• 제목/요약/키워드: Copper/low k

검색결과 594건 처리시간 0.03초

탄자니아의 소규모 광산에서 구리광석 정제를 위한 침출 및 용매 추출에 관한 연구 (A Study on Leaching and Solvent Extraction for the Recovery of Copper Ore for Small-Scale Mining in Tanzania)

  • 소순영;전용진;암브로즈 이티카
    • 한국산학기술학회논문지
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    • 제18권4호
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    • pp.438-445
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    • 2017
  • 탄자니아에는 풍부한 구리 매장량이 있으나, 적절한 구리 회수 공정의 결핍과 광산 기술 개발을 위한 자금 부족으로 구리 금속의 추출량은 여전히 낮은 상태이다. 이에 따라 소규모 구리 채굴을 위한 간단한 처리공정 개발에 중점을 두어 구리광석에서 구리를 추출하기 위한 침출법과 용매 추출법을 연구하였다. 사용된 구리광석은 규공작석이었으며, 침출 시약으로 황산을 사용하였다. 침출 공정에서 시료의 입경이 $53{\mu}m$보다 작고, 98%(w/w) 황산 농도가 5.0 g/L, 교반 속도가 60에서 80 rpm일 때 최대 구리 회수율이 95.1% 이었다. 용매 추출에서 구리 2가 양이온의 최고의 선택 비율은 등유에 녹인 15 % LIX-70을 이용하여 얻어졌다. pH가 0.5에서 3.0까지, 구리 2가 양이온 추출 효율은 pH가 증가함에 따라 증가했다. 그러나 3.0이상의 pH에서는 다른 금속 이온이 구리 2가 양이온보다 유기물층으로 더 많이 추출되었다. 최고의 용매 추출율은 15% LIX-70를 사용하여 각각 pH 2.0 및 3.0에서 96.5% 이었다.

전해 도금을 이용한 기가급 소자용 구리배선 공정 (Cu Metallization for Giga Level Devices Using Electrodeposition)

  • 김수길;강민철;구효철;조성기;김재정;여종기
    • 전기화학회지
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    • 제10권2호
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    • pp.94-103
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    • 2007
  • 반도체 소자의 고속화, 고집적화, 고신뢰성화에 대한 요구는 알루미늄 합금으로부터 구리로의 배선 물질의 변화를 유도하였다. 낮은 비저항과 높은 내열화성을 특징으로 하는 구리는 그 전기적, 재료적 특성이 알루미늄과 상이하여 배선 형성에 있어 새로운 주변 재료와 공법을 필요로 한다. 본 총설에서는 상감공정(damascene process)을 사용하는 다층 구리 배선 공정에 있어 핵심이 되는 구리 전해 도금(electrodeposition) 공정을 중심으로 확산 방지막(diffusion barrier) 및 도전층(seed layer), 바닥 차오름(bottom-up filling)을 위한 전해/무전해 도금용 유기 첨가제, 화학적 기계적 평탄화(chemical mechanical polishing) 및 표면 보호막(capping layer) 기술 등의 금속화 공정에 대한 개요와 개발 이슈를 소개하고 최근의 연구 결과를 통해 구리 배선 공정의 최신 연구 동향을 소개하였다.

Effects of DC Biases and Post-CMP Cleaning Solution Concentrations on the Cu Film Corrosion

  • Lee, Yong-K.;Lee, Kang-Soo
    • Corrosion Science and Technology
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    • 제9권6호
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    • pp.276-280
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    • 2010
  • Copper(Cu) as an interconnecting metal layer can replace aluminum (Al) in IC fabrication since Cu has low electrical resistivity, showing high immunity to electromigration compared to Al. However, it is very difficult for copper to be patterned by the dry etching processes. The chemical mechanical polishing (CMP) process has been introduced and widely used as the mainstream patterning technique for Cu in the fabrication of deep submicron integrated circuits in light of its capability to reduce surface roughness. But this process leaves a large amount of residues on the wafer surface, which must be removed by the post-CMP cleaning processes. Copper corrosion is one of the critical issues for the copper metallization process. Thus, in order to understand the copper corrosion problems in post-CMP cleaning solutions and study the effects of DC biases and post-CMP cleaning solution concentrations on the Cu film, a constant voltage was supplied at various concentrations, and then the output currents were measured and recorded with time. Most of the cases, the current was steadily decreased (i.e. resistance was increased by the oxidation). In the lowest concentration case only, the current was steadily increased with the scarce fluctuations. The higher the constant supplied DC voltage values, the higher the initial output current and the saturated current values. However the time to be taken for it to be saturated was almost the same for all the DC supplied voltage values. It was indicated that the oxide formation was not dependent on the supplied voltage values and 1 V was more than enough to form the oxide. With applied voltages lower than 3 V combined with any concentration, the perforation through the oxide film rarely took place due to the insufficient driving force (voltage) and the copper oxidation ceased. However, with the voltage higher than 3 V, the copper ions were started to diffuse out through the oxide film and thus made pores to be formed on the oxide surface, causing the current to increase and a part of the exposed copper film inside the pores gets back to be oxidized and the rest of it was remained without any further oxidation, causing the current back to decrease a little bit. With increasing the applied DC bias value, the shorter time to be taken for copper ions to be diffused out through the copper oxide film. From the discussions above, it could be concluded that the oxide film was formed and grown by the copper ion diffusion first and then the reaction with any oxidant in the post-CMP cleaning solution.

