• Journal of Sensor Science and Technology
• /
• v.16 no.3
• /
• pp.240-245
• /
• 2007

AlN thin film for SAW filter application was deposited on (100) silicon, sapphire, $Si_{3}N_{4}$/Si, and $Al_{2}O_{3}$/Si substrates by reactive magnetron sputtering method, respectively. The structural characteristics were dependent on the structure of substrates. Scanning Electron Microscope (SEM), X-ray Diffraction (XRD) and Atomic Force Microscope (AFM) have been used to analyze structural properties and preferred orientation of AlN thin films. Preferred orientation and SAW characteristic of AlN were improved by insertion of $Al_{2}O_{3}$ buffer layer. Insertion loss of SAW devices using AlN/Si and AlN/$Al_{2}O_{3}$/Si were about 33.27 dB and 30.20 dB, respectively.

• Journal of Korea Foundry Society
• /
• v.15 no.4
• /
• pp.416-421
• /
• 1995

Recently Al-Cu-P alloys are used to refine primary Si of hypereutectic Al-Si alloys. Because it has inside AlP compound that acts as nucleation site in the melt, Al-Cu-P alloy has good refinement effect in lower holding temperature and after shoter holding times. In this study Al-Cu-P refinement agent was made by mechanical alloying method. When Al-13.5wt%Cu-1.5wt%P was alloyed mechanically for 30hr in Ar atmosphere by high energy ball mill, it had the refinement effect that showed primary Si size of about $30{\mu}m$ in Al-20wt%Si at $760^{\circ}C$, treated for 15min.

• Corrosion Science and Technology
• /
• v.12 no.3
• /
• pp.119-124
• /
• 2013

Nano-multilayered, crystalline AlTiSiN thin films were deposited on WC-TiC-Co substrates by the cathodic arc plasma deposition. The deposited film consisted of wurtzite-type AlN, NaCl-type TiN, and tetragonal $Ti_2N$ phases. Their oxidation characteristics were studied at 800 and $900^{\circ}C$ for up to 20 h in air. The WC-TiC-Co oxidized fast with large weight gains. By contrast, the AlTiSiN film displayed superior oxidation resistance, due mainly to formation of the ${\alpha}-Al_2O_3$-rich surface oxide layer, below which an ($Al_2O_3$, $TiO_2$, $SiO_2$)-intermixed scale existed. Their oxidation progressed primarily by the outward diffusion of nitrogen, combined with the inward transport of oxygen that gradually reacted with Al, Ti, and Si in the film.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.02a
• /
• pp.179-179
• /
• 2013

현재 자동차 분야에서 차량 경량화를 통해 연비 향상 및 에너지 효율 향상을 기대하고 있으며, 차량 경량화의 한 수단으로 자동차용 유리를 고강도 투명 플라스틱 소재인 PC (Polycarbonate)로 대체하고자 하는 연구가 활발히 이루어지고 있다. 그러나, PC의 낮은 내마모 특성과 자외선에 의한 열화 및 변색 현상은 해결하여야 할 중요한 문제점으로 지적되고 있다. 본 연구에서는, PC의 내마모 특성을 향상시키기 위하여 transmittance가 확보되고, 고경도 특성을 갖는 Al-Si-N 박막 증착에 대한 연구를 하였다. Al-Si-N 박막 증착을 위하여 ICP-assisted reactive magnetron sputtering 장비를 이용하였으며, 고경도 특성을 갖는 Al-Si-N 박막을 제조하였다. 분석 장비로는 박막의 chemical state와 crystallinity를 확인하기 위하여 XPS (X-ray Photoelectron Spectroscopy), AES (Auger electron spectrscopy)와 XRD (X-ray diffraction)를 이용하여 분석을 수행하였으며, Knoop ${\mu}$-hardness tester와 Pin-on-disk를 이용하여 경도 및 내마모 특성을 평가하였다. Al-Si-N 박막의 두께는 ~5,000 ${\AA}$을 증착하였으며, 가시광 영역에서 평균 92%의 transmittance를 나타내었다. 박막의 Si/(Al+Si) 비율에 따라 다른 경도 특성을 나타냈는데, Si/(Al+Si) 비율이 26~32% 부근에서 최대 31 GPa의 경도 값을 확인 할 수 있었다.

