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Application of Au-Sn Eutectic Bonding in Hermetic Rf MEMS Wafer Level Packaging (Au-Sn 공정 접합을 이용한 RF MEMS 소자의 Hermetic 웨이퍼 레벨 패키징)

  • Wang Qian;Kim Woonbae;Choa Sung-Hoon;Jung Kyudong;Hwang Junsik;Lee Moonchul;Moon Changyoul;Song Insang
    • Journal of the Microelectronics and Packaging Society
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    • v.12 no.3 s.36
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    • pp.197-205
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    • 2005
  • Development of the packaging is one of the critical issues for commercialization of the RF-MEMS devices. RF MEMS package should be designed to have small size, hermetic protection, good RF performance and high reliability. In addition, packaging should be conducted at sufficiently low temperature. In this paper, a low temperature hermetic wafer level packaging scheme for the RF-MEMS devices is presented. For hermetic sealing, Au-Sn eutectic bonding technology at the temperature below $300{\times}C$ is used. Au-Sn multilayer metallization with a square loop of $70{\mu}m$ in width is performed. The electrical feed-through is achieved by the vertical through-hole via filled with electroplated Cu. The size of the MEMS Package is $1mm\times1mm\times700{\mu}m$. By applying $O_2$ plasma ashing and fabrication process optimization, we can achieve the void-free structure within the bonding interface as well as via hole. The shear strength and hermeticity of the package satisfy the requirements of MIL-STD-883F. Any organic gases or contamination are not observed inside the package. The total insertion loss for the packaging is 0.075 dB at 2 GHz. Furthermore, the robustness of the package is demonstrated by observing no performance degradation and physical damage of the package after several reliability tests.

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Development, Reproduction and Longevity of Predator Orius sauteri Poppius(Hemiptera: Anthocoridae) when Reared on Three Different Preys (애꽃노린재(Orius sauteri) 발육,성충수명 및 산란에 미치는 먹이의 영향)

  • 백채훈;황창연;이건휘;김두호;최만영;나승용;김상수
    • Korean journal of applied entomology
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    • v.42 no.1
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    • pp.35-41
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    • 2003
  • Anthocorid bugs (Orius spp.) are known as polyphagous predators preying on thrips, aphids, mites, eggs of small insects and whiteflies. This study was conducted to investigate the nym-phal development, survival rate, longevity of Orius sauteri adult and oviposition, when nymphs of western flower thrips (Frankliniella occidentalis) and cotton aphid (Aphis gossypii), and eggs of two-spotted spider mite (Tetranychus uritcae) were fed as diets. Nymphal development of female/male O. sauferi fed with F. occidentalis, A. gossypii and T urticae took 12.2/12.8, 13.0/l3.2, and 17.9/17.8 days at 27$^{\circ}C$, respectively, Survival rates during nymphal development were 96.4, 78.4, 73.8%, longevity of female/male adults were 55.9/51.0, 30.2/30.8, and 25.8/25.1 days, and daily oviposition were 5.6, 4.1, and 1.9 eggs, respectively. Oviposition of O. sauteri fed with F. occidentalis usually began 3-4 days after emergence at 27$^{\circ}C$, and reached at its peak of 7-8 eggs female day 20-40 days after emergence.

A Study on Enzymatic Degummings of Raw Silk and Silk Fabric (견의 효소 정련에 관한 연구)

  • Lee, Yong-U;Song, Gi-Won;Jeong, In-Mo
    • Journal of Sericultural and Entomological Science
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    • v.28 no.1
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    • pp.66-71
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    • 1986
  • The studies were carried out to screen the optimum conditions for enzymatic degumming of raw silk yarn and silk fabric by use of Alkalase, a protease produced by Bacteria, comparing with Papain and Trypsin representing natural proteolytic enzymes. 1. The optimum temperature and acidity of degumming solution were 70$^{\circ}C$, pH 5-6 for Papain degumming, 40$^{\circ}C$, pH 8 for Trypsin and 50-60$^{\circ}C$ pH 8-9 for Alkalase. 2. By increasing the Alkalase concentration in the range of 0.6 to 1.0 gram per liter, the time for enzymatic degumming of silk yarn could be reduced by 40 minutes. 3. In degumming of silk yarn by Alkalase, the pretreatment of 95$^{\circ}C$, 10 minutes at 0.1% sodium bicarbonate solution or posttreatent of 80$^{\circ}C$, 20 minutes at 2% (o.w.f.) sodium silicate solution improved the efficiency of enzymatic degumming, as compared to that of nontreatment. 4. The breaking strength, elongation and Lousiness results of enzymatically degummed silk yarn were apt to be improved more than those of soap-degummed one. 5. When the pretreatment of alkaline solution was done with over 20% of degumming ratio, the enzymatic degumming efficiency of both Havutae and Crepe de chine could be reached to the same level with those of soap-soda degummed. 6. As the pretreated silk fabric with 20% of degumming ratio was under action of three proteases, respectively, the deumming efficiency of Havutae and Crepe de chine were completed by Alkalase more than by Papain or Trpysin. 7. The stiffness of enzymatically degummed Crepe de chine was not only reduced by 17% more than that of soap-soda degummed one but also the Drape coefficient was decreased in enzymatically degummed fabrics, which was closely related with the soft touch of degummed fabrics.

