• 분석과학
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• 제19권5호
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• pp.400-406
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• 2006

탄성되튐검출(Elastic Recoil Detection)법에 의한 박막시료의 수소 정량은 빔전류 측정의 신뢰성을 전제로 유기물 필름을 정량 비교체로 사용하여 이루어진다. 그러나 탄성되튐검출법에서 일반적으로 사용되는 편향각(tilt angle)인 $75^{\circ}$에서는 시편에 조사되는 일차 이온빔의 조사량을 정확하게 측정하기 어렵다. 시편의 편향각을 바꿔가며 탄성산란 신호를 비교하면 편향각이 커질수록 단위 조사량 당 산란신호는 감소하며 또한 시편의 표면 물질에 따라 이온빔전류 적산의 효율이 달라진다. 이러한 빔전류 적산과정의 오류를 제거하여 정량의 신뢰성을 제고하는 방법으로 되튐스펙트럼과 동시에 측정한 산란스펙트럼을 이용하여 빔 조사량을 결정하였다. 산란스펙트럼에 의한 조사량 결정법은 수 10%에 이르는 전류적산과정의 오차요인을 근본적으로 제거하여 되튐반응에 의한 수소정량의 신뢰성을 향상시켰다. 수소정량의 비교체로 사용해 왔던 폴리이미드 필름과 수소이온주입 시료, 그리고 카본웨이퍼를 대상으로 시험분석하고 기존의 전류적산에 의한 직접정량법과 비교하였다.

• Tribology and Lubricants
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• 제33권3호
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• pp.92-97
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• 2017

The understanding of the friction characteristics of micro-textured surface is of great importance to enhance the tribological properties of nano- and micro-devices. We fabricate rectangular patterns with submicron-scale structures on a Si wafer surface with various pitches and heights by using a focused ion beam (FIB). In addition, we fabricate tilted rectangular patterns to identify the influence of the tilt angle ($45^{\circ}$ and $135^{\circ}$) on friction behaviour. We perform the friction test using lateral force microscopy (LFM) employing a colloidal probe. We fabricate the colloidal probe by attaching a $10{\pm}1-{\mu}m$-diameter borosilicate glass sphere to a tipless silicon cantilever by using a ultraviolet cure adhesive. The applied normal loads range between 200 nN and 1100 nN and the sliding speed was set to $12{\mu}m/s$. The test results show that the friction behavior varied depending on the pitch, height, and tilt angle of the microstructure. The friction forces were relatively lower for narrower and deeper pitches. The comparison of friction force between the sub-micro-structured surfaces and the original Si surface indicate an improvement of the friction property at a low load range. The current study provides a better understanding of the influence of pitch, height, and tilt angle of the microstructure on their tribological properties, enabling the design of sub-micro- and micro-structured Si surfaces to improve their mechanical durability.

• 수산해양기술연구
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• 제41권4호
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• pp.296-305
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• 2005

Acoustic target strength (TS) of 12 commercially important fish species caught in the Korean waters had been investigated and their results were presented. Laboratory measurements of target strength on 12 dominant fish species were carried out at a frequencies of 75 kHz by single beam method under the controlled condition of the water tank with the 241 samples of dead and live fishes. The target strength pattern on individual fish of each species was measured as a function of tilt angle, ranging from $-45^{\circ}$ (head down aspect) to $45^{\circ}$ (head up aspect) in $0.2^{\circ}$ intervals, and the averaged target strength was estimated by assuming the tilt angle distribution as N ($-5.0^{\circ}$, $^15.0{\circ}$). The 75 to fish length relationship for each species was independently derived by a least - squares fitting procedure. Also, a linear regression analysis for all species was performed to reduce the data to a set of empirical equations showing the variation of target strength to fish length and fish species. An empirical model for fish target strength(TS, dB) averaged over the dorsal aspect of 158 fishes of 7 species and which spans the fish length(L, m) to wavelength(${\lambda}$, m) ratio between 6.2 and 21.3 was derived: TS: 27.03 Log(L)-7.7Log(${\kanbda}$)-17.21, ($r^2$=0.59).

• 한국정보전자통신기술학회논문지
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• 제3권4호
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• pp.76-82
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• 2010

기지국 섹터 배열안테나의 하향 빔틸트 각도를 조절하기 위해 전압제어 이상기를 사용하였다. 틸트 각도에 따른 각 안테나의 위상각을 도출하였으며 이때 생성되는 패턴의 수직과 수평 방향 성능을 분석 평가하였다. 이러한 분석을 통해 이동통신 기지국안테나의 셀커버리지 확보와 통화율 증대, 간섭 저감을 이룰 수 있어 최적의 기지국안테나 설계에 적용 가능할 것이다.