금령(金嶺) 및 기구광상(基邱鑛床)의 동광화작용(銅鑛化作用) (The Copper Mineralization of the Keumryeong and Kigu Ore Deposits)

  • 박희인;설용구
    • 자원환경지질
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    • 제25권3호
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    • pp.283-296
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    • 1992
  • The Keumryeong deposits is a low grade copper deposits in which copper minerals form disseminated grains and thin veinlets in felsic volcanics seem to be dacite. Alteration of the volcanics consists mainly pervasive propylitization and silicification. Potassic alteration characterized by biotite developed locally adjacent to southwestern contact of granodiorite body. Principal sulfide minerals in altered zone are mainly pyrite and lesser chalcopyrite. Chalcopyrite content in potassic zone is relatively higher than that of surrounding propylitized zone. Pyrite and chalcopyrite accompanies magnetite, molybdenite, sphalerite, pyrrhotite, arsenopyrite, pentlandite, marcasite, hematite, ilmenite, rutile, bismuthinite and native Bi as disseminations, veinlets and knots. Granodiorite body is propylitized and contains veinlets of pyrite, chalcopyrite and molybdenite. Fluid inclusions in sulfide-bearing quartz veinlets and quartz grains of felsic volcanics and granodiorite in altered zone consist of liquid-rich, vapor-rich, $CO_2-bearing$ and halite-bearing inclusions. These four types of inclusion intimately associated on a microscopic scale and indicate condensing or boiling of ore fluid during mineralization. Homogenization temperature of coexisting fluid inclusions are mostly in the range of 350 to $450^{\circ}C$. High salinity fluid contains 28.6 to 48.4 weight percent NaCI equivalent and moderate salinity fluid cotains 0.5 to 12.5 weight percent NaCl equivalent. Pressure estimated from $CO_2$ mole fraction of $CO_2-bearing$ inclusion range 160 to 375 bars. The Kigu copper deposits is a fissure filling copper vein developed 500 m south from the Keumryong deposits. Mineralogy and fluid inclusion data of the Kigu deposits are similar to that of the Keumryeong deposits. Homogenization temperature of fluid inclusions from the Kigu deposits are reasonable agreement with temperature estimated from sulfidation curve of cubanite-chalcopyrite-pyrite-pyrrhotite and pyrite-pyrrhotite mineral assemblages. Not only mineral occurrence and wall rock alteration in the Keumryeong deposits but also fluid inclusion data such as temperature, salinity, pressure and boiling evidences are similar to those of porphyry copper deposits.

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Impregnated Active Carbon-Shelf Life Studies and Its Evaluation Against Cyanogen Chloride with and without Canister

  • Singh, Beer;Saxena, Amit;Srivastava, Avanish Kumar;Dubey, Devendra Kumar;Gupta, Arvind Kumar
    • Carbon letters
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    • 제8권4호
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    • pp.280-284
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    • 2007
  • Samples of active carbon of $1150\;m^2/g$ surface area were impregnated with ammoniacal salts of copper, chromium and silver, with and without triethylenediamine. The samples of impregnated carbon were aged at $50^{\circ}C$, with and without 90% RH (relative humidity), for a little more than one year and chemically evaluated periodically. Initially copper (II) and chromium (VI) reduced very fast in the samples in humid atmosphere to the extent of 30% and 60% respectively in four months. These values were found to be unaffected by the presence of triethylenediamine (TEDA) indicating that the chemical did not retard the reduction process of chromium (VI) and copper (II). However, in the absence of humidity the reduction of the impregnants was significantly less (10-12%, w/w) in four months. It was quite evident; therefore, that the moisture was mainly responsible for the reduction of chromium (VI) and copper (II) species in impregnated carbons. The prolonged ageing of the samples with and without triethylenediamme after four months with and without humid atmosphere showed that the extent of reduction of chromium (VI) was very low, i.e. 5-10% and of copper (II) was 2-25%. Silver is not reduced due to carbon, as it remained unchanged in concentration on storage. The impregnated carbon samples (100 g) without triethylenediamine, which were aged at room temperature for 5 years in absence of humidity and unaged when evaluated against cyanogen chloride (CNCl) at a concentration of 4 mg/L and airflow rate of 30 lpm showed a high degree of protection (80- 110 minutes).

