• 전자공학회논문지A
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• 제30A권10호
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• pp.41-50
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• 1993

This paper describes the fabrication process and electrical characteristics of PSA (Polysilicon Self-Align) bipolar transistors with a thin base width of 1100.angs.. To realize this shallow junction depth, one-step rapid thermal annealing(RTA) technology has been applied instead of conventional furnace annealing process. It has been shown that the series resistances and parasitic capacitances are significantly reduced in the device with emitter area of 1${\times}4{\mu}m^{2}$. The switching speed of 2.4ns/gate was obtained by measuring the minimum propagation delay time in the I$^{2}$L ring oscillator with 31 stages.

• 한국전기전자재료학회논문지
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• 제15권10호
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• pp.844-850
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• 2002

Linearly graded profiles on the field area oxide are frequently used in power integrated circuits to reduce the surface electric field when power devices are operated in forward or reverse blocking modes. It is shown here that tapered windows can be made using the difference of etch rates between the bottom and the top layer of TEOS film. Annealed TEOS films are etched at a lower rate than the TEOS film without annealing Process. The fast etching layer results in window walls having slopes in the range of 25$^{\circ}$∼ 80$^{\circ}$ with respect to the wafer surface. Taper etching technique by annealing the TEOS film applies to high voltage LDMOS, which is compatible with CMOS process, due to the minimum changes in both of design rules and thermal budget.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1996년도 춘계학술대회 논문집
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• pp.264-268
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• 1996

Directional coupling optical switch which on the LiNbO$_3$ substrate is fabricated by using proton exchange method and self-aligned method. Proton exchange of proton diffusion method was applied to pattern a waveguide on LiNbO$_3$ substrate. The annealing at 400[$^{\circ}C$] was caroled out to control waveguide width and depth. The process of proton exchange was done at 150[$^{\circ}C$] for 120[min], 200[$^{\circ}C$] for 60[min] and annealing process was done at 400[$^{\circ}C$] for 90[min], 400[$^{\circ}C$] for 60[min]. The high speed directional coupling optical switch has very good figures of merits:the measured high frequency power were achieved.

• 소성∙가공
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• 제15권3호
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• pp.247-254
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• 2006

Rather than traditional manufacturing processes, miniature manufacturing processes usually require sophisticated equipments and characteristics of the processes of high cost and of low productivity. Contrarily, miniature stamping process can be realized in a low cost high productivity with relatively inexpensive equipments. In the meso scale, mechanical properties, especially work hardening characteristics, are discovered to be statically scattered and size dependent by intensive experimental and numerical investigations, which make the stamping process hard to apply to the miniature manufacturing. In this study, dual purpose experimental device that can be used for both miniature scale tensile test and miniature scale stamping by simple change of attachment has been developed. For the tensile test, the elongation has been measured with a combined use of a CCD camera and a linear encoder in order to account for the possibility of slippage between specimen and the grip and to ensure the accuracy of the measurement, while load has been measured with a load cell. To satisfy the required material properties for stamping, optimal annealing condition has been found by examining the microstructure of annealed specimen.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 추계학술대회 논문집
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• pp.463-466
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• 2005

Restoring ductility or removing residual stresses is a necessary operation when a large amount of cold working is to be performed, such as in a cold-forging or warm forging process. The advantage of annealing temperatures was investigated. After Hydrostatic Extrusion process, extruded materials were annealed at $200^{\circ}C,\;350^{\circ}C,\;450^{\circ}C$ for 1 hour. Microstructure of the annealed material was observed to make an understand about the difference in mechanical properties.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.370-374
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• 2002

Many compound semiconductors which have high carrier mobility and small band gap have attentive in application of various practical a field. Especially, InSb served for Hall device and magnetic resistor such as magnetic sensor because InSb thin film has high mobility. Many studies on InSb thin film deposistion because In and Sb has been very different feature of vapor pressure ($10^{-4}$ times) When In and Sb deposited. In this paper studied it In and Sb deposited simultaneously using by method of co-sputtering deposotion. This process, get to effects of manufacture process simplification. After that this paper observed micro structure and electronic behavior of InSb thin film using by co-sputtering and we study properties of magneto-resistance by annealing.

• 한국세라믹학회지
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• 제43권4호
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• pp.220-223
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• 2006

BLT nanotubes were synthesized by using simple and convenient method template-wetting process. Porous alumina membranes were prepared by 2 step anodic oxidation as the template. To improve wetting properties and make low surface energy, BLT solution was mixed with polymer. Polymer was removed completely during annealing. After completely etching the template in 30 wt% KOH solution, we demonstrate that BLT nanotubes with a diameter of 200 nm can be fabricated. Grain growth process of BLT nanotubes during baking, and furnace annealing was examined by FE-SEM and XRD.

• Nuclear Engineering and Technology
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• 제4권4호
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• pp.322-326
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• 1972

상온에서 (NH$_4$)$_2$CrO$_4$를 원자로에 조사하고, 조사된 후 상온에서 보관된 시간과 $^{51}$ Cr의 잔류값을 반응속도론적으로 연구하였다. 또한 원자로 조사시간 변화에 따르는 $^{51}$ Cr의 잔류값을 반응속도론적으로 고찰하였으며 일차반응으로 표시 될 수 있었다.

• Journal of Magnetics
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• 제2권2호
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• pp.50-54
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• 1997

The vacuum-annealed Ni80Fe20/Ag discontinuous multilayers were found to show giant magnetoresistive behaviors comparable to those of corresponding multilayers annealed at atmospheric pressure in a mixture of H2 and Ar. This vacuum-annealing process will offer potential advantages, enabling a continuous batch process from the deposition to the annealing. Their giant magnetoresistive behaviors were attributed to the magnetostatic coupling that are induced at the edges of the discontinuous magnetic grains. We also present our results about the multilayer patterned into a basic device for the magnetic field sensor.

• 한국분말재료학회지
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• 제3권1호
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• pp.13-24
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• 1996

Two grades of Permalloy strips, Fe-45Ni(PB) and Fe-78Ni-4Mo-5Cu(PC) were fabricated by powder rolling process from elemental powder mixtures. The roll compacted green strips were sintered, homogenized, cold rolled with or without an intermediate annealing and finally heat treated to measure magnetic properties. For a given thickness reduction, rolling with an intermediate annealing was found more effective to achieve a full densification with no visible micropores and also to obtain better magnetic properties. Increasing the final rolling reduction also produced a marked improvement of the magnetic properties whereas the cooling rate during the final heat treatment has little effect in both grades. Addition of a small amount, 0.4% Mn slightly degraded the properties. As an overall, The PM strips produced via powder rolling yielded the similar soft magnetic properties to the corresponding commercial grades produced via wrought processing.