• International Journal of Advanced Culture Technology
• /
• v.3 no.2
• /
• pp.132-137
• /
• 2015

The purpose of this paper was to investigate the effects of solution treatment time and Sr-modification on the microstructure and property of the Al-Si piston alloy. It was found that as-cast microstructures of unmodified and Sr-modified Al-Si alloys consisted of a coarse acicular plate of eutectic Si, $Cu_3NiAl_6$ and $Mg_2Si$ phases in the ${\alpha}$-Al matrix but different in size and morphology. Both size and inter-particle spacing of Si particles were significantly changed by increasing of the solution treatment time. After a short solution treatment, the coarse acicular plate of the eutectic Si appears to be fragmented. Fully modified microstructure of Sr-modified alloy can reduce the solution treatment time to shorter compared to unmodified alloy. The maximum of a peak hardness value is found in the very short solution treatment of both Al-Si piston alloys. Compared to 10 h solution treatment, the solution treatment of 2-4 h is sufficient to achieve appropriate microstructures and hardness. The short solution treatment is very useful to increase the productivity and to reduce the manufacturing cost of the Al-Si piston alloys.

• Journal of the Korean Ceramic Society
• /
• v.27 no.5
• /
• pp.583-588
• /
• 1990

Glass films in the binary system B2O3-SiO2 and Al2O3-SiO2 were prepared on soda-lime-silica slide glass by the dip-coating technique from TEOS and boric acid or aluminum nitrate. Thickness of the films varying with viscosity and withdrawal speed were measured and effect of composition and firing temperature on the properties such as transmittance and refractive index were investigated. nM2O3.(100-n)SiO2(M=B or Al) films containing up to 20mol% B2O3 and 40mol% Al2O3 were transparent. Maximum transmittance at visible range were obtained for the sample containing 15mol% Ba2O3 and 32.5mol% Al2O3 and heat-treated at 50$0^{\circ}C$, respectively. Refractive index of the film containing 15mol% B2O3 was mininum in the B2O3-SiO2 binary system and minimal refractive index was appeared at the film containing 32.5mol% Al2O3. In IP spectra, addition of B2O3 were increased absorption peak intensity of B-O and Si-O-B bond and addition of Al2O3 were decreased absorption peak intensity of Si-O bond, respectively.

• Proceedings of the Korean Vacuum Society Conference
• /
• 1995.06a
• /
• pp.48-49
• /
• 1995

전자소자의 축소화에 따라 electromigration은 점차 반도체 디바이스의 주요 결함 원 인으로 부각되고 있다. 본 실험은 현재 배선 재료로 널리 사용되고 있는 Al-1%Si 금속박막 배선의 electromigration에 대한 온도 및 배선길이 의존성에 관하여 연구하였다. ppLCC(pplastic Leaded Chipp Carrier) ppackage된 ppSG(8000$\AA$)/SiO2(1000$\AA$)/Al-1%Si(7000 $\AA$)/SiO2(5000$\AA$)/pp-typpe Si(100)의 보호막처리된 시편과 Al-1%Si/SiO2(5000$\AA$)/pp-typpe Si(100)의 보호막처리되지 않은 시편등을 standard pphotolithograpphy 공정을 이용하여 각각 제작하였다. 선폭 3$mu extrm{m}$, 길이 100, 400, 800, 1600$\mu\textrm{m}$의 등의 Al-1%Si 박막배선구조를 사용하 였다. 가속화실험을 위해 인가된 D.C 전류밀도는 4.5$\times$106A/cm2이었고 실온에서 10$0^{\circ}C$까지 의 분위기 온도에서 electromigration를 실행하였다. 박막배선길이에 따른 MTF(Mean Time-to-Failure)는 임계길이 이상에서 포화되는 경향을 보이며 임계길이는 Al-1%Si 박막 배선에서 분위기온도에 따라 길이 400$\mu\textrm{m}$과 800$\mu\textrm{m}$범위에서 나타났다. 각 시편에서 electromigration에 대한 활성화에너지도 MTF의 특성과 유사하게 임계길이 이상에서 포화 되는 특성을 타나내었다.

