• Title/Summary/Keyword: Cleanrooms

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Simulation of Fire in Large Cleanrooms (대규모 클린룸 화재의 시뮬레이션)

  • Park, Woe-Chul
    • Fire Science and Engineering
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    • v.28 no.3
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    • pp.29-33
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    • 2014
  • Cleanroom fires were simulated by using Fire Dynamics Simulator. A grid size of $0.5{\times}0.5{\times}0.2m^3$ was selected following review of grid sizes. Fires in three large cleanrooms were investigated to confirm safety by applying the requirements on temperature, visibility, and carbon monoxide concentration in performance based design. The worst situation without sprinkler system and air flow of 0.1 m/s downward in the cleamrooms was considered. It was confirmed that all the three cleanrooms were safe in case without sprinklers since the temperature was below the safety requirement. Decrease in visibility and carbon monoxide concentration due to the fires were negligible.

A Numerical Analysis on the Airflow Characteristics in Super Cleanrooms with Different Design Types (초청정 클린룸 공조방식에 따른 기류특성에 관한 수치해석)

  • 노광철;이승철;오명도
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.15 no.9
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    • pp.751-761
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    • 2003
  • We performed the numerical analysis on the airflow characteristics in the two type of cleanroom systems, which are the axial fan type (AFT) and the fan filter unit (FFU). A computational fluid dynamic model was applied to investigate and compare the nonuniformity, the deflection angle and the air ventilation effectiveness of the two designs of cleanrooms when dampers are adjusted and not adjusted. And the flow-resistance models of the various components were used in this simulation. We know that the airflow characteristics of the cleanrooms are largely affected by damper adjusting And we also find out that the FFU system is superior to the AFT system through the comparison of the cleanroom performance indices.

Assessment of hazardous substances and workenvironment for cleanrooms of microelectronic industry (전자산업 청정실의 작업환경 및 유해물질농도 평가)

  • Chung, Eun-Kyo;Park, Hyun-Hee;Shin, Jung-Ah;Jang, Jae-Kil
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.19 no.3
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    • pp.280-287
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    • 2009
  • High-tech microelectronics industry is known as one of the most chemical-intensive industries. In Korea, Microelectronics industry occupied 38% of export and 16% of working employees work in microelectronics industry. But, chemical information and health hazards of high-tech microelectronics manufacturing are poorly understood because of rapid development and its penchant for secrecy. We need to investigate on chemical use and exposure control. We Site-visits to 6 high-tech microelectronics manufacturing company which have cleanroom work using over 1,000kg organic solvents (5 semi-conductor chips and its related parts company, 1 liquid crystal display (LCD)). We reviewed their data on chemical use and ventilation system, and measured TVOCs (Total Volatile Organic Compounds) and carbon dioxide concentration. All cleanroom air passed through hepa filters to acheive low particle levels and only 1 cleanroom uses carbon filters to minimize the organic solvents exposures In TVOC screening test, Cleanroom for semi-conductor chips and its related parts company with laminar down flow system (e.g. class 1~100) showed nondetectable level of TVOCs concentration, but Cleanroom for liquid crystal display (LCD) with conventional flow system (e.g. class 1,000~10,000) showed 327 ppm as TVOCs. Acetone concentration in cleanroom for Jig cleaning, LC Injection, Sealing processes were 18.488ppm (n=14), 49.762 ppm (n=15), 8.656 ppm (n=14) as arithmetric mean. Acetone concentration in cleanroom for LCD inspection process was 40ppm (n=55) as geometric mean, where the range was 7.8~128.7ppm and weakly correlated with ventilation rate efficiency(r=0.44, p<0.05). To control organic solvents in cleanrooms, chemical and carbon filters should be installed with hepa filters. Even though their volatile organic compounds concentration was not exceed to occupational exposure limits, considering of entrance limited cleanroom environment, long-term period exposure effects and adverse health effects of cleanroom worker need further reseach.

