• 제목/요약/키워드: Al_2\

검색결과 16,124건 처리시간 0.043초

PSG/SiO2 보호막 처리된 Al-1%Si 박막배선에서의 Sodium과 수분 게터링에 관한 연구 (A Study on the Sodium and Moisture Gettering in PSG/SiO2 Passivated Al-1%Si Thin Film Interconnections)

  • 김진영
    • 한국진공학회지
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    • 제22권3호
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    • pp.126-130
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    • 2013
  • PSG/$SiO_2$ 보호막 처리된 Al-1%Si 박막배선 내 sodium (Na)과 수분($H_2O$) 게터링(gettering) 현상을 측정, 분석하였다. PSG/$SiO_2$ 보호막과 Al-1%Si 박막을 상압CVD (APCVD: atmosphere pressure chemical vapor deposition)법과 DC 마그네트론 스퍼터로 각각 증착하였고, 이차이온 질량분석기(SIMS: secondary ion mass spectrometry)를 이용한 깊이분포측정(depth profiling) 분석을 통해 PSG/$SiO_2$ 보호막으로부터 Al-1%Si 박막배선 층까지의 sodium과 수분 등 성분들의 분포를 확인하였다. Sodium과 수분 피크 모두 Al-1%Si 박막배선 내부보다는 막 간 계면에서 강하게 나타났다. PSG와 $SiO_2$ 보호막 계면에서는 sodium 피크는 관찰되었지만 수분 피크는 관찰되지 않았다.

Al2O3와 TiO2의 반응소결로 제조한 Al2TiO5-기계가공성 세라믹스 (Al2TiO5-machinable Ceramics Made by Reactive Sintering of Al2O3 and TiO2)

  • 박재현;이원재;김일수
    • 한국세라믹학회지
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    • 제47권6호
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    • pp.498-502
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    • 2010
  • Aluminium titanate($Al_2TiO_5$) has extremely anisotropic thermal expansion properties in single crystals, and polycrystalline material spontaneously microcracks in the cooling step after sintering process. These fine intergranular cracks limit the strength of the material, but provide an effective mechanism for absorbing strain energy during thermal shock and preventing catastrophic crack propagation. Furthermore, since machinable BN-ceramics used as an insulating substrate in current micro-electronic industry are very expensive, the development of new low-cost machinable substrate ceramics are consistently required. Therefore, cheap $Al_2TiO_5$-machinable ceramics was studied for the replacement of BN ceramics. $Al_2O_3-Al_2TiO_5$ ceramic composite was fabricated via in-situ reaction sintering. $Al_2O_3$ and $TiO_2$ powders were mixed with various mol-ratio and sintered at 1400 to $1600^{\circ}C$ for 1 h. Density, hardness and strength of sintered ceramics were systematically measured. Phase analysis and microstructures were observed by XRD and SEM, respectively. Machinability of each specimens was tested by micro-hole machining. The results of research showed that the $Al_2TiO_5$-composites could be used for low-cost machinable ceramics.

Al6Si2Cu 알루미늄 합금의 기계적 물성 향상을 위한 이단계 고용화 열처리 (Two-step Solution Treatment for Enhancement of Mechanical Properties of AlSiCu Aluminum Alloy)

  • 박상규;김정석
    • 열처리공학회지
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    • 제31권3호
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    • pp.97-103
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    • 2018
  • The objective of this study is to develop the mechanical properties of AlSiCu aluminum alloy by the two-step solution heat treatment. The microstructure of gravity casting specimen represents a typical dendrite structure having a secondary dendrite arm spacing (SDAS) of 40 mm. In addition to the Al matrix, a large amount of coarsen eutectic Si phase, $Al_2Cu$ intermetallic phase, and Fe-rich phases are generated. The eutectic Si phases are fragmented and globularized with solution heat treatment. Also, the $Al_2Cu$ intermetallic phase is resolutionized into the Al matrix. The $2^{nd}$ solution temperature at $525^{\circ}C$ might be a optimum condition for enhancement of mechanical properties of AlSiCu aluminum alloy.

Kaolin-Al 혼합물의 고온 Mullite 화 반응 (High Temperature Mullitization of Kaolin-Al Mixture)

  • 박정현;박찬욱;배원태
    • 한국세라믹학회지
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    • 제21권4호
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    • pp.327-332
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    • 1984
  • Proper amount of $Al_2O_3$ must be added to increase the yield of mullite which is formed from free silica decomposed from kaolin. The previous study has suggested that Al powder may be a good $Al_2O_3$ supply source at 1400~150$0^{\circ}C$. In this study the application of Al powder is discussed about its mullitization behavior in the higher temperature range of 1500~175$0^{\circ}C$ the results of which compared with those obtained from the reactive $Al_2O_3$ and activated $Al_2O_3$. The oxdation and reaction stages of Al powder were analyzed by DTA crystal growth andmorphology of the mullite were observed by SEM and the yields of the mullite were compared according to their solubilities in HF solution.

