• Title/Summary/Keyword: Au-film

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Effect of Intermediate Metal on the Methanol Gas Sensitivity of ITO Thin Films (층간금속층에 따른 ITO 박막의 메탄올 검출민감도 개선 효과)

  • Lee, H.M.;Heo, S.B.;Kong, Y.M.;Kim, Dae-Il
    • Journal of the Korean Vacuum Society
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    • v.20 no.3
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    • pp.195-199
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    • 2011
  • ITO thin films and gold (Au), copper (Cu) and nickel (Ni) intermediate ITO multilayer (ITO/Au/ITO, ITO/Cu/ITO, ITO/Ni/ITO) films were deposited on glass substrates with a reactive radio frequency and direct current magnetron sputtering system and then the effect of intermediate metal layer and annealing temperature on the methanol gas sensitivity of ITO films were investigated. Although both ITO and ITO/metal/ITO (IMI) film sensors have the same total thickness of 100 nm, IMI sensors have a sandwich structure of ITO 50 nm/metal 10 nm/ITO 40 nm. The change in the gas sensitivity of the film sensors caused by methanol gas ranging from 100 to 1000 ppm was measured at room temperature. The IAI film sensors showed the higher sensitivity than the other sensors. Finally, it is concluded that the ITO 50/Au 10/ITO 40 nm film sensors hasthe potential to be used as improved methanol gas sensor.

Phase Change Characteristics of Aux(Ge2Sb2Te5)1-x (x=0, 0.0110, 0.0323, 0.0625) Thin Film for PRAM (PRAM을 위한 Aux(Ge2Sb2Te5)1-x (x=0, 0.0110, 0.0323, 0.0625) 박막의 상변환 특성)

  • Shin, Jae-Ho;Baek, Seung-Cheol;Kim, Byung-Cheul;Lee, Hyun-Yong
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.24 no.5
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    • pp.404-409
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    • 2011
  • An amorphous $Ge_2Sb_2Te_5$ thin film is one of the most commonly used materials for phase-change data storage. In this study, $Au_x(Ge_2Sb_2Te_5)_{1-x}$ thin film amorphous-to-crystalline phase-change rate were evaluated in using 658 nm laser beam. The focused laser beam with a diameter <10 ${\mu}m$ was illuminated in the power (P) and pulse duration (t) ranges of 1-17 mW and 10-460 ns, respectively, with subsequent detection of the responsive signals reflected from the film surface. We also evaluated the material characteristics, such as optical absorption and energy gap, crystalline phases, and sheet resistance of as-deposited and annealed films. The result of experiments showed that the thermal stability of the $Ge_2Sb_2Te_5$ film is largely improved by adding Au.

Au Deposition on Amorphous Ga-In-Zn-O (Gallium-Indium-Zinc-Oxide) Film

  • Gang, Se-Jun;Yu, Han-Byeol;Baek, Jae-Yun;Thakur, Anup;Kim, Hyeong-Do;Sin, Hyeon-Jun;Jeong, Jae-Gwan;Lee, Jae-Cheol;Lee, Jae-Hak
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.89-89
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    • 2011
  • a-GIZO(비정질 Ga-In-Zn-O)박막은 유연하며 광학적으로 투명하고 높은 전자의 이동도를 갖는 반도체적 특성을 갖기 때문에 차세대 display분야에서 TFT(Thin-Film-Transistor)의 high speed active-matrix layer로써 각광을 받고 있다. 이 물질의 표면은 환경 및 표면처리에 매우 민감하며 [1,2], 이 표면에 metal이 증착되는 경우에도, 선행 연구에 의하면, 다양한 chemical state가 나타남을 알 수 있었다. 이것은 metal의 증착에 따라 metal과 a-GIZO 사이의 contact 저항이 달라짐을 의미한다. 우리는 a-GIZO 박막 위에 Au를 단계적으로 증착시키면서, Au coverage 증가에 따른 core-level과 valence에서의 x-ray photoelectron spectra의 변화를 살펴봄으로써 a-GIZO박막과 Au의 계면에서 일어나는 chemical state의 변화를 알 수 있었다. 특히, Au deposition의 전 처리과정으로써 Ne ion sputtering을 두 단계로 다르게 하여 a-GIZO의 표면환경에 따른 Au 증착의 영향을 살펴보았다.

