• Title/Summary/Keyword: Alloy target

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PROPOSE NEW MIXTURE TARGET FOR LOW-TEMPERATURE AND HIGH- RATE DEPOSITION OF PZT THIN FILMS BY REACTIVE SPUTTERING

  • Hata, Tomonobu;Zhang, WeiXiao;Sasaki, Kimihiro
    • Journal of the Korean institute of surface engineering
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    • v.29 no.5
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    • pp.330-337
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    • 1996
  • A rf reactive sputter deposition technique was adopted to deposit ferroelectric lead zirconate titanate (PZT) thin films with high rate from a ZrTi alloy target combined with PbO pellets. Deposition characterisitics including the effects of PbO are ratio were discussed. A new deposition mode called the quasi-metallic mode was observed. Perovskite PZT films were prepared at a growth temperature as low as$ 450^{\circ}C$. However, because the target structure is unstable, weproposed a mixture target consisted of Zr, Ti and PbO. Fundamental experiments were investigated using the powder target. Perovskite PZT film could be obtained at $450^{\circ}C$ with better electrical properties also.

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Effect of Electroplating Parameters on Conductivity and Hardness of Ni-P Alloy (Ni-P 합금의 전기전도도와 경도에 대한 도금 조건의 영향)

  • Kim, Nam-Gil;Sun, Yong-Bin
    • Journal of the Microelectronics and Packaging Society
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    • v.24 no.3
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    • pp.77-81
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    • 2017
  • Pulse electroplating of Ni-P alloy was studied to fulfill the material requirement to the advanced vertical probe tip in wafer probe card. The major concerns are for the electrical conductivity and yield strength. Plating parameters such as current density, duty cycle and solution components were examined to obtain the nanocrystal structure and proper percentage of phosphorus, leading to how to control the nanocrystal grain growth and precipitation of $Ni_3P$ after heat treatment. Among the parameters, the amount of phosphorus acid was the main factor affecting on the grain size and sheet resistance, and the amount of 0.1 gram was appropriate. Since hardness in Ni-P alloy is increased by as-plated nanocrystal structure plus precipitation of $Ni_3P$, the concentration of P less than 15 at% was better choice for the grain coarsening without minus in hardness value. The following heat treatment made grain growth and dispersion of precipitates adjustable to meet the target limit of resistance of $100m{\Omega}$ and hardness number of over 1000Hv. The Ni-P alloy will be a candidate for the substitute of the conventional probe tip material.

Experimental Study on the Formability of Simultaneous Deep Drawing of Circular and Rectangular Cups with AZ31 Magnesium Alloy (AZ31 마그네슘 판재의 더블 싱크형 딥드로잉 공정의 성형성에 관한 실험적 연구)

  • Kwon, K.T.;Kang, S.B.;Kang, C.G.
    • Transactions of Materials Processing
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    • v.17 no.8
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    • pp.586-593
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    • 2008
  • In warm press forming of magnesium alloy sheet, it is important to control the sheet temperature by heating the sheet in closed die. When forming a commercial AZ31 magnesium alloy sheets which are 0.5mm and 1.0mm thick, respectively, time arriving at target temperature and temperature variation in magnesium alloy sheet have been investigated. The deep drawing process with rectangular shape alone at the first stage and with both circular and rectangular shapes at the second stage was employed. At the first stage, through deep drawing process with rectangular shape alone according to various forming temperature($150{\sim}350^{\circ}C$) and velocity($0.1{\sim}1.0mm/s$), optimum forming condition was obtained. At the second stage, deep drawing process with the circular and rectangular shapes were performed following deep drawn square cups with Limited Drawing Height(LDH) obtained at the first stage. Here, clearance which is defined a gap between the die and the punch including sheet was set to ratio of 20, 40 and 100% to thickness in sheet. Accordingly, temperature, velocities, and clearances suitable for forming were suggested through investigating the thickness variation of the product.