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Characteristic Analysis of Functional Nano-coating Films Synthesized according to the Annealing Ambient and Fabrication of Anti-pollution PV Module (기능성 나노코팅 박막의 열처리 분위기에 따른 특성분석 및 오염방지 태양광 모듈제작)

  • Kang, Hyunil;Shin, Seung Kwon;Kim, Hyungchul;Lim, Yonnsik;Yoo, Youngsik;Joung, Yeun-Ho;Kim, Junghyun;Choi, Won Seok
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.64 no.3
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    • pp.182-186
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    • 2015
  • We investigated that effects of annealing ambient on the characteristics of functional nano thin film synthesized on glass substrate. The functional nano thin films were annealed by using rapid thermal annealing (RTA) equipment in vacuum, oxygen and nitrogen ambient, respectively. The hardness of the functional nano thin films were measured by a standard hardness testing method (ASTM D3363) such as a H-9H, F, HB and B-6B pencil (Mitsubishi, Japan). Also, the adhesion of the functional nano thin films were measured by a standard adhesion testing method (ASTM D3359) using scotch tape (3M, Korea). The contact angle of the functional nano thin films was measured by a contact angle analyzer (Phoenix 300 Touch, S.E.O.). The optical property of functional nano thin films was measured via UV-visible spectroscopy (S-3100, Scinco).

Development and oviposition of Orius strigicollis (Poppius) (Hemiptera: Anthocoridae) reared on three different insect preys (먹이 곤충에 따른 Orius strigicollis(Poppius)의 발육과 산란)

  • 김정환;한만위;이건형;김용헌;이정운;인치종
    • Korean journal of applied entomology
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    • v.36 no.2
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    • pp.166-171
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    • 1997
  • To find out an alternative prey of Orius strigicollis Poppius in the laboratory continuous rearing system, cotton aphid (Aphis gossypii), two spotted spider mite (Tetmnychus urticae) and mold mite (Tyrophagus putrescenriae) were tested as alternative prey. Development and oviposition of 0. strigicollis were observed at 25f l0C, RH 60-80% and 16L:8D. Survival rate and developmental period of the nymphal stages of 0. strigicollis was 81. 6% and 11.6 days when fed on cotton aphid, 56.796, 14.6 days, 42.3% and 16.5 days when fed on two spotted spider mite and mold mite, respectively. Total oviposition of 0. strigicollis was 68.5 eggslfemaie fed on cotton aphid, 46.1 and 26.5 eggsifemale fed on two spotted spider mite and mold mite, respectively. Cotton aphid seems to be most suitable prey for rearing 0 . strigicollis among the three prey species tested.

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The Effects of Drying Temperature on Chromate Treatment for Electroplated Zinc (전기 아연도금용 유색 크로메이트에 대한 건조 온도의 영향)

  • Su-Byung Jeon;Ji-Won Choi;Byung-Ki Son;Injoon Son
    • Journal of the Korean institute of surface engineering
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    • v.56 no.5
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    • pp.289-298
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    • 2023
  • In this study, the effect of drying temperature on characteristics of the trivalent chromate film on electroplated zinc was investigated. An zinc-electroplated iron specimen with a thickness of 5 ㎛ was used for chromate treatment. Chromate treatment was conducted in a solution diluted 10 times from a mixture of Cr(NO3)3·9H20 360 g/L, Co(NO3)2·6H2O 60 g/L, Na2SO4 60 g/L, NH4F·HF 25 g/L, and NaOH 20 g/L. The zinc electroplated specimen was treated using the chromate solution with pH 2.0 at 25 ℃ for 60 s. Subsequently, chromate-treated samples were dried in an electric furnace for 2h with temperature varied from 25 to 125 ℃. The corrosion rate increased with the increase in the drying temperature, and the surface morphology of the chromate-treated film was observed using FE-SEM. When the drying temperature changed, the color of the chromate film changed from green to yellow, and the thickness of the film changed from 362 to 241 nm, respectively. Additionally, corrosion resistance was evaluated via a salt spray test.

