• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.149-149
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• 2008

Metal-Insulator-Metal(MIM) capacitors have been studied extensively for next generation of high-density dynamic random access memory (DRAM) devices. Of several candidates for metal electrodes, Ru or its conducting oxide $RuO_2$ is the most promising material due to process maturity, feasibility, and reliability. ALD can be used to form the Ru and RuO2 electrode because of its inherent ability to achieve high level of conformality and step coverage. Moreover, it enables precise control of film thickness at atomic dimensions as a result of self-limited surface reactions. Recently, ALD processes for Ru and $RuO_2$, including plasma-enhanced ALD, have been studied for various semiconductor applications, such as gate metal electrodes, Cu interconnections, and capacitor electrodes. We investigated Ru/$RuO_2$ thin films by thermal ALD with various deposition parameters such as deposition temperature, oxygen flow rate, and source pulse time. Ru and $RuO_2$ thin films were grown by ALD(Lucida D150, NCD Co.) using RuDi as precursor and O2 gas as a reactant at $200\sim350^{\circ}C$.

• 한국환경과학회지
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• 제17권5호
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• pp.547-553
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• 2008

For the RhB removal from the wastewater, electrochemical method was adapted to this study. Three dimensionally stable anode (Pt, Ir and Ru) and graphite and Ru cathode were used. In order to identify decolorization, the effects of electrode, current density, electrolyte and air flow rate were investigated. The effects of electrode material, current, electrolyte concentration and air flow rate were investigated on the decolorization of RhB. Electro-Fenton's reaction was evaluated by added $Fe^{2+}$ and $H_2O_2$ generated by the graphite cathode. Performance for RhB decolorization of the four electrode systems lay in: Ru-graphite > Ru-Ru > Ir-graphite > Pt-graphite. A complete color removal was obtained for RhB (30 mg/L) at the end of 30 min of electrolysis under optimum operations of 2 g/L NaCl concentration and 2 A current. $Fe^{2+}$ addition increased initial reaction and decreased final RhB concentration. However the effect was not high.

• 한국응용과학기술학회지
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• 제31권2호
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• pp.190-196
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• 2014

The sol-gel method was used to prepare binary metal oxide ($IrO_2-RuO_2$) pH sensor. The electrodes that mole percent compositions (mol%) of $IrO_2$ and RuO2 were 70:30 and 30:70 were selected. The characterizations of Nernstian response over pH range, response rate, interference on alkaline metals and reproducibility were investigated. Also the electroanalytical properties of these electrodes were evaluated in comparison with a commercial glass pH electrode. The composition of $IrO_2:RuO_2$ 70:30 mol% was chosen as better electrode formulation. The electrode was not susceptible to the action of interfering ions such as $Li^+$, $Na^+$ and $K^+$.

• 상하수도학회지
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• 제31권5호
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• pp.373-381
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• 2017

$RuO_2$ is a common active component of Dimensionally Stable Anodes (DSAs) for chlorine evolution that can be used in wastewater treatment systems. The recent improvement of chlorine evolution using nanostructures of $RuO_2$ electrodes to increase the treatment efficiency and reduce the energy consumption of this process has received much attention. In this study, $RuO_2$ nanorod and nanosheet electrodes were simply fabricated using the sol-gel method with organic surfactants as the templates. The obtained $RuO_2$ nanorod and nanosheet electrodes exhibit enhanced electrocatalytic activities for chlorine evolution possibly due to the active surface areas, especially the outer active surface areas, which are attributed to the increase in mass transfers compared with a conventional nanograin electrode. The electrocatalytic activities for chlorine evolution were increased up to 20 % in the case of the nanorod electrode and 35% in the case of the nanosheet electrode compared with the nanograin electrode. The $RuO_2$ nanorod 80 nm in length and 20-30 nm in width and the $RuO_2$ nanosheet 40-60 nm in length and 40 nm in width are formed on the surface of Ti substrates. These results support that the templated $RuO_2$ nanorod and nanosheet electrodes are promising anode materials for chlorine evolution in future applications.

• 한국전기전자재료학회논문지
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• 제15권10호
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• pp.865-869
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• 2002

The structural and electrical properties of PZT (lead zirconate titante) thin films grown on Pt (platinum) and Ru/Ru $O_2$(ruthenium/ruthenium oxide) electrodes were investigated. Thin films of PZT were deposited on a variety of electrodes using the rf-magnetron sputtering process. PZT films exhibited polycrystalline structure with strong PZT (100) plane and weak (211) plane for an optimizied Pt electrode and (100), (101), (111), (200), (210), (211) planes for Ru/Ru $O_2$. Switching polarization versus fatigue characteristic of Pt/Ti electrodes showed 20% degradation up to 1 $\times$ 10$_{9}$ cycles. No significant fatigue was observed in the films on Ru/Ru $O_2$ electrodes up to Ix109 test cycles. The results show that the new Ru/Ru $O_2$ bottom electrodes are expected to reduce the degradation of ferroelectric fatigue.

