• 마이크로전자및패키징학회지
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• 제16권1호
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• pp.45-50
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• 2009

레이저를 이용 실리콘 관통형 접속기술인 TSV(Through-Silicon-Via)를 형성할 경우 Debris(파편물) 및 Particle이 발생되므로 이를 제거하기 위한 세정공정을 연구하였다. 계면활성제를 이용한 화학적 세정과 Brush를 이용한 물리적 세정을 검토하기 위하여 세정기를 제작하고 8인치 CMOS Image Sensor wafer에 직경 $30{\mu}m$, 깊이 $100{\mu}m$를 갖는 Via를 제작하여 두 가지의 세정방법을 연구하였다. 세정액은 DI Water와 계면활성제의 혼합비 2:1에서 Debris 범위가 $73{\mu}m^2$로 희석비가 낮을수록 세정력이 우수하였다. 레이저의 주파수와 속도변위에 따른 가공 조건 변화에는 Debris 분포차가 5% 미만으로 세정력에는 영향이 없었다. Brush를 이용하여 Debris를 제거하는 실험에서 Strip $1000{\sim}3000rpm$, Rinse $50{\sim}3000rpm$, Brush $200{\sim}300rpm$ 으로 증가시켜 세정하였을 때 Crack이나 손상 없이 Debris의 분포가 감소하였다. 따라서 화학적 세정과 물리적 세정으로 Debris를 제거할 수 있다.

• 상하수도학회지
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• 제25권6호
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• pp.981-987
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• 2011

Biologically treated water contains a large quantity of organic matters and microorganisms which can cause various problems to membrane. The membrane fouling occurred by these reasons is hard to control by single physical cleaning. This study analyzes the efficiency of aeration with chemical backwashing and foulants removal during chemical backwashing. The cleaning efficiency improves when the chemical concentration is high and the contact time of chemical is long. Chemical backwashing with aeration shows exceptional cleaning efficiency which leads the physical cleaning is required during chemical backwashing since it forms flow inside the membrane submerged tank. From the foulants removal analysis, the particles such as turbidity and TOC removal rate increase when the aeration is applied. Dissolved matter of DOC and UV254 removal is dependent on higher chemical concentration. According to FTIR analysis, one of major foulants, the polysaccharide is controlled by the chemical backwashing with aeration condition.

• 상하수도학회지
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• 제25권2호
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• pp.177-184
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• 2011

Membrane fouling is an unavoidable phenomenon in operation of seawater reverse osmosis (SWRO) and major obstacle for economic and efficient operation. When fouling occurs on the membrane surface, the permeate flux is decreased, on the contrary, the trans-membrane pressure (TMP) is increased, therefore operation and maintaining costs and potential damage of membranes are able to the pivotal risks of the process. Chemical cleaning process is essential to prevent interruptions for effective RO membrane filtration process. This study focused on proper chemical cleaning condition for polyamide RO membranes of 4 companies. Several chemical agents were applied for chemical cleaning under numbers of operating conditions. Additionally, a monitoring tool of FEEM as autopsy analysis method is adapted for the prediction of organic bio-fouling.

• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2007년도 추계종합학술대회
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• pp.747-750
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• 2007

본 연구는 부식을 방지하기 위해서는 metal line식각 후 염소 잔유물 과 plasma charge up을 식각 조건, PR strip조건 및 후속 세정 조건을 최적화함으로써 제거해야 한다고 제안 하였다. Metal line에 다량 분포하는 charge up은 후속 세정의 적정 PH와 만났을 때, 하부 tungsten plug의 부식을 유발 하게 된다. Metal line식각 및 PR strip후 세정에 있어 약액의 종류는 부식에 결정적인 영향을 미친다. Galvanic corrosion을 최소화하기 위한 적정 PH, metal attack을 최소화 할 수 있는 chemistry선택, 높은 식각 부산물 제거 효율의 약액, 최적의 $H_2O$처리 조건 등이 metal부식방지에 있어 결정적인 요소임을 확인하였다.

