• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.210.2-210.2
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• 2016

An inductively coupled plasma source was prepared for the deposition of a-C:H thin film. Properties of the inductively coupled plasma source are investigated by fluid simulation including Navier-Stokes equations and home-made tuned single Langmuir probe. Signal attenuation ratios of the Langmuir probe harmonic frequency were 13.56Mhz and 27.12Mhz. Dependencies of plasma parameters on process parameters were accord with simulation results. Ar/CH4 plasma simulation results shown that hydrocarbon radical densities have their lowest value at the vicinity of gas feeding line due to high flow velocity. For input power density of 0.07W/cm3, CH radical density qualitatively follows electron density distribution. On the other hand, central region of the chamber become deficient in CH3 radical due to high dissociation rate accompanied with high electron density. The result suggest that optimization of discharge power is important for controlling deposition film quality in high density plasma sources.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.156.2-156.2
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• 2015

반도체 소자의 크기가 나노사이즈로 줄어들기 때문에, 건식식각의 중요성이 강조되고 있다. dual plasma source를 사용함으로써 plasma 밀도, 이온충돌에너지, 이온플럭스를 조절 가능하다. Low frequency로 이온에너지를 조절하고, high frequency로 이온플럭스를 일반적으로 조절한다. 본 연구는 inductively coupled plasma (ICP)와 capacitively coupled plasma (CCP)를 사용하는 dual plasma source이다. ICP는 AE RPS로 2.4 MHz를 사용하고, CCP는 AE RFX-600으로 13.56 MHz이다. single L-probe는 Hiden ESPion이고, quadrupole mass spectrometer (QMS)는 INFICON CPM-300이다. chuck에 CCP가 인가되고, ICP는 SUS mesh를 거쳐서 영향을 미친다. Gas는 Ar, Ar+CF4 두 조건에서 비료를 하였다. Single L-probe를 이용하여 플라즈마를 측정한 결과 CCP만 인가하였을 때, Te 2.05 eV, Ne 4.07E+10 #/cm3, Ni 5.82E+10 #/cm3의 결과를 얻을 수 있었다. ICP를 방전하고 mesh를 통해서 chuck으로 입사하는 이온을 측정한 결과 mesh에 의해 이온이 중성화되어 거의 입사하지 않음을 확인할 수 있었다. 최종적으로 이온의 영향이 상쇄되고, 라디칼의 영향이 증가하여 높은 etch rate와 선택비를 가지며, 등방성 식각의 영향이 커질 것으로 사료된다.

• The Journal of the Korea institute of electronic communication sciences
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• v.6 no.4
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• pp.511-516
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• 2011

Recently, the development of computing technology and experiential content for the increased interest in education and cultural facilities to target children and young people experience learning and experiential entertainment systems require a high propensity to invest and are. In this paper, for the 13.56MHz band RFID Reader and Tag RFID technology using the proposed interactive educational globe. Active tags attached to sensors attached to the globe were presented in the RFID reader, arduino and sensors in conjunction with Google Earth COM API was constructed through the physical computing educational system.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.4
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• pp.285-289
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• 2009

Small RFID tag antenna were fabricated on Si substrate and their physical and electrical properties were evaluated. With decreasing the size of tag antenna on Si substrate, small SMD-type RFID tags could be fabricated, which is very useful for various applications including PCB tracking. Firstly, electromagnetic properties on tag antenna pattern were simulated with HFSS. The setup frequency was 13.56 MHz of HF-band RFID. The line-width and line-gap were modeled in the range of $50{\sim}200{\mu}m$. S parameters, SRF, and Q value were calculated from the model. When the line-width and line-gap were 100 urn and the loop-turn was 10, the SRF was 80 MHz and the Q value was ca. 9. When the microstrip antenna pattern of aluminum was fabricated by using DC sputtering, Vpp of ca. 1.6 V was obtained when the reader-tag distance was 40 mm.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.219.1-219.1
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• 2014

