• 센서학회지
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• 제16권2호
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• pp.97-103
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• 2007

Crystallized carbon nitride film that has many stable physical and/or chemical properties has been expected potentially by a new electrical material. However, one of the most significant problems degrading the quality of carbon nitride films is an existence of N-H and C-H bonds from the deposition environment. The possibility of these reactions with hydroxyl group in carbon nitride films, caused by a hydrogen attack, was suggested and proved in our previous reports that this undesired effect could be applied for fabricating micro-humidity sensors. In this study, MIS capacitor and MIM capacitor with $5{\mu}m{\times}5{\mu}m$ meshes were fabricated. As an insulator, carbon nitride film was deposited on a $Si_{3}N_{4}/SiO_{2}/Si$ substrate using reactive magnetron sputtering system, and its dielectric constant, C-V characteristics and humidity sensing properties were investigated. The fabricated humidity sensors showed a linearity in the humidity range of 0 %RH to 80 %RH. These results reveal that MIS and MIM $CN_{X}$ capacitive humidity sensors can be used for Si based micro-humidity sensors.

• 센서학회지
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• 제27권2호
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• pp.132-136
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• 2018

We report the development of a room-temperature hydrogen ($H_2$) gas sensor based on carbon nanotubes (CNT) yarn. To detect $H_2$ gas in room temperature, a highly ordered CNT yarn was placed on a substrate from a spin-capable CNT forest, followed by the deposition of a platinum (Pt) layer on surface of the CNT yarn. To examine the effect of the Pt-layer on the response of the CNT sensor, a comparative sensing performance was characterized on both the Pt deposited and non-deposited CNT yarn at room temperature. The Pt-CNT yarn yielded high response, whereas the non-deposited CNT yarn showed negligible response for $H_2$ detection at room temperature. Pt is a reliable and efficient catalyst that can substantially improve the detection of $H_2$ gas by chemical sensitization via a "spillover" effect. It can be efficiently utilized to increase the sensitivity and selectivity as well as to obtain fast response and recovery times.

• 한국전기전자재료학회논문지
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• 제22권12호
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• pp.1089-1094
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• 2009

Carbon nanotubes (CNTs) have excellent electrical, chemical stability, mechanical and thermal properties. In this paper, networks of Multi-walled carbon nanotube (MWCNT) materials were investigated as resistive gas sensors for ethanol ($C_2H_5OH$) detection. Sensor films were fabricated by air spray method for the multi-walled CNTs solution on glass substrates. Sensors were characterized by resistance measurements in the sensing system, in order to find the optimum detection properties for the ethanol gas molecular. The film that was sprayed with the MWCNT dispersion for 60 see, was 300 nm thick. And the electric resistivity is $2{\times}10^{-2}\;{\Omega\cdot}cm$. Also, the sensitivity and the linearity of MWVNT sensor for ethanol gas are 0.389 %/sec and 17.541 %/FS, respectively. The MWCNT film was excellent in the response for the ethanol gas molecules and its reaction speed was very fast, which could be using as ethanol gas sensor. The conductance of the fabricated sensors decreases when the sensors are exposed to ethanol gas.

• 대한원격탐사학회:학술대회논문집
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• 대한원격탐사학회 2006년도 Proceedings of ISRS 2006 PORSEC Volume I
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• pp.305-307
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• 2006

A multi-spectral photometer was set up as an NASA/AERONET site at Kinki University campus in Higashi-Osaka in 2002 for measuring urban aerosols. In addition, the SPM-613D (Kimoto Electric) commenced measurement of suspended particles matter (SPM) as $PM_{10}$ and $PM_{2.5}$ on March 15, 2004 at the same AERONET site. The obtained results revealed that the poor air quality of the Higashi-Osaka site is due not only to anthropogenic particles from local emissions, such as diesel vehicles and chemical industries, but also to dust particles brought from continental desert areas by large scale climatic conditions. To understand the characteristics of background atmosphere over Higashi-Osaka, we examined the relationship between $PM_{2.5}$ concentration and aerosol optical thickness (AOT) at a wavelength of 0.87 μm based on AERONET data for background atmosphere (AOT<0.2). We obtained a linear regression line between AOT and $PM_{2.5}$ concentration. Using the linear relationships between AOT and $PM_{2.5}$, we show ground-level concentrations of $PM_{2.5}$ of background atmosphere from Terra/MODIS satellite measurements.

• 한국재료학회지
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• 제29권12호
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• pp.764-773
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• 2019

The gas response characteristic toward C₂H₅OH has been demonstrated in terms of copper-vacancy concentration, hole density, and microstructural factors for undoped/Li(I)-doped CuO thin films prepared by sol-gel method. For the films, both concentrations of intrinsic copper vacancies and electronic holes decrease with increasing calcination temperature from 400 to 500 to 600 ℃. Li(I) doping into CuO leads to the reduction of copper-vacancy concentration and the enhancement of hole density. The increase of calcination temperature or Li(I) doping concentration in the film increases both optical band gap energy and Cu2p binding energy, which are characterized by UV-vis-NIR and X-ray photoelectron spectroscopy, respectively. The overall hole density of the film is determined by the offset effect of intrinsic and extrinsic hole densities, which depend on the calcination temperature and the Li(I) doping amount, respectively. The apparent resistance of the film is determined by the concentration of the structural defects such as copper vacancies, Li(I) dopants, and grain boundaries, as well as by the hole density. As a result, it is found that the gas response value of the film sensor is directly proportional to the apparent sensor resistance.

