• Proceedings of the Korean Vacuum Society Conference
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• 한국진공학회 2009년도 제36회 동계학술대회 초록집
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• pp.234.1-234.1
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• 2009

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 한국소음진동공학회 2002년도 추계학술대회논문초록집
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• pp.309.2-309
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• 2002

This paper is concerned with the development of the vibration isolation system using piezoelectric actuators and sensors. The active vibration absorber system consists of 4 pairs of PZT actuators bonded on aluminum plates making s- shaped device. Hence, the active system is directly connected to the passive system. The rubber attached to the end of the beam is connected to the upper base as a structural member. It allows bending thus maximizing the vertical movement generated by the piezoceramic actuators. (omitted)

• Proceedings of the Computational Structural Engineering Institute Conference
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• 한국전산구조공학회 2000년도 가을 학술발표회논문집
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• pp.349-354
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• 2000

The modal analysis based on deformations is the method to drived dynamic responsed from superposition of natural frequency and mode shape. In order to free vibration analysis of the structures, Aluminum-made model is used in experiment. The dynamic characteristic of the structures are determined from acceleration measurements using impulse hammer. Experimenrt input and output signal are derive from impact hammer and the one accerometer. This paper present three methods for calculating the natural frequencies and mode shapes of the structure with theory value and finite element analysis, experiment. The results were good approximated about natural frequency and mode shape.

• The Transactions of The Korean Institute of Electrical Engineers
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• 제66권10호
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• pp.1499-1507
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• 2017

This paper presents an impact-based piezoelectric vibration energy harvester using a freely movable metal sphere and a piezoceramic fiber-based MFC (Macro Fiber Composite) as piezoelectric cantilever. The free motion of the metal sphere, which impacts both ends of the cavity in an aluminum housing, generates power across a cantilever-type MFC beam in response to low frequency vibration such as human-body-induced motion. Impacting force of the spherical proof mass is transformed into the vibration of the piezoelectric cantilever indirectly via the aluminum housing. A proof-of-concept energy harvesting device has been fabricated and tested. Effect of the indirect impact-based system has been tested and compared with the direct impact-based counterpart. Maximum peak-to-peak open circuit voltage of 39.8V and average power of $598.9{\mu}W$ have been obtained at 3g acceleration at 18Hz. Long-term reliability of the fabricated device has been verified by cyclic testing. For the improvement of output performance and reliability, various devices have been tested and compared. Using device fabricated with anodized aluminum housing, maximum peak-to-peak open-circuit voltage of 34.4V and average power of $372.8{\mu}W$ have been obtained at 3g excitation at 20Hz. In terms of reliability, housing with 0.5mm-thick steel plate and anodized aluminum gave improved results with reduced power reduction during initial phase of the cyclic testing.

• Journal of the Korean Vacuum Society
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• 제8권4B호
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• pp.514-518
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• 1999

Gold (Au) is not supposed to react with sapphire(single crystalline ) under thermodynamic equillibrium, therefore, a strong adhesion between these two dissimilar materials is not expected. However, pull test showed that the gold film sputter-deposited onto annealed and pre-sputtered sapphire exhibited very strong adhesion even without post-deposition annealing. Strongly and weakly adhered samples as a result of the pull testing were selected to investigate the adhesion mechanisms with Auger electron spectroscopy. The Au/ interfaces were analyzed using a new technique that probes the interface on the film using Auger electron escape depth. It revealed that one or two monolayers of Au-Al-O compound formed at the Au/Sapphire interface when AES in the UHV chamber. It showed that metallic aluminum was detected on the surface of sapphire substrates after irradiating for 3 min. with 7keV Ar+ -ions. These results agree with TRIM calculations that yield preferential ion-beam etching. It is concluded that the formation of Au-Al-O compound, which is responsible for the strong metal-ceramic bonding, is due to ion-induced cleaning and reduction of the sapphire surface, and the kinetic energy of depositing gold atoms, molecules, and micro-particles as a driving force for the inter-facial reaction.

• Journal of the Korean Ceramic Society
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• 제41권5호
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• pp.364-369
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• 2004

The barrier and optical properties of AlO$_{x}$ thin films on polycarbonate deposited by Reactive Ion Beam Sputtering (RIBS) were investigated at different oxygen partial pressure. We measured the deposition rate of AlO$_{x}$ thin films. As the oxygen partial pres-sure increased, the deposition rate increased then decreased. The changes of deposition rate are associated with the properties of deposited films. The properties of deposited AlO$_{x}$ thin films were studied using X-ray Photoelectron Spectroscopy (XPS), Scan-ning Electron Microscopy (SEM), and Atomic Force Microscopy (AFM). Optimum deposition parameters were found for fabricat-ing aluminum oxide thin films with high optical transparency for visible light and low Oxygen Transmission Rate (OTR). The optical transmittance of AlO$_{x}$ thin film deposited on polycarbonate (PC) showed the same value of bare PC.bare PC.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• 제18권2호
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• pp.160-168
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• 2008

This paper presents the study on the stability of nonlinear oscillations of a thin cantilever beam subject to harmonic base excitation in vertical direction. Two partial differential governing equations under combined parametric and external excitations were derived and converted into two-degree-of-freedom ordinary differential Mathieu equations by using the Galerkin method. We used the method of multiple scales in order to analyze one-to-one combination resonance. From these, we could obtain the eigenvalue problem and analyze the stability of the system. From the thin cantilever experiment using foamax, we could observe the nonlinear modes of bending, twisting, sway, and snap-through buckling. In addition to qualitative information, the experiment using aluminum gave also the quantitative information for the stability of combination resonance of a thin cantilever beam under parametric excitation.