• Corrosion Science and Technology
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• 제2권4호
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• pp.189-193
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• 2003

The Ru etching using $O_2/C_{12}$ plasmas has been studied by employing the helicon etcher. The changes of Ru etch rate, Ru to $SiO_2$ etch selectivity and Ru electrode etching slope with varied process variables were investigated. The Ru etching slope at the optimized etching condition was measured to be $84^{\circ}$. We reveal that the Ru etching using $O_2/C_{12}$ plasma generates the $RuO_2$ thin film. Possible mechanism of Ru etching is discussed.

• 한국전기전자재료학회논문지
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• 제23권1호
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• pp.65-69
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• 2010

In this study, we compared two methods(an acid treatment in strong acid reflux and a heat treatment in air atmosphere) for hydrophilic surface treatment of multi-walled carbon nanotubes(MWNT) to enhance the capcity of $RuO_2$/MWNT composite electrode materials for ultracapacitor. Both treatments generated a number of defects on the surface of MWNT by the breakage of $\pi$ bond in graphene layer at which carboxyl groups were introduced. However, the degree of hydrophilicity generated by strong acid treatment was higher than that by heat treatment in air, which was revealed by the quantitative measurement of surface carboxyl groups by using Boehm titration. The increased hydrophilicity save rise to an improved dispersity of $RuO_2$ nanoparticles on MWNT. Finally, the improved dispersity resulted in the capacity enhancement of composite electrode materials for ultracapacitor.

• 대한화학회지
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• 제62권4호
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• pp.269-274
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• 2018

금속산화물 고분자 복합재료전극 제조기법을 수소이온 감응성이 높은 $RuO_2$에 적용하여 표면연마가 가능한 나노 $RuO_2$ 복합재료 pH전극을 제조하였다. $RuO_2$ 함량 53 wt%을 가지는 나노 $RuO_2$ 복합재료 전극의 경우 나노 $IrO_2$ 복합재료 전극과 비슷한 수소이온 감응특성을 나타내었다. pH 1~9의 범위에서 이론치에 가까운 -58.7 mV/pH의 감응기울기, 1초 이하의 감응속도, 평균 $-57.0{\pm}0.3mV/pH$ (n=5)의 표면재생성, 장기 안정성 등 제반 특성과 전기화학적으로 활성이 높은 화학종에 의한 방해효과도 비슷하게 나타났다. 그러나 pH 10 이상의 염기성 용액에서의 감응기울기와 감응속도는 나노 $IrO_2$ 복합재료전극에 비하여 현저히 떨어지는 결과를 보였으며 이는 복합재료 매질 속의 금속산화물 함량에 따른 물리적 성질 차이에 따른 것으로 추측된다.

• 상하수도학회지
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• 제31권5호
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• pp.397-407
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• 2017

A dimensionally stable anode based on the $RuO_2$ electrocatalyst is an important electrode for generating chlorine. The $RuO_2$ is well-known as an electrode material with high electrocatalytic performance and stability. In this study, sonoelectrodeposition is proposed to synthesize the $RuO_2$ electrodes. The electrode obtained by this novel process shows better electrocatalytic properties and stability for generating chlorine compared to the conventional one. The high roughness and outer surface area of the $RuO_2$ electrode from a new fabrication process leads to increase in the chlorine generation rate. This enhanced performance is attributed to the accelerated mass transport rate of the chloride ions from electrolyte to electrode surface. In addition, the electrode with sonodeposition method showed higher stability than the conventional one, which might be explained by the mass coverage enhancement. The effect of sonodeposition time was also investigated, and the electrode with longer deposition time showed higher electrocatalytic performance and stability.

• 한국전기전자재료학회논문지
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• 제19권9호
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• pp.808-812
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• 2006

In this dissertation, Ru-Zr metal gate electrode deposited on two kinds of dielectric were formed for MOS capacitor. Sample co-sputtering method was used as a alloy deposition method. Various atomic composition was achieved when metal film was deposited by controlling sputtering power. To study the characteristics of metal gate electrode, C-V(capacitance-voltage) and I-V(current-voltage) measurements were performed. Work function and equivalent oxide thickness were extracted from C-V curves by using NCSU(North Carolina State University) quantum model. After the annealing at various temperature, thermal/chemical stability was verified by measuring the variation of effective oxide thickness and work function. This dissertation verified that Ru-Zr gate electrodes deposited on $SiO_{2}\;and\;ZrO_{2}$ have compatible work functions for NMOS at the specified atomic composition and this metal alloys are thermally stable. Ru-Zr metal gate electrode deposited on $SiO_{2}\;and\;ZrO_{2}$ exhibit low sheet resistance and this values were varied with temperature. Metal alloy deposited on two kinds of dielectric proposed in this dissertation will be used in company with high-k dielectric replacing polysilicon and will lead improvement of CMOS properties.