• 한국재료학회지
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• 제13권5호
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• pp.309-312
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• 2003

Tin dioxide($_SnO2$) thin films were deposited on alumina substrate by metal-organic chemical vapor deposition (MOCVD) as a function of temperature and time. Thin films were fabricated from di-n-butyltin diacetate as a precursor and oxygen as an oxidation. The microstructure of deposited films was characterized by X-ray diffraction and field emission scanning electron microscopy(FE-SEM). The thickness was linearly increased with deposition time and $SnO_2$structure was found from $375^{\circ}C$ for the deposition time of 32 min. The maximum sensitivity to 500ppm CO gas was observed for the specimens deposited at $375^{\circ}C$ for 2 min at the operating temperature of $350^{\circ}C$. Gas sensitivity to CO increased with decreasing the film thickness. The sensing properties of response time, recovery and sensitivity of CO were changed with variations of substrate temperature and time.

• Transactions on Electrical and Electronic Materials
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• 제1권1호
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• pp.40-44
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• 2000

Metal-ferroelectric-insulator-semoiconductor field effect transistor (MFISFETs) were fabricated using CMOS processes. The Pt/SBT/NO combined layers were etched for forming a conformal gate by using Ti/Cr metal masks and a two step etching method, By the method, we were able to fabricate a small-sized gate with the dimension of $16/4{\mu}textrm{m}$ in the width/length of gate. It has been chosen the non-self aligned source and drain implantation process, We have deposited inter-layer dielectrics(ILD) by low pressure chemical vapor deposition(LPCVD) at $380^{circ}C$ after etching the gate structure and the threshold voltage of p-channel MFISFETs were about 1.0 and -2.1V, respectively. It was also observed that the current difference between the $I_{ON}$(on current) and $I_{OFF}$(off current) that is very important in sensing margin, is more that 100 times in $I_{D}-V_{G}$ hysteresis curve.

• Rapid Communication in Photoscience
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• 제2권2호
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• pp.46-51
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• 2013

This study reports a fiber-optic sensor detecting biomolecule by simultaneously monitoring localized surface plasmon resonance (LSPR) from gold nanoparticles (Au NPs) of ca. $50{\pm}5$ nm attached on one end of optical fiber and surface enhanced Raman scattering (SERS) of the reporter molecules adsorbed on the gold surfaces as an additional sensing tool. The sensor was fabricated by immobilizing Au NPs on one end of an optical fiber by chemical reaction. LSPR and SERS signals of the sensor were measured using various refractive indices solutions. Finally, the sensor was applied to observe real-time LSPR sensor-gram and SERS spectra of the reporter molecule of 4-aminothiphenol during the antibody-antigen reaction of interferon-gamma (IFN-${\gamma}$) as a proof-concept experiment of biological applications.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.419-419
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• 2014

Interdigitated nanogap device (IND) is an attractive tool for biomolecular detection due to its huge on-off signal ratio, great tolerance to the variation in biochemical environment, and relatively simple implementation processes. Here, we report on the IND-based detection of Influneza A virus by sandwich immunoassay. The INEs were fabricated by photo lithography followed by the in-house chemical lithographic technique for the narrowing the initial gap distance. The surface of the silicon oxide between the two gold electrodes was chemically modified to immobilize primary antibodies for the immuno-specific interaction with the influenza A virus antigen. After immersing the functionalized-IND into the sample solution containing the influenza A virus, the device was exposed to the secondary antibody conjugated Au nanoparticles (Au NPs). The INDs showed a huge jump in the electric conductance when the sample solution contained the influenza A virus of the concentration as low as 10 ng/mL. We hope that this IND-based sensing can be applied to the development of simple and reliable diagnostic means of influenza viruses.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.315.1-315.1
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• 2014

The use of cellulose papers has recently attracted much attention in various device applications owing to their natural advantageous properties of earth's abundance, bio-friendly, large-scale production, and flexibility. Conventional metal oxides with novel structures of nanorods, nanospindles, nanowires and nanobelts are being developed for emerging electronic and chemical sensing applications. In this work, both ZnO (n-type) nanorod arrays (NRAs) and CuO (p-type) nanospindles (NSs) were synthesized on cellulose papers and the p-n junction property was investigated using the electrode of indium tin oxide coated polyethylene terephthalate film. To synthesize ZnO and CuO nanostructures on cellulose paper, a simple and facile hydrothermal method was utilized. First, the CuO NSs were synthesized on cellulose paper by a simple soaking process, yielding the well adhered CuO NSs on cellulose paper. After that, the ZnO NRAs were grown on CuO NSs/cellulose paper via a facile hydrothermal route. The as-grown ZnO/CuO NSs on cellulose paper exhibited good crystalline and optical properties. The fabricated p-n junction device showed the I-V characteristics with a rectifying behaviour.