전자소자 산업의 미세화 및 대형화에 따라 플라즈마 밀도, 전위, 온도, 균일도 등 과 같은 플라즈마 특성을 제어하는 것은 차세대 플라즈마 장치 개발에 있어 매우 중요한 요소라고 할 수 있다. 특히, 급격한 소자의 미세화에 따라 플라즈마 공정을 통해 발생할 수 있는 damage는 큰 issue가 되어 왔고, 많은 연구자들은 이를 해결하기 위해서 다각적인 노력을 진행해 왔다. 그중 높은 전자 온도는 높은 전자 에너지에 의해 공정 중 소자를 손상 시키는 주된 원인이라고 보고되고 있으며, 이에 대한 제어기술은 매우 중요하다고 할 수 있다. 본 연구에서는 서로 다른 두 개의 내/외측으로 나뉘어진 나선형 모양의 ICP 안테나를 이용 하여 연구를 진행하였다. 내측의 안테나에는 2 MHz를 연결 하였으며, 외측의 안테나에는 13.56 MHz를 연결 하였으며, 내/외측 안테나에 각각 pulse mode로 입력전력을 인가해 줌으로써 플라즈마의 특성을 관찰하였다. Pulse / CW (Continuous Wave) mode에 있어서 전자온도의 측정을 위해 emissive probe 를 이용하여 plasma potential과 floating potential을 측정하였으며, 이를 통하여 전자온도를 계산하여 구할 수 있었다. Duty ratio 및 pulsing frequency의 변화에 따른 전자온도의 변화를 확인 할 수 있었으며, 그에 따른 플라즈마 균일도를 ion saturation current를 측정함으로써 관찰할 수 있었다. 실제 식각 공정에 있어서 Pulsing 조건에 따른 식각 특성을 관찰하기 위해, SiO2, ACL (Amorphous Carbon Layer)에 대해 식각을 진행하였으며, 식각 메커니즘 분석을 위해 이온에너지 분포의 변화를 PSM (Plasma Sampling Mass-spectroscopy)을 이용하여 측정하였다.

• Journal of Powder Materials
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• v.21 no.6
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• pp.429-433
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• 2014

This study investigated the magnetic properties and frequency dispersion of complex permeability of Ni-Zn-Co ferrites used for magnetic shielding in near field communication (NFC) system. The sintered specimens of $(Ni_{0.7}Zn_{0.3})_{1-x}Co_xFe_2O_4$ composition were prepared by the conventional ceramic processing. The coercive force and saturation magnetization were measured by vibrating sample magnetometer. The complex permeability was measured by RF impedance analyzer in the range of 1 MHz~1.8 GHz. The coercive force increased and saturation magnetization decreased with increasing the Co substitution. The real and imaginary parts of complex permeability decreased and the resonance frequency increased with Co substitution, which was attributed to the increase in crystal anisotropy field and reduction in saturation magnetization. The effect of Co substitution could be found in reducing the magnetic loss to nearly zero at the operating frequency of NFC (13.56 MHz).

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.306-306
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• 2010

A high density (> $10^{11}\;cm^{-3}$) and low electron temperature (< 2 eV) plasma is produced by using a conventional HF (13.56 MHz) plasma enhanced chemical vapor deposition (PECVD) with an additional ultra high frequency (UHF, 314 MHz) plasma source utilizing two parallel antenna assembly. It is applied for the high rate synthesis of high quality nanocrystalline silicon (nc-Si) films. A high deposition rate of 1.8 nm/s is achieved with a high crystallinity (< 70%), a low spin density (< $3{\times}10^{16}\;cm^{-3}$) and a high light soaking stability (< 1.5). Optical emission spectroscopy measurements reveal emission intensity of $Si^*$ and $SiH^*$, intensity ratio of $H{\alpha}/Si^*$ and $H{\alpha}/SiH^*$ which are closely related to film deposition rate and film crystallinity, respectively. A high flux of precursor and atomic hydrogen which are produced by an additional high excitation frequency is effective for the fast deposition of highly crystallized nc-Si films without additional defects.

