Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Fabrication of BLT Nanotubes for 3D Nanotube Capacitor

3D Nanotube Capacitor 구현을 위한 BLT Nanotube 제작

  • Seo, Bo-Ik (Department of Materials Science and Engineering, Kumoh National Institute of Technology) ;
  • Shaislamov Ulugbek (Department of Materials Science and Engineering, Kumoh National Institute of Technology) ;
  • Kim, Sang-Woo (Department of Materials Science and Engineering, Kumoh National Institute of Technology) ;
  • Hong, Seok-Kyung (Hynix Semiconductor Inc., Memory R&D Division, New Device Team) ;
  • Yang, Bee-Lyong (Department of Materials Science and Engineering, Kumoh National Institute of Technology)
  • 서보익 (금오공과대학교 금속공학부) ;
  • ;
  • 김상우 (금오공과대학교 금속공학부) ;
  • 홍석경 (하이닉스 반도체) ;
  • 양비룡 (금오공과대학교 금속공학부)
  • Published : 2006.04.01
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Abstract

BLT nanotubes were synthesized by using simple and convenient method template-wetting process. Porous alumina membranes were prepared by 2 step anodic oxidation as the template. To improve wetting properties and make low surface energy, BLT solution was mixed with polymer. Polymer was removed completely during annealing. After completely etching the template in 30 wt% KOH solution, we demonstrate that BLT nanotubes with a diameter of 200 nm can be fabricated. Grain growth process of BLT nanotubes during baking, and furnace annealing was examined by FE-SEM and XRD.

Keywords

References

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