• Journal of Sensor Science and Technology
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• 제29권4호
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• pp.261-265
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• 2020

In cantilever type piezoelectric energy harvester, the amount of power generation decreases rapidly when outside a certain frequency. The thickness and weight of the cantilever metal plate were modified to develop cantilevers that could produce high power over a wide frequency range. The thicker the cantilever, the higher the power in the higher frequency range. As the weight of the mass increased, the cantilever tended to generate higher power, and the frequency band decreased. A 0.6 mm metal plate cantilever that had a mass of 3.3 g generated power that exceeded 3 mW within the 91-102 Hz range, with average and output values of 9.484 mW and 20.748 mW, respectively, at 99 Hz.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 한국소음진동공학회 2000년도 춘계학술대회논문집
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• pp.1521-1527
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• 2000

A micromirror actuated by piezoelectric unimorph cantilevers is proposed as a tine-tracking device for high-density optical data storage. Bending motions of the metal/PZT/metal unimorphs translate an integrated micromirror along the out-of-plane vertical direction. The micromirror alters the optical path of the incident laser beam and linearly steers the reflected laser beam by its out-of-plane parallel actuation. Numerical analysis shows that the actuated micromirror can satisfy the tracking speed imposed by the requirement on the access time for the high-density optical data storage up to few tens Gbitlin2 owing to the light mass of the micromirror. In this paper, preliminary characteristics of the micro-machined PZT actuated micromirror (PAM) are reported. Only a 360 nm-thick PZT film deposited by sol-gel process shows both good electrical and mechanical characteristics for the fine-tracking actuator. The micromirror can be easily actuated up to several micrometers under low voltage operation condition well below 10 volts.

• Proceedings of the KIEE Conference
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.1950-1953
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• 1996

A $1\;{\times}\;4$ micro mirror array is designed and fabricated. In contrast to other micro mirrors which utilize torsional flexure hinges or cantilevers for restoring torque and supporting purpose, we have placed a substrate hinge structure under each mirror. Each micro mirror consists of address electrode, substrate hinge consisting of pin and staple, supporter post, and mirror plate. Electrical connection between mirror plate and ground electrode is established by substrate hinge. Mirror undergoes a rotational motion due to electrostatic force when voltage difference is applied between address electrode and mirror plate. Micro mirrors with two different types of staple shape and two different pin sizes are designed and fabricated. Each mirror is designed to have ${\pm}\;10^{\circ}$ of deflection angle and have $100\;{\times}\;110\;{\mu}m^2$ of size.

• Journal of Mechanical Science and Technology
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• 제18권5호
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• pp.742-752
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• 2004

Many papers have studied computer simulations of elastic bodies undergoing large deflections and large deformations. But there have not been many attempts to check the validity of the numerical formulations because the simulation results could not be matched without correct input data such as material properties and damping effects. In this paper, these values are obtained from real experiment with a high-speed camera and a data acquisition system. The simulation results with the absolute nodal coordinate formulation (ANCF) are compared with the results of real experiments. Two examples, a thin cantilevers beam and a thin plate, are studied to verify whether the simulation results are well matched to experimental results.

• Proceedings of the KSME Conference
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1767-1772
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• 2008

A microcantilever is a well-known MEMS structure for sensing bio-chemical molecules. When bio-chemical molecules are adsorbed on the microcantilever's surface, resonance frequency shift is generated. There are two issues in this phenomena. The first one is which one between mass change and surface stress change effects is more dominant on the resonance frequency shift. The second one is what will be the performance change when the boundary condition is changed from cantilevers to double clamped beams. We have studied the effect of surface stress change and compared it with that of mass change by using FEM analysis. Furthermore, for microstructures having different boundary conditions, we have studied Q-factor, which determines the detection limit of micro/nano mechanical sensors.

• Journal of Mechanical Science and Technology
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• 제20권3호
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• pp.297-309
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• 2006

This paper deals with a novel structure for single-cell characterization which makes use of bimorph micro thermal actuators combined with electrical sensor device and integrated microfluidic channel. The goal for this device is to capture and characterize individual biocell. Quantitative and qualitative characteristics of bimorph thermal actuator were analyzed with finite element analysis methods. Furthermore, optimization for the dimension of cantilevers and integrated parallel probe systems with microfluidic channels is able to be realized through the virtual simulation for actuation and the practical fabrication of prototype of probes. The experimental value of probe deflection was in accordance with the simulated one.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• 제18권11호
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• pp.990-995
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• 2005

This paper reports the fabrication and characterization of $5\;\times\;5$ thermal cantilever array for nano-scaled memory device application. The $5\;\times\;5$ thermal cantilever array with integrated tip heater has been fabricated with MEMS technology on SOI wafer using 7 photo masking steps. All single-level cantilevers have a diode in order to eliminate any electrical cross-talk between adjacent tips. Electrical measurements of fabricated thermal cantilever away show its own thermal heating mechanism. Thermal heating is demonstrated by the reflow of coated photoresist on the cantilever array surface.

• Structural Engineering and Mechanics
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• 제3권5호
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• pp.445-462
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• 1995

Previous studies of a stepped cantilever with two straight segments under a suddenly applied constant force (a step load) applied at its tip have shown that the validity of deformation mechanisms is governed by certain geometrical restrictions. Single and double-hinge mechanisms have been proposed and it is shown in this paper that for a stepped cantilever with a stronger tip segment, i.e. $M_{0.1}$ > $M_{0.2}$, where $M_{0.1}$ and $M_{0.2}$ are the dynamic fully plastic bending moments of the tip and root segments, respectively, the family of possible yield mechanisms is expanded by introducing new double and triple-hinge mechanisms. With the aid of these mechanisms, it is shown that all initial deformations can be derived for a stepped cantilever regardless of its geometry and the magnitude of the dynamic force applied.

• Proceedings of the KIEE Conference
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• 대한전기학회 1998년도 하계학술대회 논문집 G
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• pp.2533-2535
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• 1998

In this paper, an effect of drive-in process temperature on the residual stress profile of the p+ silicon film has been investigated. The residual stress profile has been calculated as the fourth-order polynomials. All coefficients of the polynomials have been determined from the measurement of the vertical deflections of the p+ silicon cantilevers with various thickness and the tip displacement of the p+ silicon rotating beam. From the determination results of the residual stress profile, the average stress of the film thermally oxidized at 1000 $^{\circ}C$ is 15 MPa and that of the film oxidized at 1100 $^{\circ}C$ is 25 MPa. The profile of the residual stress through the high temperature drive-in process has a steeper gradient than the other case.

• Structural Engineering and Mechanics
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• 제3권2호
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• pp.163-172
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• 1995

A simple numerical method is applied to calculate the large deflection of a cantilever beam under an elastic-plastic deformation by dividing the deformed axis into a number of small segments. Assuming that each segment can be approximated as a circular arc, the method allows large deflections and plastic deformation to be analyzed. The main interests are the load-deflection relationship, curvature distribution along the beam and the length of the plastic region. The method is proved to be easy and particularly versatile. Comparisons with other studies are given.