• 제목/요약/키워드: Coating Uniformity

검색결과 143건 처리시간 0.025초

Slit-Coater내의 Photo Resist의 코팅 특성 (Coating Characteristics of Photo Resist in a Slit-Coater)

  • 김장우;정진도;김성근
    • 반도체디스플레이기술학회지
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    • 제3권3호
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    • pp.41-44
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    • 2004
  • The aim of this study is the confirmation of the coating uniformity affected by the surface tension and wall attachment angle in a slit-coater model. In this work, we use the commercial code (Fluent) to solve the two-phase flow formed with air and photo resist numerically. The results show that the surface tension is the most important factor to determine the coating efficiency in the view of coating uniformity, and the coating uniformity is 2% for our slit-coater model and conditions. To improve the coating uniformity, it is in need of minimization of the sidewall effect of slit-coater.

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Coating 렌즈에서 박막의 균일성 평가 방법 및 적용 (Uniformity estimation mathod and application of thin film in Coating lenses)

  • 김용근;박상안
    • 한국안광학회지
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    • 제7권2호
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    • pp.175-180
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    • 2002
  • 렌즈의 thin film 균일성을 평가하기 위하여 spctrophotometer를 이용한다. 렌즈의 중심 중간, edge 등의 지점에서 파장의존상의 반사율을 측정하여 반사율 spectrum의 두 peak를 선택하여 비교하여, 박막 균일성 여부를 분석한다. 반사율의 두 peak의 파장 영역(${\lambda}_1,{\lambda}_2$)으로부터 thin film의 thickness(t)를 구한다. $$t=\frac{1}{2(n^2-\sin^2{\theta})^{1/2}}{\times}\frac{{\lambda}_1{\lambda}_2}{{\lambda}_2-{\lambda}_1}$$ 렌즈의 중심 중간, edge 등의 지점에서 반사율 pattern이 동일 값이면 coating 렌즈의 박막은 균일성 갖는다. coating 렌즈의 박막 균일성 평가 방법을 단층막 $MgF_2$(n=1.38) coating 렌즈에 적용하였다. 박막의 thickness 차이는 360nm 정도였다. 파장의존성에 대한 광반사율의 측정으로부터 coating 렌즈의 박막 균일성을 쉽게 분석할 수 있다.

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가압성형 방식을 사용한 렌즈 일체형 LED 패키지의 색온도 균일성 향상에 관한 연구 (Improvement of Color Temperature Uniformity of Integrated Optic Lens Type LED Packaged using Compression Molding Method)

  • 김완호;강영래;장민석;주재영;송상빈;김재필;여인선
    • 조명전기설비학회논문지
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    • 제27권4호
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    • pp.1-7
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    • 2013
  • Optical characteristics including the view angle and color temperature uniformity of LED packages with an integrated lens fabricated by compression molding method are investigated according to lens shape, lens materials, and phosphor coating methods. Four types of lens shape are designed and their optical output power dependence on the refractive index of silicone encapsulant are evaluated. Also, spatial color temperature uniformities of packages fabricated with different phosphor coating methods-direct coating on a chip vs. uniformly mixed with silicone encapsulant- are compared at various view angles. As the result, it is found that phosphor coating method is more effective on color temperature uniformity than lens shape. The maximum color temperature difference of a package with direct coating of phosphor on a chip is 1,340K according to the view angle at the color temperature of 5,000K, and that of a package with uniformly mixed phosphor is 250K, which indicates 1,090K improvement of color uniformity for the latter case.

코팅 공정에서 공기를 고려한 코터형상 및 운전조건에 따른 코팅현상 해석 (Computer Simulation of Coating Behavior Including Air for Various Coater Geometries and Operational Conditions)

  • 김혜연;류민영;최종근
    • 소성∙가공
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    • 제18권2호
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    • pp.156-159
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    • 2009
  • Slot coating has been wide spread in photo-resist coating on the glass for liquid crystal display. Die in slot coater consists of manifold and land. Material comes in inlet of the die and flow into the manifold and then flow out through the land. The coating thickness variations along the die length depend upon inside of die design such as manifold and die land. However the coating thickness variations along the moving direction(coating direction) of the coater depend upon the operational conditions of coater as well as die lip design. The coating behaviors including atmospheric air have been investigated in this study. Die geometries considered in this study were nozzle gap and length of the die lip. Coating gap and coating speed were the variables fur coating operational conditions. When the nozzle gap and length of die lip increased climbing effect of PR on the downstream die lip was reduced. Subsequently uniformity of coating thickness improved. Uniformity of coating thickness also enhanced as coating gap and coater speed increased. The uniformity of coating gap was related to the velocity vector distributions on the coating surface.

Flow Analysis of the Spin Coating Machine

  • Ha, Man-Yeong;Kang, Dong-Hoon;Jeong, Bong-Kyo
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2003년도 International Meeting on Information Display
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    • pp.1147-1150
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    • 2003
  • When a braun tube becomes wider, one of the major problems to be experienced is the non-uniform coating along the four diagonal directions on its surface. This non-uniformity in the coating thickness has a deep relation with the fluid flow on the surface of a braun tube. In order to control the fluid flow properly, we install the plate to block fluid flow at the corner of a braun tube. In the present study, we investigate the effects of the geometry of plate to control the fluid flow and coating uniformity and determine the optimal shape of plate to improve the quality of coating uniformity.

