Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Microstructure and Mechanical Properties of Cr-Mo-Si-C-N Coatings Deposited by a Hybrid Coating System

하이브리드 코팅시스템에 의해 제조된 Cr-Mo-Si-C-N 박막의 미세구조 및 기계적 특성연구

  • Yun, Ji-Hwan (Division of Materials Science and Engineering, Pusan National University) ;
  • Ahn, Sung-Kyu (National Core Research Center for Hybrid Materials Solution Materials, Pusan National University) ;
  • Kim, Kwang-Ho (Division of Materials Science and Engineering, Pusan National University)
  • 윤지환 (부산대학교 재료공학과) ;
  • 안성규 (부산대학교 국가핵심연구센터) ;
  • 김광호 (부산대학교 재료공학과)
  • Published : 2007.12.31
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Abstract

Cr-Mo-Si-C-N coatings were deposited on steel and Si wafer by a hybrid system of AIP and sputtering techniques using Cr, Mo and Si target in $Ar/N_2/CH_4$ gaseous mixture. Instrumental analyses of XRD and XPS revealed that the Cr-Mo-Si-C-N coatings must be a composite consisting of fine(Cr, Mo and Si)(C and N) crystallites and amorphous $Si_3N_4$ and SiC. The hardness value of Cr-Mo-Si-C-N coatings significantly increased from 41 GPa of Cr-Mo-C-N coatings to about 53 GPa with Si content of 9.3 at.% due to the refinement of (Cr, Mo and Si)(C and N) crystallites and the composite microstructure characteristics. A systematic investigation of the microstructures and mechanical properties of Cr-Mo-Si-C-N coatings prepared with various Si contents is reported in this paper.

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