• Proceedings of the Korea Association of Crystal Growth Conference
• /
• 1997.10a
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• pp.141-144
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• 1997

High quality 3C-SiC epilayer was grown on Si(111) at 125$0^{\circ}C$ using chemical vapor deposition(CVD) technique by pyrolyzing tetramethylsilane(TMS). 3C-SiC epilayer was doped by tetramethylgallium(TMGa) during the CVD growth. The crystallinity of 3C-SiC was significantly enhanced by doping the gallium impurity.

• 한국정보디스플레이학회:학술대회논문집
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• 2007.08b
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• pp.1266-1269
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• 2007

Polycrystalline silicon (poly-Si) films were prepared directly on plastic substrates at a low (< $200^{\circ}C$) by using Catalytic Chemical Vapor Deposition (Cat-CVD) technique without subsequent annealing steps. Surface roughness of the poly-Si layer and the density of the gate dielectric layer were found to be influential to the TFT performance.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.22 no.5
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• pp.672-684
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• 1998

• Proceedings of the Korean Vacuum Society Conference
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• 2002.02a
• /
• pp.148-148
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• 2002

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2007.11a
• /
• pp.13.2-13.2
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• 2007

• Journal of the Korean Ceramic Society
• /
• v.35 no.7
• /
• pp.764-774
• /
• 1998

• Proceedings of the Korean Ceranic Society Conference
• /
• 2002.10a
• /
• pp.22.1-22
• /
• 2002

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2002.11a
• /
• pp.95-95
• /
• 2002

• Journal of Korean Society of Environmental Engineers
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• v.30 no.7
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• pp.688-693
• /
• 2008

TiO$_2$ photocatalyst films deposited beads were prepared by circulating fluidized bed chemical vapor deposition(CFB-CVD) using TTIP(Titanium Tetra Iso-Propoxyde). Photocatalytic activities of Photocatalyst beads were evaluated by decomposition rate of formaldehyde in aqueous solution using a photo-reactor. From the result of photocatalytic degradation of formaldehyde, decomposition rate were shown gradually increased according to the increase of UV intensity, circulating fluid velocity and addition amount of H$_2$O$_2$. However the decomposition rate of formaldehyde were decreased according to the increase of initial concentration and pH value.

• Proceedings of the KIEE Conference
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• 1999.11d
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• pp.860-862
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• 1999

we have grown vertically aligned carbon nanotubes on a large area of Co-Ni codeposited Si substrates by thermal chemical vapor deposition using $C_{2}H_{2}$ gas. The carbon nanotubes grown by the thermal chemical vapor deposition are multi-wall structure, and the wall solace of nanotubes is covered with defective carbons or carbonaceous particles. The carbon nanotubes range from 50 to 120nm in diameter and about $130{\mu}m$ in length at $950^{\circ}C$. The turn-on voltage was about $0.8V/{\mu}m$ with a current density of $0.1{\mu}A/cm^2$ and emission current reveals the Fowler-Nordheim mode.