• Journal of the Korean Vacuum Society
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• 제12권4호
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• pp.251-256
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• 2003

Indium aluminum arsenide(InAlAs) was grown by molecular beam epitaxy on (001) indium phosphide (InP) substrate and the effects of growth temperature on the properties of epitaxial layers were studied. In the temperature range of 370-$400 ^{\circ}C$, we observed that the surface morphology, optical quality and structural quality of InAlAs epilayers were improved as growth temperature increased. However, the InAlAs epilavers grown at $430 ^{\circ}C$ have the bad surface morphology and show the same trends as structural and epical quality. As a result of these measurements, it is suggested that the InAlAs epilayers of very good properties can be grown at $400 ^{\circ}C$.

• Proceedings of the Korean Vacuum Society Conference
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.257-257
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• 2016

최근에 메모리의 초고속화, 고집적화 및 초절전화가 요구되면서 resistive random access memory (ReRAM), ferroelectric RAM (FeRAM), phase change RAM (PRAM)등과 같은 차세대 메모리 기술이 활발히 연구되고 있다. 다양한 메모리 중에서 특히 resistive random access memory (ReRAM)는 빠른 동작 속도, 낮은 동작 전압, 대용량화와 비휘발성 등의 장점을 가진다. ReRAM 소자는 절연막의 저항 스위칭(resistance switching) 현상을 이용하여 동작하기 때문에 SiOx, AlOx, TaOx, ZrOx, NiOx, TiOx, 그리고 HfOx 등과 같은 금속 산화물에 대한 연구들이 활발하게 이루어지고 있다. 이와 같이 다양한 산화물 중에서 AlOx는 ReRAM의 절연막으로 적용되었을 때, 우수한 저항변화특성과 안정성을 가진다. 하지만, AlOx 박막을 형성하기 위하여 기존에 많이 사용되어지던 PVD (physical vapour deposition) 또는 CVD (chemical vapour deposition) 방법에서는 두께가 균일하고 막질이 우수한 박막을 얻을 수 있지만 고가의 진공장비 사용 및 대면적 공정이 곤란하다는 문제점이 있다. 한편, 용액 공정 방법은 공정과정이 간단하여 경제적이고 대면적화가 가능하며 저온에서 공정이 이루어지는 장점으로 많은 관심을 받고 있다. 본 연구에서는 sputtering 방법과 용액 공정 방법으로 형성한 AlOx 기반의 ReRAM에서 메모리 특성을 비교 및 평가하였다. 먼저, p-type Si 기판 위에 습식산화를 통하여 SiO2 300 nm를 성장시킨 후, electron beam evaporation으로 하부 전극을 형성하기 위하여 Ti와 Pt를 각각 10 nm와 100 nm의 두께로 증착하였다. 이후, 제작된 AlOx 용액을 spin coating 방법으로 1000 rpm 10 초, 6000 rpm 30 초의 조건으로 증착하였다. Solvent 및 불순물 제거를 위하여 $180^{\circ}C$의 온도에서 10 분 동안 열처리를 진행하였고, 상부 전극을 형성하기 위해 shadow mask를 이용하여 각각 50 nm, 100 nm 두께의 Ti와 Al을 electron beam evaporation 방법으로 증착하였다. 측정 결과, 용액 공정 방법으로 형성한 AlOx 기반의 ReRAM에서는 기존의 sputtering 방법으로 제작된 ReRAM에 비해서 저항 분포가 균일하지는 않았지만, 103 cycle 이상의 우수한 endurance 특성을 나타냈다. 또한, 1 V 내외로 동작 전압이 낮았으며 104 초 동안의 retention 측정에서도 메모리 특성이 일정하게 유지되었다. 결론적으로, 간단한 용액 공정 방법은 ReRAM 소자 제작에 많이 이용될 것으로 기대된다.

• Transactions of the Korean Society of Mechanical Engineers A
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• 제35권9호
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• pp.1105-1111
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• 2011

The objective of this study is to investigate the influence of surface roughness on the morphology of aluminum 6061-T6 alloy after irradiation with a Nd:YAG pulsed laser. The test specimen was prepared by a polishing process using a diamond paste ($1{\mu}m$) and emery polishing papers (#100, #220, #600, #2400) to obtain different initial surface roughness. After irradiation with ten pulsed-laser shots, the surface morphology was examined by using scanning electron microscopy (SEM), optical microscopy (OM), and atomic force microscopy (AFM). The diameter of the melted zone increased with the surface roughness because the multiple reflections and absorption of the laser beam occurred on the surface because of the surface roughness, so that the absorptance of the laser beam changed. This result was verified using the relative absorptance calculated from the diameter of the melted zone with the surface roughness and the diameter increased with the average surface roughness.