Journal of the Korean institute of surface engineering (한국표면공학회지)
- Volume 25 Issue 5
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- Pages.235-252
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- 1992
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
High Temperature Oxidation Characteristics of the (Ti, Al)N Coating on the STS 304 by D.C. Magnetron Sputtering
D.C. Magnetron Sputter를 이용한 (Ti, Al)N 피막의 고온산화특성
Abstract
(Ti, Al)N films were deposited on 304 stainless steel sheet by D.C. magnetron sputtering using Al target and Ti plate. The high temperature oxidation of (T, Al)N films with the variation of composition has been investigated. The chemical composition of (Ti, Al)N films with the variation of composition has been investigated. The chemical composition of (Ti, Al)N films was similar to the sputter area ratio of titanium to aluminum target by means of EDS and AES survey. The high temperature oxidation test of (Ti, Al)N showed that (Ti, Al)N has better high temperature resistance than TiN and TiC films. TiC films were cracked at 40
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