A Study on Energy Reduction in an Outdoor Air Conditioning System for Semiconductor Manufacturing Cleanrooms Using Water Spray Humidification (반도체 클린룸용 외기공조시스템의 수분무 가습을 이용한 에너지절감에 관한 연구)

  • Song, Won-Il;Kim, Ki-Cheol;Yoo, Kyung-Hoon;Shin, Dae-Kun;Tae, Kyung-Eung;Kim, Yong-Sik;Park, Dug-Jun
    • Particle and aerosol research
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    • v.13 no.2
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    • pp.65-77
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    • 2017
  • In recent large-scale semiconductor manufacturing cleanrooms, the energy consumption in outdoor air conditioning (OAC) systems to heat, humidify, cool and dehumidify outdoor air(OA) represents about 40~50 % of the total cleanroom power consumption required to maintain cleanroom environment. Therefore, the assessment of energy consumption in outdoor air conditioning systems is essential for reducing the outdoor air conditioning load for a cleanroom. In the present study, an experiment with an outdoor air flow rate of $1,000m^3/h$ was conducted to compare the energy consumption in steam humidification, simple air washer, exhaust air heat recovery type air washer and dry cooling coil(DCC) return water heat recovery type air washer OAC systems. Besides, a numerical analysis was carried out to evaluate the annual energy consumption of the aforementioned four OAC systems. It was shown that the simple air washer, exhaust air heat recovery type air washer and DCC return water heat recovery type air washer OAC systems using water spray humidification were more energy-efficient than the steam humidification OAC system. Furthermore the DCC return water heat recovery type air washer OAC system was the most energy-efficient.

The Development of Cable Carrier Chain System with Low Noise and Dust for Moving Stages in Cleanrooms using TRIZ (TRIZ를 활용한 클린룸용 저소음 및 저분진 케이블 이송 체인 시스템의 개발)

  • Kim, Du-Jin;Hyun, Dong-Hoon;Kim, Young-Il
    • Journal of the Semiconductor & Display Technology
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    • v.8 no.4
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    • pp.83-88
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    • 2009
  • In this paper TRIZ was used to solve noise and dust reduction related to cable carrier chain system. On modern machines in a clean room, the contradictions arose due to increase noise and dust for the high speed were eliminated with 40 principles and seperation rules. As the results, the sound pressure level of the new carrier chain system was reduced to below 40 dB(A), and cleanroom classifications was satisfied with ISO class 4. In these successful results, TRIZ showed its usefulness in solving the design problems even with severe constraints.

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A Study on the 3-D Airflow and Dynamic Cross Contamination in the Photolithography Process Cleanroom (광식각공정이 있는 클린룸에서의 3차원 기류 및 동적교차오염에 관한 연구)

  • Noh, Kwang-Chul;Oh, Myung-Do;Lee, Seung-Chul
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.28 no.5
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    • pp.560-568
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    • 2004
  • We performed the numerical study on the characteristics of the 3-D airflow and dynamic cross contamination in the photolithography process cleanroom. The nonunifurmity, the deflection angle and the global cross contamination were used for analyzing the characteristics and performances of cleanroom. From the numerical results, we knew that the airflow characteristics of the cleanrooms are largely affected by the porosity of panel and the adjustment of dampers and the global cross contamination varies with the location of source and the passage of time through the concentration ratio.

A Numerical Study on the Characteristics of Airflow and Cross Contamination in the Photolithography Process Cleanroom (광식각공정 클린룸에서의 기류 및 교차오염에 대한 수치적 연구)

  • Noh, Kwang-Chul;Lee, Seung-Chul;Oh, Myung-Do
    • Proceedings of the KSME Conference
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    • 2003.11a
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    • pp.151-156
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    • 2003
  • We performed the numerical study on the characteristics of the airflow and cross contamination in the photolithography process cleanroom. The nonuniformity, the deflection angle and the global cross contamination were used for analyzing the characteristics and performances of cleanroom. We knew that the airflow characteristics of the cleanrooms are largely affected by the porosity of panel and the adjustment of dampers. And the numerical result showed that the global cross contamination varies with the location of source and the passage of time.

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Airborne Fine Particle Measurement Data Analysis and Statistical Significance Analysis (공기중 미세입자 측정 데이터 분석 및 통계 유의차 분석)

  • Sung Jun An;Moon Suk Hwan
    • Journal of the Semiconductor & Display Technology
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    • v.22 no.1
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    • pp.1-5
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    • 2023
  • Most of the production process is performed in a cleanroom in the case of facilities that produce semiconductor chips or display panels. Therefore, environmental management of cleanrooms is very important for product yield and quality control. Among them, airborne particles are a representative management item enough to be the standard for the actual cleanroom rating, and it is a part of the Fab or Facility monitoring system, and the sequential particle monitoring system is mainly used. However, this method has a problem in that measurement efficiency decreases as the length of the sampling tube increases. In addition, a statistically significant test of deterioration in efficiency has rarely been performed. Therefore, in this study, the statistically significant test between the number of particles measured by InSitu and the number of particles measured for each sampling tube ends(Remote). Through this, the efficiency degradation problem of the sequential particle monitoring system was confirmed by a statistical method.