Resistance Spot Welding Characteristics of Mg Alloy Applying Current Waveform Control (전류 파형 제어를 적용한 마그네슘 합금의 저항 점 용접 특성)

  • Choi, Dong-Soon;Hwang, In-Sung;Kim, Dong-Cheol;Ryu, Jae-Wook;Kang, Moon-Jin
    • Journal of Welding and Joining
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    • v.32 no.2
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    • pp.70-75
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    • 2014
  • In automotive industry, applying of Mg alloy to autobody has been issued recently as a light metal. But poor resistance spot weldability of Mg alloy is blocking commercialization. So studies on improving resistance spot weldability of Mg alloy is increasing continuously. For reduce loss of heat input during welding, inverter DC power source is considered because of short rise time to target welding current. But rapid rising of welding current can increase temperature rapidly in nugget and oxide film between electrode and base metal, and that causes generating expulsion on low welding current range. In this study, for increase optimum welding current range and prevent generating expulsion, applicate various types of welding current waveform controls during resistance spot welding. For analysis effects of each current waveform control, acceptable welding current regions according to electrode force and welding time is determined and lobe diagram is derived. In result, pre heat is proposed as optimum type of welding current waveform control.

Characteristics of Ta-Ti alloy Metal for NMOS Gate Electrodes (NMOS 게이트 전극에 사용될 Ta-Ti 합금의 특성)

  • Kang, Young-Sub;Lee, Chung-Keun;Kim, Jae-Young;Hong, Shin-Nam
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.11a
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    • pp.15-18
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    • 2003
  • Ta-Ti metal alloy is proposed for alternate gate electrode of ULSI MOS device. Ta-Ti alloy was deposited directly on $SiO_2$ by a co-sputtering method and good interface property was obtained. The sputtering power of each metal target was 100W. Thermal and chemical stability of the electrode was studied by annealing at $500^{\circ}C$ and $600^{\circ}C$ in Ar ambient. X-ray diffraction was measured to study interface reaction and EDX(energy dispersive X-ray) measurement was performed to investigate composition of Ta and Ti element. Electrical properties were evaluated on MOS capacitor, which indicated that the work function of Ta-Ti metal alloy was ${\sim}4.1eV$ compatible with NMOS devices. The measured sheet resistance of alloy was lower than that of poly silicon.

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Electrochemical Characteristics of HA Film on the Ti Alloy Using Pulsed Laser Deposition

  • Jeong, Yong-Hoon;Shin, Seung-Pyo;Chung, Chae-Heon;Kim, Sang-Sub;Choe, Han-Cheol
    • Korean Journal of Metals and Materials
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    • v.50 no.5
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    • pp.395-400
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    • 2012
  • In this study, we have investigated the surface morphology of hydroxyapatite (HA) coated Ti alloy surface using pulsed laser plating. The HA (tooth ash) films were grown by pulsed KrF excimer laser, film surfaces were analyzed for topology, chemical composition, crystal structure and electrochemical behavior. The Ti-6Al-4V alloy showed ${\alpha}$ and ${\beta}$ phase, Cp-Ti showed ${\alpha}$ phase and the HA coated surface showed HA and Ti alloy peaks. The HA coating layer was formed with $1-2{\mu}m$ droplets and grain-like particles, particles which were smaller than the HA target particle, and the composition of the HA coatings were composed of Ca and P. From the electrochemical test, the pitting potential (1580 mV) of HA coated Ti-6Al-4V alloy was higher than those of Cp-Ti (1060 mV) and HA coated Cp-Ti (1350 mV). The HA coated samples showed a lower current density than non-HA coated samples, whereas, the polarization resistance of HA coated samples showed a high value compared to non-HA coated samples.

Servo control of an under actuated system using antagonistic shape memory alloy

  • Sunjai Nakshatharan, S.;Dhanalakshmi, K.;Josephine Selvarani Ruth, D.
    • Smart Structures and Systems
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    • v.14 no.4
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    • pp.643-658
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    • 2014
  • This paper presents the design, modelling and, simulation and experimental results of a shape memory alloy (SMA) actuator based critical motion control application. Dynamic performance of SMA and its ability in replacing servo motor is studied for which the famous open loop unstable balancing ball and beam system direct driven by antagonistic SMA is designed and developed. Simulation uses the mathematical model of ball and beam structure derived from the first principles and model estimated for the SMA actuator by system identification. A PID based cascade control system consisting of two loops is designed and control of ball trajectory for various target positions with settling time as control parameter is verified experimentally. The results demonstrate the performance of SMA for a complicated i.e., under actuated, highly nonlinear unstable system, and thereby it's dynamic behaviour. Control strategies bring out the effectiveness of the actuator and its possible application to much more complex applications such as in aerospace control and robotics.