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One step facile synthesis of Au nanoparticle-cyclized polyacrylonitrile composite films and their use in organic nano-floating gate memory applications

  • Jang, Seok-Jae;Jo, Se-Bin;Jo, Hae-Na;Lee, Sang-A;Bae, Su-Gang;Lee, Sang-Hyeon;Hwang, Jun-Yeon;Jo, Han-Ik;Wang, Geon-Uk;Kim, Tae-Uk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.307.2-307.2
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    • 2016
  • In this study, we synthesized Au nanoparticles (AuNPs) in polyacrylonitrile (PAN) thin films using a simple annealing process in the solid phase. The synthetic conditions were systematically controlled and optimized by varying the concentration of the Au salt solution and the annealing temperature. X-ray photoelectron spectroscopy (XPS) confirmed their chemical state, and transmission electron microscopy (TEM) verified the successful synthesis, size, and density of AuNPs. Au nanoparticles were generated from the thermal decomposition of the Au salt and stabilized during the cyclization of the PAN matrix. For actual device applications, previous synthetic techniques have required the synthesis of AuNPs in a liquid phase and an additional process to form the thin film layer, such as spin-coating, dip-coating, Langmuir-Blodgett, or high vacuum deposition. In contrast, our one-step synthesis could produce gold nanoparticles from the Au salt contained in a solid matrix with an easy heat treatment. The PAN:AuNPs composite was used as the charge trap layer of an organic nano-floating gate memory (ONFGM). The memory devices exhibited a high on/off ratio (over $10^6$), large hysteresis windows (76.7 V), and a stable endurance performance (>3000 cycles), indicating that our stabilized PAN:AuNPs composite film is a potential charge trap medium for next generation organic nano-floating gate memory transistors.

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Post-Annealing Effects on Properties of ZnO Nanorods Grown on Au Seed Layers

  • Cho, Min-Young;Kim, Min-Su;Choi, Hyun-Young;Yim, Kwang-Gug;Leem, Jae-Young
    • Bulletin of the Korean Chemical Society
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    • v.32 no.3
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    • pp.880-884
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    • 2011
  • ZnO nanorods were grown by hydrothermal method. Two kinds of seed layers, Au film and island seed layers were prepared to investigate the effect of seed layer on ZnO nanorods. The ZnO nanorod on Au island seed layer has more unifom diameter and higher density compared to that of ZnO nanorod on Au film seed layer. The ZnO nanorods on Au island seed layer were annealed at various temperatures ranging from 300 to $850^{\circ}C$. The pinholes at the surface of the ZnO nanorods is formed as the annealing temperature is increased. It is noted that the pyramid structure on the surface of ZnO nanorod is observed at $850^{\circ}C$. The intensity of ZnO (002) diffraction peak in X-ray diffraction pattern and intensity of near band edge emission (NBE) peak in photoluminescence (PL) are increased as the ZnO nanorods were annealed at the temperature of $300^{\circ}C$.

The Substitution of Inkjet-printed Gold Nanoparticles for Electroplated Gold Films in Electronic Package

  • Jang, Seon-Hui;Gang, Seong-Gu;Kim, Dong-Hun
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2011.10a
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    • pp.25.1-25.1
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    • 2011
  • Over the past few decades, metallic nanoparticles (NPs) have been of great interest due to their unique mesoscopic properties which distinguish them from those of bulk metals; such as lowered melting points, greater versatility that allows for more ease of processability, and tunable optical and mechanical properties. Due to these unique properties, potential opportunities are seen for applications that incorporate nanomaterials into optical and electronic devices. Specifically, the development of metallic NPs has gained significant interest within the electronics field and technological community as a whole. In this study, gold (Au) pads for surface finish in electronic package were developed by inkjet printing of Au NPs. The microstructures of inkjet-printed Au film were investigated by various thermal treatment conditions. The film showed the grain growth as well as bonding between NPs. The film became denser with pore elimination when NPs were sintered under gas flows of $N_2$-bubbled through formic acid ($FA/N_2$) and $N_2$, which resulted in improvement of electrical conductance. The resistivity of film was 4.79 ${\mu}{\Omega}$-cm, about twice of bulk value. From organic anlayses of FTIR, Raman spectroscopy, and TGA, the amount of organic residue in the film was 0.43% which meant considerable removal of the solvent or organic capping molecules. The solder ball shear test was adopted for solderability and shear strength value was 820 gf (1 gf=9.81 mN) on average. This shear strength is good enough to substitute the inkjet-printed Au nanoparticulate film for electroplating in electronic package.