디지털구내방사선사진의 구리당량화상에 대한 평가 (An Assessment on Cu-Equivalent Image of Digital Intraoral Radiography)

  • 김재덕
    • 치과방사선
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    • 제29권1호
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    • pp.33-42
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    • 1999
  • Geometrically standardized dental radiographs were taken. We prepared Digital Cu-Equivalent Image Analyzing System for quantitative assessment of mandible bone. Images of radiographs were digitized by means of Quick scanner and personal Mcquintosh computer. NIH image as software was used for analyzing images. A stepwedge composed of 10 steps of 0.1mm copper foil in thickness was used for reference material. This study evaluated the effects of step numbers of copper wedge adopted for calculating equation. kVp and exposure time on the coefficient of determination(r²)of the equation for conversion to Cu-equivalent image and the coefficient of variation and Cu-Eq value(mm) measured at each copper step and alveolar bone of the mandible. The results were as follows: 1. The coefficients of determination(r²) of 10 conversion equations ranged from 0.9996 to 0.9973(mean=0.9988) under 70kVp and 0.16 sec. exposure. The equation showed the highest r was Y=4.75614612-0.06300524x +0.00032367x² -0.00000060x³. 2. The value of r² became lower when the equation was calculated from the copper stepwedge including 1.0mm step. In case of including 0mm step for calculation. the value of r showed variability. 3. The coefficient of variation showed 0.11, 0.20 respectively at each copper step of 0.2, 0.1mm in thickness. Those of the other steps to 0.9 mm ranged from 0.06 to 0.09 in mean value. 4. The mean Cu-Eq value of alveolar bone was 0.14±0.02mm under optimal exposure. The values were lower than the mean under the exposures over 0.20sec. in 60kVp and over 0.16sec. in 70kVp. 5. Under the exposure condition of 60kVp 0.16sec.. the coefficient of variation showed 0.03. 0.05 respectively at each copper-step of 0.3, 0.2mm in thickness. The value of r² showed over 0.9991 from both 9 and 10 steps of copper. The Cu-Eq value and the coefficient of variation was 0.14±0.01mm and 0.07 at alveolar bone respectively. In summary. A clinical application of this system seemed to be useful for assessment of quantitative assessment of alveolar provided high coefficient of determination is obtained by the modified adoption of copper step numbers and the low coefficient of variation for the range of Cu-Equivalent value of alveolar bone from optimal kVp and exposure time for each x-ray machine.

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폐전선으로부터 유가자원 회수를 위한 저온열분해(I) (Low Temperature Pyrolysis for Valuable Resources Recovery from Waste Wire (I))

  • 한성국;김재용
    • 공업화학
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    • 제20권2호
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    • pp.223-226
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    • 2009
  • 본 연구에서는 기존 소각방법의 단점을 보완할 수 있는 열분해를 통해 폐전선을 처리하고 부가적으로 생성되는 구리 및 합성연료유의 회수를 그 목적으로 하고 있다. 폐전선의 열분해 공정을 거쳐 구리를 회수하고 쉽게 오일로 분해될 뿐 아니라 오일의 유용성이 매우 크기 때문에 아주 고가의 유효자원을 회수할 수 있다. 폐전선 열분해를 위한 최적 온도를 결정하기 위하여 350, 450, $550^{\circ}C$에서 열분해를 실행하였다. $700^{\circ}C$까지 TG/DTA를 실행하였으며 온도상승률은 분당 $5^{\circ}C$로 하였다. 그 결과 PVC의 염화수소제거를 위한 최적 온도 범위가 PE나 PP보다 낮은 영역인 $280{\sim}350^{\circ}C$임을 보였다. 실질적으로 폐전선으로부터 95% 이상의 구리금속과 발열량이 8027 kcal/kg인 합성연료유를 회수할 수 있었다.