• Proceedings of the KWS Conference
• /
• 2002.10a
• /
• pp.726-731
• /
• 2002

Reaction synthesis is a process to form ceramics, intermetallics and their composites from elemental powder mixture. Application of this process to a surface modification techniques has a possibilities to enable the process at a lower temperature or for a shorter time, although synthesized materials are likely to include voids and unreacted elements. This paper intend to examine the effect of Si addition to the mixture of Al and Ni on the densification of synthesized Ni-Al intermetallic compounds and to evaluate the surface properties of obtained coatings. By the Si addition, exothermic reaction temperature to form Ni-Al intermetallic was lowered to be below the melting point of Al. Si soluted $Al_3$Ni$_2$, $Al_3$Ni and $Al_{6}$Ni$_3$Si were mainly formed in the coating layer when powder mixture was heated to 973K for 300s. Besides, densification was enhanced by increasing hot press pressure, Si additions and heating rate. When the composition of eutectic Al-Si reaches 78%, void ratio of sintered compact reduced to 0.4%. It is caused by higher flowability of Al-Si liquid phase generated and its infiltration into the void. Since the hardness of NiAl(Si) compound (about 600HV) formed in the coating layer is higher than that of Ni-Al compound (about 400HV), coating layer with high density and superior wear property is obtained by hot press using reaction synthesis from Al-Ni-Si powder mixture.

• Journal of Korea Foundry Society
• /
• v.24 no.3
• /
• pp.145-152
• /
• 2004

The eutectic Si in Al-8.5wt.%Si alloy was changed from large flake to fine lemellar(or fibrous) shape when the Sc amount in the Al-Si alloy reaches 0.2wt.%. The optimum amount of Sc for the best modification effect was 0.8wt.% and slight decrease of modification effect occurred over this value. The study on the distribution of the modifiers(Sr, Na, and Sc) and the measurement of the surface tension of the Al-8.5wt.%Si alloy melt added with Sr, Na, and Sc modifier, respectively, reveals that Sc modifies the eutectic Si by the decrease of surface tension, while Sr and Na modify the eutectic Si mainly by impurity induced twinning mechanism.

• Journal of Powder Materials
• /
• v.14 no.6
• /
• pp.354-361
• /
• 2007

The bi-materials with Al-Mg alloy and its composites reinforced with SiC and $Al_2O_3$ particles were prepared by conventional powder metallurgy method. The A1-5 wt%Mg and composite mixtures were compacted under $150{\sim}450\;MPa$, and then the mixtures compacted under 400 MPa were sintered at $773{\sim}1173K$ for 5h. The obtained bi-materials with Al-Mg/SiCp composite showed the higher relative density than those with $Al-Mg/Al_2O_3$ composite after compaction and sintering. Based on the results, the bi-materials compacted under 400 MPa and sintered at 873K for 5h were used for mechanical tests. In the composite side of bi-materials, the SiC particles were densely distributed compared to the $Al_2O_3$ particles. The bi-materials with Al-Mg/SiC composite showed the higher micro-hardness than those with $Al-Mg/Al_2O_3$ composite. The mechanical properties were evaluated by the compressive test. The bi-materials revealed almost the same value of 0.2% proof stress with Al-Mg alloy. Their compressive strength was lower than that of Al-Mg alloy. Moreover, impact absorbed energy of bi-materials was smaller than that of composite. However, the bi-materials with Al-Mg/SiCp composite particularly showed almost similar impact absorbed energy to $Al-Mg/Al_2O_3$ composite. From the observation of microstructure, it was deduced that the bi-materials was preferentially fractured through micro-interface between matrix and composite in the vicinity of macro-interface.