Studies on the effect of phthalimido methyl-O,O-dimethyl-phosphorodithioate (Imidan) and its possible metabolites on the growth of rice plant (Phthalimido methyl-O,O-dimethyl phosphorodithioate (Imidan)과 그의 대사물질(代謝物質)이 수도(水稻) 생육(生育)에 미치는 영향(影響)에 관(關)한 연구(硏究))

  • Lee, Sung-Hwan;Lee, Dong-Suk;Lee, Jae-Koo
    • Applied Biological Chemistry
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    • v.7
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    • pp.105-117
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    • 1966
  • This experiment was conducted to investigate the effet of phthalimido-methyl-O,O-dimethyl-phosphorodithioate (Imidan) known as an acaricide and its possible metabolic products on the growth of plant, when sprayed on the leaves of rice plant. The results are summarized as follows. 1) Possible metabolic products of Imidan, the following compounds were synthesized or recrystallized for the present experiment a) N-Hydroxymethyl phthalimidem b) Phthalimide c) Phthalamidic acid d) Phthalic acid e) Anthranilic acid f) p-Amino benzoic acid g) p-Hydroxy benzoic acid h) Benzoic acid 2) Among the above materials, a), c), d), e), and Imidan were dissolved in a buffer solution respectively to be 10 and 20 p.p.m. and tested with the wheat coleoptile straight growth method. According to the results, Imidan inhibited the growth of coleoptile in both 10 and 20 p.p.m., whereas the others showed much better growth than the control, especially phthalamidic acid in 10 p.p.m. It appears that Imidan itself inhibits the coleoptile growth, whereas the metabolites derived from Imidan through various metabolisms, including hydrolysis in plant tissues show growth-regulating activity. (refer: Table 1, Fig. 1) 3) 20, 100 and 200 p.p.m. solutions of Imidall emulsion in xylene f·ere prepared. The lengths of shoot and root of rice seeds germinated on the re-respective media were measured after 12 days. The data showed that root was much more elongated in Imidan 20 p.p.m., whereas shoot in Imidan 100 p.p.m., respectively, than in the xylene control. An interesting finding was that xylene used as solvent had a tendency to inhibit seriously the root growth of rice seed. (refer: Table 2,5). 4) The emulsions of concentrations in 10, 25, 50 and 100 p.p.m's of control, Imidan, N-hydroxy methyl phthalimide, anthranilic acid, and phthalmide, respectively, were sprayed twice on the rice plant on pot. After a certain period of time lengths of rice culms were measured, showing that plots treated with Imidan and N-hydroxy methyl phthalimide exhibited much more growth than those of control and the others. 5) Loaves and stems of rice plant were sampled and extracted with dried acetone at the intervals of 3-, 5-, 7-, and 14 days after treated with Imidan 250 p.p.m. emulsion. This sample extracted with acetone was purified by means of prechromatographic purification method with acetonitrile and paperchromatographed to detect the following metabolic products. Imidan (Rf: 0.97-0,98), N-hydroxy-methyl phthalimide (Rf: 0.87) phthalimide (Rf: 0.86-0.87), phthalamidic acid (Rf: 0.13-0.14), phthalic acid (Rf: 0.02-0.03), benzoic acid (Rf: 0.42-0.43), p-amino benzoic acid or p-hydroxy benzoic acid (Rf: 0.08-0.09), and unidentified compounds (Rf: 0.73, 0.59, 0.33, 0.23. 0.07). In addition, in the early stages, such as 3- and 5 days nonhydrolyzed Imidan and its first hydrolytic product, N-hydroxymethyl phthalimide were detected in relatively large amounts, whereas in the last stages of 7- and 14 days due to further decomposition, the afore-mentioned two materials were reduced in the amount and p-hthalic, phthalamidic, benzoic, and p-Hydroxy benzoic, or p-Amino benzoic acids were detected in a considerably large amount. It is, therefore, believed that most of Imidan applied to the leaves of rice plant may be decomposed within almost 14 days. In the light of above observations it is considered that Imidan itself is not involved in plant growth regulating activity, whereas various phthaloyl derivatives produced in the course of metabolism (namelr, enzymic action) in plant tissues may have such effect.

