV에서 약 1470 HV까지 상승하였다. 극표면에 CrN-enriched layer의 형성 및 극표면 아래층에서 질소의 과포된 화합물층을 관찰할 수 있었다. 표면경화는, 극표면에 CrN-enriched layer의 형성과, 아래 N의 과포화에 의한 ${\gamma}$?autenite) phase, 그리고 diffusion layer의 형성에 의한 multi-layer의 형성으로 표면에 강화에 기여한것으로 사료된다.

• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2007.11a
• /
• pp.153-154
• /
• 2007

AISI316L강은 AISI304L강과 기본 조성은 같지만 316L강이 약 2.5%의 Mo가 첨가되어 있다. 저온 플라즈마 질탄화 시 모재에 첨가된 Mo의 영향을 조사하기 위하여 처리온도를 변화시켜 실험하였다. 같은 처리온도의 경우 경화층의 두께는 316L강이 비교적 두껍게 형성되었다. 316L강의 경우 $450^{\circ}C$이하에서 약 25 ${\mu}m$까지 형성되었고, 306L강의 경우 $400^{\circ}C$에서 약 10 ${\mu}m$까지 형성되었다. $400^{\circ}C$ 이하에서 경화층은 두 가지시편 모두 확장된 오스테나이트 (${\gamma}_N,\;{\gamma}_c$)로 이루어져 있으나, 304L의 경우 $430^{\circ}C$부터 석출물(CrN)이 형성되기 시작하였다. 316L의 경우 $450^{\circ}C$까지 석출물이 형성되지 않았고, $480^{\circ}C$에서 석출물 (CrN)이 관찰되었다. 석출물이 형성된 시편을 제외한 모든 시편의 내식성은 모제보다 증가 하였다.

• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2012.05a
• /
• pp.190-191
• /
• 2012

철계 소결 부품은 성형의 용이성, 저렴한 가격, 특유의 기공성 입계조직으로 기능성 표면처리에 적합한 소재이다. 본 연구에서는 고온 부식 및 극심한 마모환경에 노출되는 발전소 터빈과 같은 부품의 표면처리에 주로 쓰이는 Pack-chromizing 법을 적용한 철계 소결부품의 내마모 특성을 알아보고자 한다. AFM 분석결과, Pack-chromizing 에 의해 Cr이 확산된 표층의 형상이 Peak-and-Valley 형태의 치밀한 dimple 구조로 변화된 것을 알 수 있었다. 또한, XRD 및 XPS 분석을 통해 chromium carbide 및 $Cr_2O_3$와 같은 고경도의 화합물 층이 형성됨을 알 수 있었다. 따라서, 이러한 dimple 구조를 띈 고경도의 화합물 층이 표면의 마찰계수를 저하시키는 주요 원인임을 본 연구에서 논하고자 한다.

• Journal of the Korean Vacuum Society
• /
• v.5 no.4
• /
• pp.377-386
• /
• 1996

Austenitic stainless steel type 304L has been nitrided under the low pressure of high nitrogen environment for 5 hours by the square-wave-pulse-d.c. plasma as a function of temperature 400~$600^{\circ}C$ and of pulsation. At the temperature range lower than $500^{\circ}C$ and at the relatively high ratio of pulse duration to pulse period, nonstoichiometric stainless steel nitride has been developed in the form of a thin layer which has many cracks. At the temperature range higher than $500^{\circ}C$, with the increasing temperature or with the increasing ratio of the pulse duration to pulse period up to 50s/100s, the nitrided layer was composed mainly of CrN and Fe4N phases and became thick, uniform, columnar and nearly crack-free. The nitrided layer at $500^{\circ}C$ was mixed with the low-temperature layer and the high temperature layer and was very brittle.

• Journal of the Korean Magnetics Society
• /
• v.13 no.1
• /
• pp.6-14
• /
• 2003

The purpose of this study is to investigate the effect of chemical reaction with a bonding glass on physical and magnetic properties of Fe-Hf-N/SiO$_2$ and Fe-Hf-N/Cr/SiO$_2$ thin films. When the Fe-Hf-N/SiO$_2$ films were reacted with the bonding glass, the soft magnetic properties of them were extremely degraded. At $600^{\circ}C$, the saturation magnetization of the reacted film decreased to 1 kG, and its coercivity increased to 27 Oe, and its effective permeability decreased to 70. It was found that the degradation of soft magnetic properties of the Fe-Hf-N/SiO$_2$ films reacted with the bonding glass were attributed to the oxidation of the Fe-Hf-N layers to HfO$_2$ and Fe$_3$O$_4$. The soft magnetic properties of the Fe-Hf-N/Cr/SiO$_2$ films reacted with the bonding glass were degraded less than those of Fe-Hf-N/SiO$_2$ films. At $600^{\circ}C$, the saturation magnetization of the reacted film decreased to 13.5 kG, and its coercivity increased to 4 Oe, and its effective permeability decreased to 700. It was found that the Cr layer suppressed the oxidation of the Fe-Hf-N layers during the chemical reaction between the Fe-Hf-N layer and bonding glass.

