Raman characteristics of polycrysta1line 3C-SiC thin films grown on AlN buffer layer (AlN 버퍼층위에 성장된 다결정 3C-SiC 박막의 라만 특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2008.11a
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- pp.93-93
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- 2008