• Journal of Powder Materials
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• v.23 no.2
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• pp.132-135
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• 2016

This study investigates the influence of sintering temperature on the magnetic properties and frequency dispersion of the complex permeability of Ni-Zn-Cu ferrites used for magnetic shielding in near-field communication (NFC) systems. Sintered specimens of $(Ni_{0.7}Zn_{0.3})_{0.96}Cu_{0.04}Fe_2O_4$ are prepared by conventional ceramic processing. The complex permeability is measured by an RF impedance analyzer in the range of 1 MHz to 1.8 GHz. The real and imaginary parts of the complex permeability depend sensitively on the sintering temperature, which is closely related to the microstructure, including grain size and pore distribution. In particular, internal pores within grains produced by rapid grain growth decrease the permeability and increase the magnetic loss at the operating frequency of NFC (13.56 MHz). At the optimized sintering temperature ($1225-1250^{\circ}C$), the highest permeability and lowest magnetic loss can be obtained.

• Journal of the Korean Society of Clothing and Textiles
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• v.46 no.2
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• pp.367-374
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• 2022

Herein, a highly elastic e-textile band with a two-wire transmission line was designed and fabricated for smart clothing applications. A conductive yarn with a very uniform low electrical resistance of 0.0357 Ω/cm was developed and used for the signal and ground lines. To control the elasticity of the e-textile band, spandex yarns were added in the warp direction during knitting and the tension was adjusted. As the length of the e-textile band increased, its RF performance deteriorated. Furthermore, the frequency corresponding to -3 dB S21 was lower in the 30% stretched band than in the unstretched band. For the e-textile bands with lengths 10, 50, and 100 cm, the frequencies corresponding to -3 dB S21 were 107.77, 24.56, and 13.02 MHz when not stretched, and 88.74, 22.02, and 12.60 MHz when stretched by 30%. The fabricated bands were flatter, more flexible, and more elastic than transmission line cables; thus, they can be easily integrated into wearables and smart clothing. However, to increase RF performance and achieve optimum utilization, future studies must focus on the fabrication of transmission lines with lower resistance and reduced distance between the signal and ground lines, and thus the number of transmission lines can be increased.

• Proceedings of the Korea Information Processing Society Conference
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• 2007.11a
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• pp.874-877
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• 2007

최근 건설 산업이 고도화, 지능화됨에 따라 건설자재정보의 효율적인 관리방안으로 RFID 기술을 이용하려는 연구 및 적용 사례가 증가 하고 있다. RFID(Radio Frequency Identification)란 라디오 주파수를 이용한 무선인식 기법을 뜻하는 것으로 건설자재에 RFID Transponder(이하 태그)를 부착하여 생산, 유통, 설비 등 전 과정의 정보 추적 및 관리가 가능하다. 그러나 RFID 시스템 특성상 전자기장이 형성되는 철골자재나 수분이 포함된 콘크리트, 도료(안료) 등의 자재에서는 RFID 적용이 쉽지 않다. 또한, 현재 사용 중인 RFID 장비마저도 표준화 되어 있지 않고 사용 주파수 대역 또한 각각 다르기 때문에 건설자재에 적용하기위한 RFID 시스템의 표준화 및 규격화가 절실하다. 본 논문에서는 건설자재에 RFID를 적용하기 위한 표준화 방향을 제시하는 기초 연구로써 목재, 철재 빔, 도료(안료), 콘크리트, 배관자재(철/동/PE)에 Passive Type의 일반(Pager) 태그, 금속 태그, 액체형 태그를 부착 매립하여 125KHz, 13.56MHz, 900MHz의 주파수 대역과 자재 물성별 인식거리 및 인식률 시험을 진행하여 건설자재에 RFID를 적용하기위한 표준 주파수 대역 및 재질에 따른 적정 태그를 제시하고자 한다.