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Recent Progress in Air-Conditioning and Refrigeration Research : A Review of Papers Published in the Korean Journal of Air-Conditioning and Refrigeration Engineering in 2010 (설비공학 분야의 최근 연구 동향 : 2010년 학회지 논문에 대한 종합적 고찰)

  • Han, Hwa-Taik;Lee, Dae-Young;Kim, Seo-Young;Choi, Jong-Min;Kim, Su-Min;Kwon, Young-Chul;Baik, Yong-Kyu
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.23 no.6
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    • pp.449-469
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    • 2011
  • This article reviews the papers published in the Korean Journal of Air-Conditioning and Refrigerating Engineering during 2010. It is intended to understand the status of current research in the areas of heating, cooling, ventilation, sanitation, and indoor environments of buildings and plant facilities. Conclusions are as follows. (1) Research trends of thermal and fluid engineering have been surveyed as groups of general thermal and fluid flow, fluid machinery, and new and renewable energy. Various topics were presented in the field of general thermal and fluid flow. Research issues mainly focused on the thermal reliability of axial fan and compressor in the field of fluid machinery. Studies on the design of ground source heat pump systems and solar chemical reactors were executed in the field of new and renewable energy. (2) Research works on heat transfer area have been reviewed in the categories of heat transfer characteristics and industrial heat exchangers. Researches on heat transfer characteristics included heat transfer in thermoelectric cooling/power generation systems, combined heat and power systems, carbon nano fluid with PVP, channel filled with metal foam and smoke ventilation in a rescue station of a railroad tunnel. Also the studies on flow boiling of R123/oil mixture in a plain tube bundle and R410A charge amount in an air cooled mini-channel condenser were reported. In the area of industrial heat exchangers, researches on plate heat exchanger, shell and tube heat exchanger, enthalpy exchanger, micro channel PCHE were performed. (2) Research works on heat transfer area have been reviewed in the categories of heat transfer characteristics and industrial heat exchangers. Researches on heat transfer characteristics included heat transfer in thermoelectric cooling/power generation systems, combined heat and power systems, carbon nano fluid with PVP, channel filled with metal foam and smoke ventilation in a rescue station of a railroad tunnel. Also the studies on flow boiling of R123/oil mixture in a plain tube bundle and R410A charge amount in an air cooled mini-channel condenser were reported. In the area of industrial heat exchangers, researches on plate heat exchanger, shell and tube heat exchanger, enthalpy exchanger, micro channel PCHE were performed. (3) Refrigeration systems with alternative refrigerants such as hydrocarbons, mixed refrigerants, and CO2 were studied. Performance improvement of refrigeration systems are tried applying various ideas of refrigerant subcooling, dual evaporator with hot gas bypass control and feedforward control. The hybrid solar systems combining the solar collection devices with absorption chillers or compression heat pumps are simulated and studied experimentally as well to improve the understanding and the feasibility for actual applications. (4) Research trend in the field of mechanical building facilities has been found to be mainly focused on field applications rather than performance improvements. Various studies on heating and cooling systems, HVAC facilities, indoor air environments and energy resources were carried to improve the maintenance and management of building service equipments. In the field of heating and cooling systems, papers on a transformer cooling system, a combined heat and power, a slab thermal storage and a heat pump were reported. In the field of HVAC facilities, papers on a cooling load, an ondol and a drying were presented. Also, studies on HVAC systems using unutilized indoor air environments and energy resources such as air curtains, bioviolence, cleanrooms, ventilation, district heating, landfill gas were studied. (5) In the field of architectural environment and energy, studies of various purposes were conducted such as indoor environment, building energy, renewable energy and green building. In particular, renewable energy and building energy-related researches have mainly been studied reflecting the global interest. In addition, many researches which related the domestic green building certification of school building were performed to improve the indoor environment of school.