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Alumina-Zirconia-Mullite 복합체의 상생성 및 치밀화 특성에 미치는 $\alpha-AI_2O_3$ Seeding 효과 (Effects of $\alpha-AI_2O_3$ Seeding on Phase Formation and Densification Characteristics of Alumina-Mullite-Zirconia Composites)

  • 조성목;장현명
    • 한국세라믹학회지
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    • 제31권12호
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    • pp.1475-1482
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    • 1994
  • Compositionally triphasic boehmite-silica-zirconia composite gels were prepared by a multiphasic sol-gel route. Phase-formation characteristics and densification behavior of the gel compacts were examined with and without $\alpha$-Al2O3 seeding. In the unseeded triphasic gels, both $\alpha$-Al2O3 and mullite crystallize simultaneously at 130$0^{\circ}C$. On the other hand, the $\alpha$-Al2O3 seeding selectively induces the formation of corundum phase ($\alpha$-Al2O3) at a significantly lower temperature (~110$0^{\circ}C$) and facilitates an epitaxial growth of $\alpha$-Al2O3 between 1100~130$0^{\circ}C$. The densification of alumina-mullite-zirconia composite (derived from the triphasic gels) was also enhanced by the $\alpha$-Al2O3 seeding, and this was attributed to the delayed crystallization of mullite in the $\alpha$-Al2O3 seeded gel.

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TiAlCrSiN 박막의 고온 산화 부식 (High-temperature Oxidation of the TiAlCrSiN Film)

  • 이동복;김민정
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2016년도 추계학술대회 논문집
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    • pp.107-107
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    • 2016
  • TiCrAlSiN films were developed in order to improve the high-temperature oxidation resistance, corrosion resistance, and mechanical properties of conventional TiN films that are widely used as hard films to protect and increase the lifetime and performance of cutting tools or die molds. In this study, a nano-multilayered TiAlCrSiN film was deposited by cathodic arc plasma deposition. It displayed relatively good oxidation resistance at $700-900^{\circ}C$, owing to the formation protective oxides of $Al_2O_3$, $Cr_2O_3$, and $SiO_2$, and semiprotective $TiO_2$. At $1000^{\circ}C$, the increased temperature led to the formation of the imperfect oxide scale that consisted primarily of the outer ($TiO_2$,$Al_2O_3$)-mixed scale and inner ($TiO_2$, $Al_2O_3$, $Cr_2O_3$)-mixed scale.

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Cu 첨가량이 Al2O3/Cu 나노복합재료의 미세조직과 기계적 성질에 미치는 영향 (Effect of Cu content on Microstructure and Mechanical Properties of Al2O3/Cu Nanocomposites)

  • 오승탁;윤세중
    • 한국분말재료학회지
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    • 제13권1호
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    • pp.33-38
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    • 2006
  • The effect of Cu content on microstructure and mechanical properties of nano-sized Cu dispersed $Al_2O_3(Al_2O_3/Cu)$ nanocomposites was investigated. The nanocomposites with Cu content of 2.5 to 10 vol% were prepared by reduction and hot-pressing of $Al_2O_3/CuO$ powder mixtures. The nanocomposites with Cu content of 2.5 and 5vol% exhibited the maximum fracture strength of 820MPa and enhanced toughness compared with monolithic $Al_2O_3$. The strengthening was mainly attributed to the refinement of $Al_2O_3$ matrix grains. The toughening mechanism was discussed by the observed microstructural feature based on crack bridging.

내열복합코팅 NiCrAlY/(ZrO2-CeO2-Y2O3)의 용융염 부식 (Hot Corrosion of NiCrAlY/(ZrO2-CeO2-Y2O3) Composite Coatings in Molten Salt)

  • 이재호;이동복
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2013년도 춘계학술대회 논문집
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    • pp.116-116
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    • 2013
  • (Ni-22Cr-10Al-1Y)와 ($ZrO_2-25CeO_2-2.5Y_2O_3$)로 구성되는 금속/세라믹 복합코팅을 대기용사(ASP; air plasma spay)으로 철 기판위에 1:3, 2:2, 3:1의 무게비로 혼합하여 제조하였다. 용사된 코팅은 금속이영지역과 세라믹잉여지역으로 구별되고, 용사중에 NiCrAlY중의 Al이 선택적으로 산화되어 Al2O3가 계면에 존재하였다. 복합코팅은 $NaCl-Na_2SO_4$ 용융염에서 $800{\sim}900^{\circ}C$, 50시간 동안 부식실험을 실시하였다. 부식생성물은 NiO, $Cr_2O_3$, ${\alpha}-Al_2O_3$가 생성되는데, 부식이 진행되면서 용해되었다. 용융염 부식이 진행되는 동안에 Cr, Al이 외방확산하였고, Na, Cl, S는 내부로 확산되었다. 시간 및 온도뿐만 아니라 금속의 양이 증가할수록 코팅의 내식성은 저하되었다.

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