• 한국결정성장학회지
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• 제9권5호
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• pp.504-509
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• 1999

In-situ cleaning and subsequent silicon epitaxial film growth were performed in a load-locked reactor equipped with Hg-grid UV lamp and PBN heater to obtain the smooth and contaminant-free underlying surface and develop low-temperature epitaxial film growth process. The removals of organic and native oxide were investigated using UV-excited $O_2$ and $NF_{3}/H_{2}$, and the effect of the surface condition was examined on the quality of silicon epitaxial film grown at temperature as low as $750^{\circ}C$. UV-excited gas phase cleaning was found to be effective in removing the organic and native oxide successfully providing a smooth surface with RMS roughness of 0.5$\AA$ at optimal condition. Crystalline quality of epitaxial film was determined by smoothness of cleaned surface and the presence of native oxide and impurity. Crystalline defects such as dislocation loops or voids due to the surface roughness were observed by XTEM.

• 한국인쇄학회지
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• 제15권1호
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• pp.85-96
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• 1997

The color difference between original and printed copy is affected mainly by ink trapping and optical properties of overprinted ink layer. Since the general expression itself about ink trapping is affected also by the optical properties, the analysis of color difference using the ink trapping only cannot be certain. This study will show a new approaching method for optical analysis of spectral reflectance and the effect of printing sequence on color difference in multi-color overprints under the condition of excluding completely the ink trapping problems by means of using transparent film as a substrate.

• Journal of Welding and Joining
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• 제29권1호
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• pp.99-106
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• 2011

Joint strength between a solder ball and a pad on a substrate is one of the major factors which have effects on electronic device reliability. The effort to improve solder joint strength via surface cleaning, heat treatment and solder composition change have been in progress. This paper will discuss the method of solder ball joint strength improvement using LF hydrogen radical cleaning treatment and focus on the effects of surface treatment condition on the solder ball shear strength and interfacial reactions. In the joint without radical cleaning, voids were observed at the interface. However, the specimens cleaned by hydrogen-radical didn't have voids at the interface regardless of cleaning time. The shear strength between the solder ball and the pad was increased over 120%(about 800gf) when compared to that without the radical treatment (680gf) under the same reflow condition. Especially, at the specimen treated for 5minutes, ball shear strength was considerably increased over 150%(1150gf). Through the observation of fracture surface and cross-section microstructure, the increase of joint strength resulted from the change of fracture mode, that is, from the solder ball fracture to IMC/Ni(P) interfacial fracture. The other cases like radical treated specimen for 1, 3, 7, 9min. showed IMC/solder interfacial fracture rather than fracture in the solder ball.

• 한국철도학회:학술대회논문집
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• 한국철도학회 2011년도 정기총회 및 추계학술대회 논문집
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• pp.268-274
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• 2011

In railway, Ballast plays an essential role as intermedium in transmitting train load to subgrade safely. Gyoung-Bu HSL 1st phase consists of ballasted track except for over 5km long tunnels. Ballast track occurred track irregularity by train loads and requires periodic maintenance work. However, Repetitive train operation and tamping work cause to accelerate track irregularity and ballast deterioration such as abrasion and crushing. For these reason, Track irregularity areas had occurred ballast cleaning work to improve track quality. However, for the train to run safety, ballast cleaner working area needs train speed reduction and track stabilization work due to ballast relaxation and initial settlement. In this study, according to train speed-up and cumulative traffic tonnage, we measured and analyzed the track settlement and acceleration of sleepers to evaluate of track stabilization in order to keep the ballast condition stable after cleaning work.

• 보존과학회지
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• 제3권1호
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• pp.23-30
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• 1994

This thesis researched for the conservation of a suit of armor that General Jung, Choong Sin had been worn in the 17th century, and of military uniform that was in perfect condition even though it had been underground for over 300years since 1676. As the armor was made with silk and cotton, it was treated by the dry cleaning method and the mild charge system. In the dry cleaning method, the used solvents were n-hexane and n-decane. And the percentage of the dry soap was 2 in the mild charge system. As the military uniform was made with only silk, it was treated by the dry cleaning method through the solvent of n-hexane and n-decane. Armor was repaired by scoured hemp partially, but military uniform became too deteriorated seriously to repair.

• 한국건축시공학회:학술대회논문집
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• 한국건축시공학회 2014년도 추계 학술논문 발표대회
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• pp.115-116
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• 2014

This study investigated power generation of photovoltaic equipment at detached houses. The study estimated monthly mean generation according to maintenance conditions that included module cleaning, inspection into generation, cleaning of module and photovoltaic generation. At analysis upon generation, households with periodical module cleaning and inspection into generation, clean module and good generation conditions had high generation. 20-years of PV equipment life varied much depending upon maintenance conditions. Users should keep module clean and inspect generation regularly and put PV equipment at the place with good solar radiation.