• Title/Summary/Keyword: Annealing process

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고온초전도 PIT 장선재 제조 및 특성 평가 (Fabrication and evaluation of superconducting properties of HIS PIT long tapes)

  • 하홍수;이동훈;양주생;황선역;최정규;김상철;하동우;오상수;권영길
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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    • pp.597-600
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    • 2003
  • Bi-2223/Ag HTS wires have been fabricated by the PIT(powder in tube)process. Intermediate annealing was carried out to increase the homogenization and uniformity of the superconducting filaments embedded in the silver matrix during the deformation process that is important to sustain the engineering critical current density in long superconducting wire. Intermediate annealing act to release the deformation hardening of the superconducting wires during drawing process. Rolling parameters were investigated to roll the superconducting tapes with uniform thickness, width and winding tensions. Critical current of 60 m long superconducting tapes was measured 54.3 A continuously after final sintering heat treatment. The phase analysis of Bi-2223/Ag superconducting tapes are examined by the XRD.

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스핀코팅 및 급속열처리 공정을 통해 형성된 Y2O3:Eu3+ 박막의 발광특성 (Luminescent Properties of Y2O3:Eu3+ Thin Film Through Spin-coating and Rapid Thermal Annealing Process)

  • 박재홍;정용석
    • 반도체디스플레이기술학회지
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    • 제23권1호
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    • pp.88-91
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    • 2024
  • The europium doped yttrium oxide (Y2O3:Eu3+) thin film was formed on a Si substrate by the conventional spin-coating process followed by rapid thermal annealing (RTA) treatment. The spinning profiles such as rotation speed, acceleration and holding times were controlled during the spin-coating process for the best condition of the Y2O3:Eu3+ thin film. The RTA treatment was conducted for several temperature in order to crystallize the spin coated film. The Y2O3:Eu3+ thin film presented best performance in the conditions of 4000 rpm, 30 s and 10 s of rotation speed, acceleration time and holding time, respectively, at a fixed RTA temperature of 900 ℃.

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DRAM 집적공정 응용을 위한 전기도금법 증착 구리 박막의 자기 열처리 특성 연구 (A Study on the Self-annealing Characteristics of Electroplated Copper Thin Film for DRAM Integrated Process)

  • 최득성;정승현
    • 마이크로전자및패키징학회지
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    • 제25권3호
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    • pp.61-66
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    • 2018
  • 본 연구에서는 DRAM 제조 집적공정의 금속배선으로 사용하는 구리의 자기 열처리(self-annealing) 후 박막 특성 변화에 대한 연구를 진행하였다. 구리를 증착하고 상온에서 시간이 경과하면 구리가 성장하여 결정체 크기 변화가 생기는데 이를 자기 열처리라고 부른다. 구리 금속의 증착은 전기 도금법(electroplating)을 사용하였다. 구리 도금액으로 유기 첨가물이 다른 두 가지 시료인 기준 도금액과 평가 도금액 두 용액에 대해 평가 하였다. 자기 열처리 시간이 경과함에 따라 시간에 대해 면 저항 값의 변화가 없는 영역과 이후 급격하게 떨어지는 구간으로 나누어지고 최종적으로 포화면 저항 값을 보인다. 최종적인 면 저항 값은 초기 값 대비 20% 개선 효과를 보인다. 평가 전해액의 자기 열처리 효과가 기준 용액 대비 더 빠른 시간 안에 이루어졌는데 이는 유기 첨가물의 차이 때문이다. 개선의 효과 분석으로 TEM 장비를 이용하여 결정체 변화를 관찰하였고 자기 열처리 공정에 의해 효과적인 결정체 성장이 이루어졌음을 발견했다. 또한 단면 TEM 측정 결과 자기 열처리 된 시료는 전류 방향으로의 결정체 경계면 숫자가 줄어드는 bamboo 구조를 보인다. 열적 열하 특성(thermal excursion characteristics) 측정 결과 고온 열처리 대비 자기 열처리 시료가 hillock 특성이 보이지 않고 이는 박막의 신뢰성 특성을 향상 시킨다. Electron backscattered diffraction (EBSD) 측정 결과 결정체가 $2{\mu}m$까지 성장한 결정체를 관찰하였고 스트레스에 의한 void를 억제하는데 유리한 (100) 면 비중이 증가하는 방향으로 결정체 성장이 이루어짐을 알 수 있다.

GaN 증착용 사파이어 웨이퍼의 표면가공에 따른 압흔 특성 (Surface Lapping Process and Vickers Indentation of Sapphire Wafer for GaN Epitaxy)

  • 신귀수;황성원;김근주
    • 대한기계학회논문집A
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    • 제29권4호
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    • pp.632-638
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    • 2005
  • The surface lapping process on sapphire wafer was carried out for the epitaxial process of thin film growth of GaN semiconducting material. The planarization of the wafers was investigated by the introduction of the dummy wafers. The diamond lapping process causes the surface deformation of dislocation and micro-cracks. The material deformation due to the mechanical stress was analyzed by the X-ray diffraction and the Vickers indentation. The fracture toughness was increased with the increased annealing temperature indicating the recrystallization at the surface of the sapphire wafer The sudden increase at the temperature of $1200^{\circ}C$ was correlated with the surface phase transition of sapphire from a $-A1_{2}O_{3}\;to\;{\beta}-A1_{2}O_{3}$.