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Controlled Assembly of Gold Nanoprism and Hexagonal Nanoplate Films for Surface Enhanced Raman Scattering

  • Lee, Doo-Ri;Hong, Soon-Chang;Park, Sung-Ho
    • Bulletin of the Korean Chemical Society
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    • v.32 no.10
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    • pp.3575-3580
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    • 2011
  • This paper reports a methodology for preparing close-packed two dimensional gold nanoprism films and hexagonal nanoplate films at a hexane/water interface. By controlling the concentration of linker molecules in the hexane layer and the temperature of the colloid solution, highly ordered close-packed nanoplate arrays can be fabricated. These films were investigated to compare their corresponding surface enhanced Raman scattering (SERS) efficiencies. It was demonstrated that the Au nanoprism films resulted in a stronger SERS enhancement than the Au hexagonal nanoplate films. The difference in the SERS enhancement is attributed to the film array difference, demonstrating that Au nanoprism films have a higher line contact density than their Au hexagonal analogues.

Preparation of Au fine particle dispersed $TiO_2$ film by sol-gel and photoreduction process

  • Hyun, Buh-Sng;Kim, Byeong-Il;Kang, Won-Ho
    • Proceedings of the Korea Association of Crystal Growth Conference
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    • 1998.09a
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    • pp.103-111
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    • 1998
  • Au fine particle dispersed TiO2 film was prepared on silica glass substrate by sol-gel dip and firing process. The films were fabricated from the system of titanium tetraisoproxie-EtOh-HCl_H2O-hydrogen tetrachloroaurate(III) tetrahydrate. The conditions for the formation of the clear solution and dissolving high concentration of Au compound were examined. And a photoreduction process was adopted to control the size of gold metal particles. Phase evolution of matrix TiO2 and variation of Au particle with UV irradiation were investigated by XRDA, SEM, TEM and UV-visible spectrophotometer. And the effect of CPCl(Cetylpyridinium chloride monohydrate) as a dispersion agent was evaluated.

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Fabrication and Characterization of the ITO/Au/ITO Thin Film Gas Sensor by RF Magnetron Sputtering and electron Irradiation (RF 스퍼터와 전자빔 조사를 이용한 ITO/Au/ITO 가스센서 제조 및 특성 평가)

  • Heo, Sung-Bo;Lee, Hak-Min;Kim, Yu-Sung;Chae, Ju-Hyun;You, Yong-Zoo;Kim, Dae-Il
    • Journal of the Korean Society for Heat Treatment
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    • v.24 no.2
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    • pp.87-91
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    • 2011
  • Single layer Sn doped $In_2O_3$ (ITO) films and ITO 50 nm / Au 10 nm / ITO 40 nm (IAI) multilayer films were prepared with electron beam assisted magnetron sputtering on glass substrates. The effects of the Au interlayer, post-deposition atmosphere annealing and intense electron irradiation on the methanol gas sensitivity were investigated at room temperature. As deposited ITO films did not show any diffraction peaks in the XRD pattern, while the IAI films showed the diffraction peak for $In_2O_3$ (400). In this study, the gas sensitivity of ITO and IAI films increased proportionally with the methanol vapor concentration and an intense electron beam irradiated IAI film shows the higher sensitivity than the others film. From the XRD pattern, it is supposed that increased crystallization promotes the gas sensitivity. This approach is promising in gaining improvement in the performance of IAI gas sensors used for the detection of methanol vapor at room temperature.