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ESD 전극을 이용한 분무코팅 균일도 개선에 관한 연구 (Improvement of Spray Coating Uniformity using ESD Electrodes)

  • 당현우;양성욱;도양회;최경현
    • 한국기계가공학회지
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    • 제15권2호
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    • pp.118-124
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    • 2016
  • In this study, experiments are conducted to improve spray coating uniformity by using second and third electrodes based on the electrospray atomization mechanism. The uniformity of fabricated thin films can be improved by adjusting the design of the second electrode. The implementation of the second electrode with an elongated hole and a bending angle of $90^{\circ}$ results in highly uniform films. In addition, induced area to substrate is increased by lowering the applied voltage using the third electrode with a round rod shape. A linear correlation between applied voltage and induced area is confirmed. Thin film thickness and surface roughness are measured after the fabrication of thin films through the electrospray process. It is confirmed that a thin film is formed having an average thickness of 273.44 nm, a thickness uniformity of less than 10%, and a surface roughness of 3 nm.

슬릿 노즐 내부 압력 분포와 코팅 박막 두께 균일도 간의 상관관계 연구 (Study on Correlation Between the Internal Pressure Distribution of Slit Nozzle and Thickness Uniformity of Slit-coated Thin Films)

  • 김기은;나정필;정모세;박종운
    • 반도체디스플레이기술학회지
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    • 제22권4호
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    • pp.19-25
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    • 2023
  • With an attempt to investigate the correlation between the internal pressure distribution of slit nozzle and the thickness uniformity of slot-coated thin films, we have performed computational fluid dynamics (CFD) simulations of slit nozzles and slot coating of high-viscosity (4,800 cPs) polydimethylsiloxane (PDMS) using a gantry slot-die coater. We have calculated the coefficient of variation (CV) to quantify the pressure and velocity distributions inside the slit nozzle and the thickness non-uniformity of slot-coated PDMS films. The pressure distribution inside the cavity and the velocity distribution at the outlet are analyzed by varying the shim thickness and flow rate. We have shown that the cavity pressure uniformity and film thickness uniformity are enhanced by reducing the shim thickness. It is addressed that the CV value of the cavity pressure that can ensure the thickness non-uniformity of less than 5% is equal to and less than 1%, which is achievable with the shim thickness of 150 ㎛. It is also found that as the flow rate increases, the average cavity pressure is increased with the CV value of the pressure unchanged and the maximum coating speed is increased. As the shim thickness is reduced, however, the maximum coating speed and flow rate decrease. The highly uniform PDMS films shows the tensile strain as high as 180%, which can be used as a stretchable substrate.

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고농도 도공과 원지의 흡수특성이 인쇄모틀에 미치는 영향 - PEA Module를 이용한 인쇄모틀 평가 - (Effect of High Solid Coating and Water Absorption Uniformity of Base Paper on Print Mottle - Evaluation of print mottle with PEA module -)

  • 유성종;조병욱;김용식;이용규;이세현
    • 펄프종이기술
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    • 제39권2호
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    • pp.17-24
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    • 2007
  • PEA(Print Evenness Analyzer) Module can be utilized as a tool to evaluate print mottle. The tester is de-signed to measure the uniformity of liquid penetration into paper at very short contact time. To evaluate effects of base paper properties on print mottle, the experiments were performed with 3 types of base pa-per whose sizing degree, roughness and porosity were varied. Coated papers were produced with high solid coating color (70%) and low solid coating color (67%). Uniformity of water absorption into base paper and coated paper was measured with PEA. It was found that, in order to minimize print mottle, base paper shall be produced with a high sizing degree and low roughness and the concentration of coating color shall be kept as high as possible, providing that it has proper rheology properties for coating process.

Luminance efficiency of PDP having phosphor layers formed via osmosis coating process

  • Park, Do-Young;Kim, Yong-Seog
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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    • pp.227-230
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    • 2004
  • Phosphor layers on rear plate of PDP were formed via osmosis coating process in an attempt to improve thickness uniformity of phosphor layer and eventually to enhance luminance and its efficiency of plasma display panel. The phosphor layers were formed uniformly not only on the sidewalls of barrier ribs but also on the dielectric layer of rear plate by the process. The processing parameters affecting the thickness uniformity of the phosphor layer formed by the osmotic coating process were investigated.

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컴퓨터 해석을 통한 Slot 코팅공정에서 운전방향의 코팅품질 평가 및 다이 설계 (Coater Die Design and Coating Quality Evaluation in the Machine Direction of Slot Coating Through Computer Simulation)

  • 김태훈;이두이;성달제;류민영
    • Elastomers and Composites
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    • 제48권4호
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    • pp.282-287
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    • 2013
  • 슬롯코팅은 평판 디스플레이의 부품을 위해 유리에 감광제를 코팅방법으로 많이 쓰이고 있다. 갈수록 고화질의 디스플레이가 요구됨에 따라 코팅의 고품질도 요구되고 있다. 슬롯코팅에서 코팅의 품질은 노즐방향의 코팅 균일성과 운전방향의 코팅 균일성으로 평가된다. 노즐방향의 코팅 균일성은 코터다이 내부의 설계에 의존되며 운전방향의 코팅 균일성은 코터다이 외부의 모양과 운전조건에 의존된다. 본 연구에서는 스롯코팅에서 운전방향의 코팅 균일성에 대해서 컴퓨터해석을 통하여 조사하였다. 해석에서 다이 외부의 형상으로 다이 립 각도와 길이를 변수로 하였고, 운전조건으로는 코팅속도를 변수로 하여 코팅 현상을 분석하고 코팅의 품질을 평가하였다. 코팅속도가 커질수록 코팅두께가 얇아지며 코팅의 균일성이 증대되었으나 maniscus형성이 불안정하여 코팅의 안정성은 감소되었다. Down stream 다이 립 각도가 커질수록 코팅두께의 편차는 작아졌으며, Down stream 다이 립 길이가 길수록 코팅 두께는 얇아졌고 안정적인 코팅이 이루어지기까지의 시간이 길어졌다.