근육조성에 따른 축종특이성 구명 III. 축종별 근육중 무기물 함량 (Species characterization of animal by muscle composition analysis III. The contents of minerals in muscle from various species)

  • 이명헌;김상근
    • 대한수의학회지
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    • 제39권3호
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    • pp.501-512
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    • 1999
  • We analyzed the contents of 12 types of minerals such as calcium in muscle from various species. Thereafter we observed changes of the concentrations according to age, part and sex in major domestic animals. The concentrations of calcium, iron, sodium, potassium, magnesium and zinc were high respectively whilst the content of cobalt, chromium, copper, manganese, molybdenum and nickel were low respectively in the muscle. The concentration of calcium was high in duck and dog but low in pig and horse. Also high level of sodium content was detected in dog and the content of potassium, iron showed high level in horse compared with the content in other animals. In 6 types of microminerals as cobalt, the level of muscle were no more than 1 ppm showing very low content in all animal, but $2.99{\pm}0.85$ppm of copper in duck was an exceptional case. According to the age some species showed small range of variation centering on macrominerals and there was no remarkable change in microminerals. Distribution of minerals was different according to the part and the variation was very diverse compared with other factors such as age and sex. Additionally, the content of minerals in muscle was higher in female than in male chicken and duck. In conclusion, the difference of the content of minerals according to the species was mainly focused on macrominerals.

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결정질 실리콘 태양전지에 적용될 Light-induced plating을 이용한 Ni/Cu 전극에 관한 연구 (The Research of Ni/Cu Contact Using Light-induced Plating for Cryatalline Silicom Solar Cells)

  • 김민정;이수홍
    • 한국태양에너지학회:학술대회논문집
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    • 한국태양에너지학회 2009년도 추계학술발표대회 논문집
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    • pp.350-355
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    • 2009
  • The crysralline silicon solar cell where the solar cell market grows rapidly is occupying of about 85% or more high efficiency and low cost endeavors many crystalline solar cells. The fabricaion process of high efficiency crystalline silicon solar cells necessitate complicated fabrication processes and Ti/Pd/AG contact, This metal contacts have only been used in limited areas in spite of their good srability and low contact resistance because of expensive materials and process. Commercial solar cells with screen-printed solar cells formed by using Ag paste suffer from loe fill factor and high contact resistance and low aspect ratio. Ni and Cu metal contacts have been formed by using electroless plating and light-induced electro plating techniques to replace the Ti/Pd/Ag and screen-printed Ag contacts. Copper and Silver can be plated by electro & light-induced plating method. Light-induced plating makes use the photovoltaic effect of solar cell to deposit the metal on the front contact. The cell is immersed into the electrolytic plating bath and irradiated at the front side by light source, which leads to a current density in the front side grid. Electroless plated Ni/ Electro&light-induced plated Cu/ Light-induced plated Ag contact solar cells result in an energy conversion efficiency of 16.446 % on 0.2~0.6${\Omega}$ cm, $20{\times}20mm^2$, CZ(Czochralski) wafer.

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Removal of Cu (II) from aqueous solutions using magnetite: A kinetic, equilibrium study

  • Kalpakli, Yasemen
    • Advances in environmental research
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    • 제4권2호
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    • pp.119-133
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    • 2015
  • Water pollution means that the physical, chemical and biological properties of water are changing. In this study, adsorption was chosen as the treatment method because it is an eco-friendly and low cost approach. Magnetite is a magnetic material that can synthesize chemical precipitation. Magnetite was used for the removal of copper in artificial water samples. For this purpose, metal removal from water dependent on the pH, initial concentration of metal, amount of adsorbent and effect of sorption time were investigated. Magnetite was characterized using XRD, SEM and particle size distribution. The copper ions were determined by atomic absorption spectrometry. The adsorption of copper on the magnetite was studied in a batch process, with different aqueous solutions of Cu (II) at concentrations ranging from 10 to $50mg\;l^{-1}$. Optimum conditions for using magnetite were found to be concentration of $10mg\;L^{-1}$, pH: 4.5, contact time: 40 min. Optimum adsorbent was found to be 0.3 gr. Furthermore, adsorption isotherm data were analyzed using the Langmuir and Freundlich equations. The adsorption data fitted well with the Freundlich ($r^2=0.9701$) and Langmuir isotherm ($r^2=0.9711$) equations. Kinetic and equilibrium aspects of the adsorption process were studied. The time-dependent Cu (II) adsorption data were described well by a pseudo-second-order kinetic model.