• Korean Journal of Materials Research
• /
• v.4 no.6
• /
• pp.669-680
• /
• 1994

Oxidation behaviour of TiAl intermetallic compounds with the addition of Cr, V, Si, Mo, or Nb was investigated at 900~$1100^{\circ}C$ under the atmospheric environment. The reaction products were examined by XRD, SEM equipped with WDX. The weight gain by continuous oxidation increased with the addition of Cr or V, but there was less weight gain when Mo, Si or Nb was added individually. he oxidation rate of Cr- or V-added TiAl was always larger than that of TiAI. However, oxidation rate of Si-, Mo- or Nb-added TiAl was almost same or smaller than that of TiAI. Thus, it is concluded that the addition of Cr or V did not improve the oxidation resistance, whereas the addition of Si, Mo or Nb improved the oxidation resistance. Oxides formed on TiAl with Mo, Si, and Nb were found to be more protective, resulting from the decrease in diffusion rate of the alloying elements and oxygen. Nb strengthened the tendency to form $AI_{2}O_{3}$ in the early stage of oxidation, due to the continuous $AI_{2}O_{3}$ layer formation and dense $Tio_{2}+AI_{2}O_{3}$ layer. According to the Pt-marker test of TiAI- 5wt%Nb, oxygen diffused mainly inward while oxides were formed on the substrate surface. Upon thermal cyclic oxidation at $900^{\circ}C$, it is shown that the addition of Cr or Nb improved the adherence of oxide scale to the substrate.

• Transactions of Materials Processing
• /
• v.31 no.1
• /
• pp.11-16
• /
• 2022

In this paper, wear characteristics of PVD coatings were compared on the die surface for cold stamping of MART1470 steel sheet with the finite element analysis and the pin-on-disc wear test. Three types of PVD coatings (CrN, TiAlCrN, and MoS2TiCr(W)N) were considered for the tool surface made of STD11 material. The stamping process of an auto-body part was analyzed with the finite element method. Ranges of process variables for the wear test such as contact pressure, relative speed, and sliding distance were predicted from analysis results. In order to quantitatively analyze wear characteristics of each coating, the amount of wear was measured and compared according to process variables with the pin-on-disc wear test. The influence of each process variable was investigated and the wear characteristics of the three coating layers were quantitatively compared. It was confirmed that the wear characteristics of MoS₂TiCr(W)N coating were better than those of CrN and TiAlCrN. It was noted that the proposed prediction approach could predict and respond to the wear phenomenon occurring in the stamping process.

• Journal of the Korean Society for Heat Treatment
• /
• v.22 no.5
• /
• pp.267-274
• /
• 2009

Titanium Chromium Nitrided (TiCrN) coatings were deposited on stainless steel 316 L and Si (100) wafer by inductively coupled plasma assisted D.C. magnetron sputtering at the various sputtering power on Cr target and $N_2/Ar$ gas ratio. Increasing the sputtering power of Cr target, XRD patterns were changed from TiCrN to nitride $Cr_2Ti$. The maximum hardness was $Hk_{3g}$ 3900 at $0.3\;N_2/Ar$ gas ratio. The thickness of the TiCrN films increased as the Cr target power increased, and it showed over $Hk_{5g}3100$ hardness at 100 W, 150 W. TiCrN films were deposited by the ICP assisted DC magnetron sputtering shown good wear resistance as the $N_2/Ar$ gas ratio was 0.1, 0.3.

• Journal of the Korean Ceramic Society
• /
• v.38 no.2
• /
• pp.143-151
• /
• 2001

Ca/LiCl-KCl/CaCrO$_4$열 전지계의 양극재료로서 BCT(Body-Centered Tetragonal) 결정구조를 갖는 CaCrO$_4$분말을 GNP로 합성하고, SEM, TEM, XRD를 이용하여 그 미세구조를 분석하였다. GNP 공정에 의한 CaCrO$_4$분말은 단일상으로 0.5$mu extrm{m}$ 이하의 입자 크기를 가지며 균일하게 분포한 반면, 기존의 분말 혼합법은 높은 하수 온도 및 장시간의 하소 조건을 필요하므로 미세한 분말 합성이 어렵고 pellet 형태로 만들었을 때 GNP 분말에 비해 비표면적이 현저하게 작기 때문에 전극 재료로써 유리하지 못하다. Ca/LiCl-KCl/CaCrO$_4$계의 전기 화학적인 특성을 평가해본 결과 전지셀을 Ca/DEB(LiCl-KCl+CaCrO$_4$+SiO$_2$)와 같은 DEB 형태로 만들었을 때 $600^{\circ}C$의 온도에서 2.0 V이상 (<100 mA/㎤)의 안정한 전압이 5분 이상 유지되었다. 그러나 3층 전극 셀(Ca/LiCl/KCl/ CaCrO$_4$)에서는 동일한 온도에서 2.0 V이상 (<100 mA/㎤)의 전압이 7분 이상 유지되었으나 불안정한 전압 변동 및 낮은 peak voltage로 인해 DEB 셀의 전지 특성이 더 우수한 것으로 생각된다. 양극 재료의 제조 방법의 관점에서 볼 때, 동일한 DEB(Depolarizer : Electrolyte : Binder=25 : 70 : 5 wt%) 조성의 셀 구성시, GNP 분말은 분말 혼합법에 의한 분말보다 반응 표면적이 훨씬 크기 때문에 GNP 양극 활 물질의 DEB 셀에서의 전지 수명이 더 길었다.