한국정보디스플레이학회:학술대회논문집
- 2003.07a
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- Pages.1147-1150
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- 2003
Flow Analysis of the Spin Coating Machine
- Ha, Man-Yeong (School of Mechanical Engineering, Pusan National University) ;
- Kang, Dong-Hoon (School of Mechanical Engineering, Pusan National University) ;
- Jeong, Bong-Kyo (Device Research Lab., LG.Philips Display Gumi 1 Plant)
- Published : 2003.07.09
Abstract
When a braun tube becomes wider, one of the major problems to be experienced is the non-uniform coating along the four diagonal directions on its surface. This non-uniformity in the coating thickness has a deep relation with the fluid flow on the surface of a braun tube. In order to control the fluid flow properly, we install the plate to block fluid flow at the corner of a braun tube. In the present study, we investigate the effects of the geometry of plate to control the fluid flow and coating uniformity and determine the optimal shape of plate to improve the quality of coating uniformity.
Keywords