Numerical Simulation of Failure Mechanism of PELE Perforating Thin Target Plates (얇은 표적체판에 천공하는 PELE 의 파괴 메커니즘 수치시뮬레이션)

  • Jo, Jong Hyun;Lee, Young Shin
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.36 no.12
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    • pp.1577-1583
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    • 2012
  • Penetrator with enhanced lateral effect (PELE) is a novel projectile that does not require dynamite and a fuse. It comprises a high-density jacket that is closed at its rear end and filled with a low-density filling material. To study the explosion characteristics of PELE using AUTODYN-3D code, the calculation models of the projectile body and the bullet target were developed and the process of penetrating an aluminum-2024 alloy target using PELE was simulated. The scattering characteristics after PELE penetrated the aluminum-2024 alloy target were studied for different filling materials. The explicit finite element analysis of PELE fragmentation was implemented with the stochastic failure criterion in AUTODYN-3D code. As the filling expanded, the fragments gained velocity and dispersed laterally, increasing the damage area considerably. The number and shape of PELE fragments differed depending on the impact pressure of the filling that fragmented during the penetration and lateral dispersion processes.

Fabrication of Ti-Mo Core-shell Powder and Sintering Properties for Application as a Sputtering Target (Ti-Mo 코어-쉘 분말 제조 및 소결 특성 연구)

  • Won Hee Lee;Chun Woong Park;Heeyeon Kim;Yuncheol Ha;Jongmin Byun;Young Do Kim
    • Journal of Powder Materials
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    • v.31 no.1
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    • pp.43-49
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    • 2024
  • In this study, a core-shell powder and sintered specimens using a mechanically alloyed (MAed) Ti-Mo powder fabricated through high-energy ball-milling are prepared. Analysis of sintering, microstructure, and mechanical properties confirms the applicability of the powder as a sputtering target material. To optimize the MAed Ti-Mo powder milling process, phase and elemental analyses of the powders are performed according to milling time. The results reveal that 20 h of milling time is the most suitable for the manufacturing process. Subsequently, the MAed Ti-Mo powder and MoO3 powder are milled using a 3-D mixer and heat-treated for hydrogen reduction to manufacture the core-shell powder. The reduced core-shell powder is transformed to sintered specimens through molding and sintering at 1300 and 1400℃. The sintering properties are analyzed through X-ray diffraction and scanning electron microscopy for phase and porosity analyses. Moreover, the microstructure of the powder is investigated through optical microscopy and electron probe microstructure analysis. The Ti-Mo core-shell sintered specimen is found to possess high density, uniform microstructure, and excellent hardness properties. These results indicate that the Ti-Mo core-shell sintered specimen has excellent sintering properties and is suitable as a sputtering target material.

Effects of HA and TiN Coating on the Electrochemical Characteristics of Ti-6Al-4 V Alloys for Bone Plates

  • Oh, Jae-Wook;Choe, Han-Cheol;Ko, Yeong-Mu
    • Journal of the Korean institute of surface engineering
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    • v.37 no.5
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    • pp.249-252
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    • 2004
  • Effects of HA and TiN coating on the electrochemical characteristics of Ti-6AI-4V alloys for bone plates were investigated using various test methods. Ti-6AI-4V alloys were fabricated by using a vacuum induction furnace and bone plates were made by laser cutting and polishing. HA was made of extracted tooth sintered and then tooth ash was used as HA coating target. The TiN and HA film coating on the surface were carried on using electron-beam physical vapor deposition (EB-PVD) method. The corrosion behaviors of the samples were examined through potentiodynamic method in 0.9% NaCI solutions at $36.5\pm$$1^{\circ}C$ and corrosion surface was observed using SEM and XPS. The surface roughness of TiN coated bone plates was lower than that of tooth ash coated plates. The structure of TiN coated layer showed the columnar structure and tooth ash coated layer showed equiaxed and anisotrophic structure. The corrosion potential of the TiN coated specimen is comparatively high. The active current density of TiN and tooth ash coated alloy showed the range of about $1.0xl0^{-5}$ $A\textrm{cm}^2$, whereas that of the non-coated alloy was$ 1.0xl0^{-4}$ $A\textrm{cm}^2$. The active current densities of HA and TiN coated bone plates were smaller than that of non-coated bone plates in 0.9% NaCl solution. The pitting potential of TiN and HA coated alloy is more drastically increased than that of the non-coated alloy. The pit number and pit size of TiN and HA coated alloy decreased in compared with those of non-coated alloy. For the coated samples, corrosion resistance increased in the order of TiN coated, tooth ash coated, and non-coated alloy.