Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2010.08a
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- Pages.306-306
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- 2010
High quality fast growth nano-crystalline Si film synthesized by UHF assisted HF-PECVD
- Kim, Youn-J. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Choi, Yoon-S. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Choi, In-S. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Han, Jeon-G. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
- Published : 2010.08.18
Abstract
A high density (>
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