티타늄합금의 와이어 방전가공시 방전가공 조건의 영향 (Effect of EDM Conditions when wire-EDM for Titanium Alloy)

  • 김종업;왕덕현;이윤경;김원일
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2001년도 춘계학술대회 논문집(한국공작기계학회)
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    • pp.281-286
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    • 2001
  • Titanium alloy conducted in this experimental study has superior corrosive resistant and is mainly used in aerospace, automotive and petro-chemical industries. It is also treated with important materials of domestic goods due to improvement of the standard of living. In this study specimens were processed in the wire EDM after annealing, solution treatment and aging. Results were obtained through repeated experments of main rough process and finish process with the change of process parameters. Processing characteristics such as surface hardness, surfaces roughness, shape of processed surface and components were measured. The results confirmed that the above mentioned elements were improved in accordance with the number of process. Therefore, the optimal wire EDM condition in accord with processing characteristics is proposed in this experiment.

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Effects of One-Time Post-Annealing(OPTA) Process on the Electrical Properties of Metal- Insulator-Metal Type Thin-Film

  • Lee, Myung-Jae;Chung, Kwan-Soo
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2001년도 하계종합학술대회 논문집(2)
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    • pp.273-276
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    • 2001
  • The origin of image-slicking in metal-insulator-metal type thin-film-diode(TFD) LCDs is the asymmetric current-voltage(I-V) characteristic of TFD element. we developed that MIM-LCDs have reduced-image-sticking and perfect symmetry characteristic. One-Time Post-Annealing (OPTA) heat treatment process was introduced to reduce the asymmetry and shift of the I-V characteristics, respectively. OPTA means that the whole layers of lower metal, insulator, and uuper metal are annealed at one time. The treatment temperatures and fabricated process of TFD element were under foot. Also, this low temperature fabricated process allows the application of plastic substrates.

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Novel Two-Level Randomized Sector-based Routing to Maintain Source Location Privacy in WSN for IoT

  • Jainulabudeen, A.;Surputheen, M. Mohamed
    • International Journal of Computer Science & Network Security
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    • 제22권3호
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    • pp.285-291
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    • 2022
  • WSN is the major component for information transfer in IoT environments. Source Location Privacy (SLP) has attracted attention in WSN environments. Effective SLP can avoid adversaries to backtrack and capture source nodes. This work presents a Two-Level Randomized Sector-based Routing (TLRSR) model to ensure SLP in wireless environments. Sector creation is the initial process, where the nodes in the network are grouped into defined sectors. The first level routing process identifies sector-based route to the destination node, which is performed by Ant Colony Optimization (ACO). The second level performs route extraction, which identifies the actual nodes for transmission. The route extraction is randomized and is performed using Simulated Annealing. This process is distributed between the nodes, hence ensures even charge depletion across the network. Randomized node selection process ensures SLP and also avoids depletion of certain specific nodes, resulting in increased network lifetime. Experiments and comparisons indicate faster route detection and optimal paths by the TLRSR model.

반도체 생산라인에서 SA를 이용한 최적 WIP수준과 버퍼사이즈 결정 (Determining Optimal WIP Level and Buffer Size Using Simulated Annealing in Semiconductor Production Line)

  • 정재환;장세인;이종환
    • 반도체디스플레이기술학회지
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    • 제20권3호
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    • pp.57-64
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    • 2021
  • The domestic semiconductor industry can produce various products that will satisfy customer needs by diversifying assembly parts and increasing compatibility between them. It is necessary to improve the production line as a method to reduce the work-in-process inventory (WIP) in the assembly line, the idle time of the worker, and the idle time of the process. The improvement of the production line is to balance the capabilities of each process as a whole, and to determine the timing of product input or the order of the work process so that the time required between each process is balanced. The purpose of this study is to find the optimal WIP and buffer size through SA (Simulated Annealing) that minimizes lead time while matching the number of two parts in a parallel assembly line with bottleneck process. The WIP level and buffer size obtained by the SA algorithm were applied to the CONWIP and DBR systems, which are the existing production systems, and the simulation was performed by applying them to the new hybrid production system. Here, the Hybrid method is a combination of CONWIP and DBR methods, and it is a production system created by setting new rules. As a result of the Simulation, the result values were derived based on three criteria: lead time, production volume, and work-in-process inventory. Finally, the effect of the hybrid production method was verified through comparative analysis of the result values.

Forming Gas Post Metallization Annealing of Recessed AlGaN/GaN-on-Si MOSHFET

  • Lee, Jung-Yeon;Park, Bong-Ryeol;Lee, Jae-Gil;Lim, Jongtae;Cha, Ho-Young
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제15권1호
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    • pp.16-21
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    • 2015
  • In this study, the effects of forming gas post metallization annealing (PMA) on recessed AlGaN/GaN-on-Si MOSHFET were investigated. The device employed an ICPCVD $SiO_2$ film as a gate oxide layer on which a Ni/Au gate was evaporated. The PMA process was carried out at $350^{\circ}C$ in forming gas ambient. It was found that the device instability was improved with significant reduction in interface trap density by forming gas PMA.

Optimal Design of Truss Structures by Resealed Simulated Annealing

  • Park, Jungsun;Miran Ryu
    • Journal of Mechanical Science and Technology
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    • 제18권9호
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    • pp.1512-1518
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    • 2004
  • Rescaled Simulated Annealing (RSA) has been adapted to solve combinatorial optimization problems in which the available computational resources are limited. Simulated Annealing (SA) is one of the most popular combinatorial optimization algorithms because of its convenience of use and because of the good asymptotic results of convergence to optimal solutions. However, SA is too slow to converge in many problems. RSA was introduced by extending the Metropolis procedure in SA. The extension rescales the state's energy candidate for a transition before applying the Metropolis criterion. The rescaling process accelerates convergence to the optimal solutions by reducing transitions from high energy local minima. In this paper, structural optimization examples using RSA are provided. Truss structures of which design variables are discrete or continuous are optimized with stress and displacement constraints. The optimization results by RSA are compared with the results from classical SA. The comparison shows that the numbers of optimization iterations can be effectively reduced using RSA.