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Studies on the Mechanical Properties of Weathered Granitic Soil -On the Elements of Shear Strength and Hardness- (화강암질풍화토(花崗岩質風化土)의 역학적(力學的) 성질(性質)에 관(關)한 연구(硏究) -전단강도(剪斷强度)의 영향요소(影響要素)와 견밀도(堅密度)에 대(對)하여-)

  • Cho, Hi Doo
    • Journal of Korean Society of Forest Science
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    • v.66 no.1
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    • pp.16-36
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    • 1984
  • It is very important in forestry to study the shear strength of weathered granitic soil, because the soil covers 66% of our country, and because the majority of land slides have been occured in the soil. In general, the causes of land slide can be classified both the external and internal factors. The external factors are known as vegetations, geography and climate, but internal factors are known as engineering properties originated from parent rocks and weathering. Soil engineering properties are controlled by the skeleton structure, texture, consistency, cohesion, permeability, water content, mineral components, porosity and density etc. of soils. And the effects of these internal factors on sliding down summarize as resistance, shear strength, against silding of soil mass. Shear strength basically depends upon effective stress, kinds of soils, density (void ratio), water content, the structure and arrangement of soil particles, among the properties. But these elements of shear strength work not all alone, but together. The purpose of this thesis is to clarify the characteristics of shear strength and the related elements, such as water content ($w_o$), void ratio($e_o$), dry density (${\gamma}_d$) and specific gravity ($G_s$), and the interrelationship among related elements in order to decide the dominant element chiefly influencing on shear strength in natural/undisturbed state of weathered granitic soil, in addition to the characteristics of soil hardness of weathered granitic soil and root distribution of Pinus rigida Mill and Pinus rigida ${\times}$ taeda planted in erosion-controlled lands. For the characteristics of shear strength of weathered granitic soil and the related elements of shear strength, three sites were selected from Kwangju district. The outlines of sampling sites in the district were: average specific gravity, 2.63 ~ 2.79; average natural water content, 24.3 ~ 28.3%; average dry density, $1.31{\sim}1.43g/cm^3$, average void ratio, 0.93 ~ 1.001 ; cohesion, $ 0.2{\sim}0.75kg/cm^2$ ; angle of internal friction, $29^{\circ}{\sim}45^{\circ}$ ; soil texture, SL. The shear strength of the soil in different sites was measured by a direct shear apparatus (type B; shear box size, $62.5{\times}20mm$; ${\sigma}$, $1.434kg/cm^2$; speed, 1/100mm/min.). For the related element analyses, water content was moderated through a series of drainage experiments with 4 levels of drainage period, specific gravity was measured by KS F 308, analysis of particle size distribution, by KS F 2302 and soil samples were dried at $110{\pm}5^{\circ}C$ for more than 12 hours in dry oven. Soil hardness represents physical properties, such as particle size distribution, porosity, bulk density and water content of soil, and test of the hardness by soil hardness tester is the simplest approach and totally indicative method to grasp the mechanical properties of soil. It is important to understand the mechanical properties of soil as well as the chemical in order to realize the fundamental phenomena in the growth and the distribution of tree roots. The writer intended to study the correlation between the soil hardness and the distribution of tree roots of Pinus rigida Mill. planted in 1966 and Pinus rigida ${\times}$ taeda in 199 to 1960 in the denuded forest lands with and after several erosion control works. The soil texture of the sites investigated was SL originated from weathered granitic soil. The former is situated at Py$\ddot{o}$ngchangri, Ky$\ddot{o}$m-my$\ddot{o}$n, Kogs$\ddot{o}$ng-gun, Ch$\ddot{o}$llanam-do (3.63 ha; slope, $17^{\circ}{\sim}41^{\circ}$ soil depth, thin or medium; humidity, dry or optimum; height, 5.66/3.73 ~ 7.63 m; D.B.H., 9.7/8.00 ~ 12.00 cm) and the Latter at changun-long Kwangju-shi (3.50 ha; slope, $12^{\circ}{\sim}23^{\circ}$; soil depth, thin; humidity, dry; height, 10.47/7.3 ~ 12.79 m; D.B.H., 16.94/14.3 ~ 19.4 cm).The sampling areas were 24quadrats ($10m{\times}10m$) in the former area and 12 in the latter expanding from summit to foot. Each sampling trees for hardness test and investigation of root distribution were selected by purposive selection and soil profiles of these trees were made at the downward distance of 50 cm from the trees, at each quadrat. Soil layers of the profile were separated by the distance of 10 cm from the surface (layer I, II, ... ...). Soil hardness was measured with Yamanaka soil hardness tester and indicated as indicated soil hardness at the different soil layers. The distribution of tree root number per unit area in different soil depth was investigated, and the relationship between the soil hardness and the number of tree roots was discussed. The results obtained from the experiments are summarized as follows. 1. Analyses of simple relationship between shear strength and elements of shear strength, water content ($w_o$), void ratio ($e_o$), dry density (${\gamma}_d$) and specific gravity ($G_s$). 1) Negative correlation coefficients were recognized between shear strength and water content. and shear strength and void ratio. 2) Positive correlation coefficients were recognized between shear strength and dry density. 3) The correlation coefficients between shear strength and specific gravity were not significant. 2. Analyses of partial and multiple correlation coefficients between shear strength and the related elements: 1) From the analyses of the partial correlation coefficients among water content ($x_1$), void ratio ($x_2$), and dry density ($x_3$), the direct effect of the water content on shear strength was the highest, and effect on shear strength was in order of void ratio and dry density. Similar trend was recognized from the results of multiple correlation coefficient analyses. 2) Multiple linear regression equations derived from two independent variables, water content ($x_1$ and dry density ($x_2$) were found to be ineffective in estimating shear strength ($\hat{Y}$). However, the simple linear regression equations with an independent variable, water content (x) were highly efficient to estimate shear strength ($\hat{Y}$) with relatively high fitness. 3. A relationship between soil hardness and the distribution of root number: 1) The soil hardness increased proportionally to the soil depth. Negative correlation coefficients were recognized between indicated soil hardness and the number of tree roots in both plantations. 2) The majority of tree roots of Pinus rigida Mill and Pinus rigida ${\times}$ taeda planted in erosion-controlled lands distributed at 20 cm deep from the surface. 3) Simple linear regression equations were derived from indicated hardness (x) and the number of tree roots (Y) to estimate root numbers in both plantations.