• 한국전기전자재료학회논문지
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• 제34권2호
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• pp.99-104
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• 2021

Ion-beam sputtering (IBS) was used to deposit semiconducting IZTO (indium zinc tin oxide) thin films onto heavily-doped Si substrates using a sintered ceramic target with the nominal composition In0.4Zn0.5Sn0.1O1.5, which could work as a channel layer for oxide TFT (oxide thin film transistor) devices. The crystallization behavior and electrical properties were examined for the films in terms of deposition parameters, i.e. target tilt angle and substrate temperature during deposition. The thickness uniformity of the films were examined using a stylus profilometer. The observed difference in electrical properties was not related to the degree of crystallization but to the deposition temperature which affected charge carrier concentration (n), electrical resistivity (ρ), sheet resistance (Rs), and Hall mobility (μH) values of the films.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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• pp.1155-1158
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• 2004

Various inorganic alignment layers of nematic liquid crystal (NLC) molecules were investigated. Ar ion beam (IB) irradiation was utilized for alignment method and homogenous and homeotropic orientations with tilt angle were obtained on the suitable inorganic thin films. Proper doping materials were added to diamond-like carbon (DLC) films. In the case of homogeneous alignment, nitrogen doping affected the increase of pretilt angle, while the fluorine bonding in the DLC films was induced the tilted homeotropic alignment cause its extreme hydrophobic property. These results showed that ion beam irradiation method could be applied to the various alignment mode of NLC such as IPS, TN and MVA.

• 한국시뮬레이션학회논문지
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• 제9권4호
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• pp.51-58
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• 2000

The control of the data retention time is a main issue for realizing future high density dynamic random access memory. The novel junction process scheme in sub-micron DRAM cell with STI(Shallow Trench Isolation) has been investigated to improve the tail component in the retention time distribution which is of great importance in DRAM characteristics. In this' paper, we propose the new implantation scheme by gate-related ion beam shadowing effect and buffer-enhanced ${\Delta}Rp$ (projected standard deviation) increase using buffered N-implantation with tilt and 4X(4 times)-rotation that is designed on the basis of the local-field-enhancement model of the tail component. We report an excellent tail improvement of the retention time distribution attributed to the reduction of electric field across the cell junction due to the redistribution of N-concentration which is Intentionally caused by ion Beam Shadowing and Buffering Effect using tilt implantation with 4X-rotation. And also, we suggest the least requirements for adoption of this new implantation scheme and the method to optimize the key parameters such as tilt angle, rotation number, Rp compensation and Nd/Na ratio. We used MEDICI Simulator to confirm the junction device characteristics. And measured the refresh time using the ADVAN Probe tester.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2005년도 ICCAS
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• pp.1775-1780
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• 2005

One of the most important factors so that mobile objects can achieve their purpose is the information about their positions. In this paper, we propose an improved beacon system, to which ultrasonic sensors are attached, for the indoor localization of mobile objects. We have researched so that it can cover the wider space and estimate more accurate positions than the existent beacon systems. The existent beacon systems have the constraint that one beacon cannot cover wide area since ultrasonic sensors have limits in the angle of signal (beam-angle) on which their signal strength depends. Hence, we used the active beacon which consists of a pan-tilt mechanism and a beacon module. The active beacon system can always aim at mobile objects in order to transmit the strongest signal of the ultrasonic sensors into the objects using the pan-tilt mechanism. In addition, this system is inexpensive because it can decrease the number of beacons by about a half of the beacons of the existent system. Finally, the results show what is the difference between the active beacon system and existent beacon systems, and how accurate it is.

• 제어로봇시스템학회논문지
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• 제13권1호
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• pp.39-45
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• 2007

This paper proposes a method of container position measurement using automatic landing system that is estimated by a laser range finder. In the most of container position measurement methods, CCD cameras or laser scanners have been used to get the source data. However those sensors are not only weak for disturbances, for examples, the light, fog, and rain, but also the system cost is high. When the spreader arrives at the goal position, it is still swung by inertia or by wind effect. In this paper, the spreader swung data have been used to find the container position. The laser range finder is equipped in the front side of spreader. It can measure distance and relative position between spreader and container. This laser range finder can be rotated as desired by a motor. And a tilt sensor is equipped on the spreader to measure spreader sway. The relative position information between the spreader and a container using the laser range finder and tilt sensor is estimated through the geometrical analysis.

• Transactions on Electrical and Electronic Materials
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• 제8권6호
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• pp.265-267
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• 2007

The liquid crystal(LC) aligning capabilities of a nematic liquid crystal(NLC) on a homeotropic polyimide(PI) surface using a new ion-beam method were studied. Exposure ion-beam of $45^{\circ}$ incidence angle shows a good LC alignment of the NLC on the homeotropic PI surface. Also, on the homeotropic PI surface, the tilt angle of the NLC by exposure ion-beam of $45^{\circ}$ incidence angle had a tendency to decrease as increased ion-beam energy density. And, on the homeotropic PI surface, the alignment character of the NLC with respect to ion-beam energy was good at 1500 eV. And we achieved satisfactory result for EO character.