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Fabrication and characterization of the 0.25 ${\mu}m$ T-shaped gate P-HEMT and its application for MMIC low noise amplifier (0.25 ${\mu}m$ T형 게이트 P-HEMT 제작 및 특성 평가와 MMIC 저잡음 증폭기에 응용)

  • Kim, Byung-Gyu;Kim, Young-Jin;Jeong, Yoon-Ha
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.36D no.1
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    • pp.38-46
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    • 1999
  • o.25${\mu}m$ T-shaped gate P-HEMT is fabricated and used for design of X0band three stage monolithic microwave integrated circuit(MMIC) low noise amplifier(LNA). The fabricated P-HEMT exhibits an extrinsis transconductance of 400mS/mm and a drain current of 400mA/mm. The RF and noise characteristics show that the current gain cut off frequency is 65GHz and minimum noise figure(NFmin) of 0.7dB with an associated gain of 14.8dB at 9GHz. In the design of the three stage LNA, we have used the inductive series feedback circuit topology with the short stub. The effects of series feedback to the noise figure, the gain, and the stability have been investigated to find the optimal short stub length. The designed three staage LNA showed a gain of above 33dB, a noise figure of under 1.2dB, and ainput/output return loss of under 15dB and 14dB, respectively. The results show that the fabricated P-HEMT is very suitable for a X-band LNA with high gain.

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Fabrication of a Pressure Difference Type Gas Flow Sensor using ICP-RIE Technology (ICP-RIE 기술을 이용한 차압형 가스유량센서 제작)

  • Lee, Young-Tae;Ahn, Kang-Ho;Kwon, Yong-Taek;Takao, Hidekuni;Ishida, Makoto
    • Journal of the Semiconductor & Display Technology
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    • v.7 no.1
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    • pp.1-5
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    • 2008
  • In this paper, we fabricated pressure difference type gas flow sensor using only dry etching technology by ICP-RIE(inductive coupled plasma reactive ion etching). The sensor's structure consists of a common shear stress type piezoresistive pressure sensor with an orifice fabricated in the middle of the sensor diaphragm. Generally, structure like diaphragm is fabricated by wet etching technology using TMAH, but we fabricated diaphragm by only dry etching using ICP-RIE. To equalize the thickness of diaphragm we applied insulator($SiO_2$) layer of SOI(Si/$SiO_2$/Si-sub) wafer as delay layer of dry etching. Size of fabricated diaphragm is $1000{\times}1000{\times}7\;{\mu}m^3$ and overall chip $3000{\times}3000{\times}7\;{\mu}m^3$. We measured the variation of output voltage toward the change of gas pressure to analyze characteristics of the fabricated sensor. Sensitivity of fabricated sensor was relatively high as about 1.5mV/V kPa at 1kPa full-scale. Nonlinearity was below 0.5%F.S. Over-pressure range of the fabricated sensor is 100kPa or more.

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