• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2013년도 추계학술대회 논문집
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• pp.611-612
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• 2013

• 마이크로전자및패키징학회지
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• 제12권3호
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• pp.187-196
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• 2005

MEMS에서 제조 공정 오차 및 외부 응력은 진동형 자이로스코프와 같은 MEMS 소자의 제조 수율에 많은 영향을 미친다. 특히 비연성 진동형 자이로스코프의 경우 감지모드와 구동모드의 주파수 차의 특성은 수율에 직접적인 영향을 미친다. SOI (Silicon-On-Insulator) 공정 및 양극접합 공정으로 패키징된 자이로스코프의 경우, 노칭현상으로 인하여 구조물이 불균일하게 가공되며, 동시에 열팽창계수 차로 인하여 접합된 기판에 큰 휨이 발생한다. 그 결과주파수 차의 분포가 커지고, 동시에 수율은 저하되었다. 이를 개선하기 위하여 SiOG (Silicon On Glass) 기술을 적용하였다. SiOG 공정에서는 접합 후에 기판의 휨을 최소화 하기 위하여 1장의 실리콘 기관과 2장의 유리 기판을 사용하였으며, 노칭을 방지하기 위하여 금속 박막을 사용하였다. 그 결과 노칭 현상이 방지되었으며, 기판의 휨도 감소하였다. 또한 주파수 차의 분포도 매우 균일하게 되었으며, 주파수 차의 편차 또한 개선이 되었다. 그 결과 높은 수율 및 보다 강건한 MEMS 자이로스코프를 개발할 수 있었다.

• 한국소음진동공학회논문집
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• 제24권2호
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• pp.117-122
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• 2014

A novel method to reduce the vibration of drum type washing machine is proposed. Recently, as the capacity of the drum-type washing machine gets expanded and its washing performance is improved, its market share is increasing in the whole world. But, the capacity of washing machine is limited because of door size and built-in washing machine size. The vibration of washing machine is caused by unbalanced cloths in high spining drum, and the displacement of tub is maximized at transient range about 3 Hz(180 rpm). Previous researches were concerned about steady-state vibration in spinning. In this study, concerned about transient vibration and the displacement of tub is decreased by using gyroscope system. Mutibody dynamic model of washing machine include gyroscope is designed and the vibration of tub have been reduced by 44.7 % over original.

• 한국정밀공학회지
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• 제13권5호
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• pp.30-37
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• 1996

The objective of this research is to explore the analysis and test method for the reliable design and fabrication of a high precision dynamically tuned gyroscope. The tuning frequency is decided by the calculation of mass moment of inertia of rotor and gimbal and the stiffness of flexures. Due to the complex geometry of the flexure, calculation of the stiffness of the suspension flexure is difficult. In this paper, three analytical methods for obtaining the stiffness of the flexure are porposed and a special testing method is used for checking the accuracy of the computed results.

• 대한기계학회논문집A
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• 제28권8호
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• pp.1065-1074
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• 2004

A robust optimal design considering fabrication influence has been performed for the decoupled vibratory microgyroscope fabricated by the bulk micromachining. For the analysis of the gyroscope, a design tool has been developed, by which user can perform the system level design considering electric signal process and the fabrication influence as well as mechanical characteristics. An initial design of the gyroscope is performed satisfying the performances of scale factor (or sensitivity) and phase delay, which depend on the frequency difference between driving and sensing resonant frequencies. The objective functions are formulated in order to reduce the variances of the frequency difference and the frequency in itself by fabrication error. To certify the results, the standard deviations are calculated through the Monte Caries Simulation (MCS) and compared initial deviation that is measured fabricated gyroscope chip.

• 한국정밀공학회지
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• 제18권1호
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• pp.89-97
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• 2001

A microgyroscope, which vibrates in two orthogonal axes on the substrate plane, is designed and fabricated. The shuttle mass of the vibrating gyroscope consists of two parts. The one is outer shuttle mass which vibrates in driving mode guided by four folded springs attached to anchors. And the other is inner shuttle mass which vibrates in driving mode as the outer frame does and also can vibrate in sensing mode guided by four folded springs attached to the outer shuttle mass. Due to the directions of vibrating mode, it is possible to fabricate the gyroscope with simplified process by using polysilicon on insulator structure. Fabrication processes of the microgyroscope are composed of anisotropic silicon etching by RIE, gas-phase etching (GPE) of the buried sacrificial oxide layer, metal electrode formation. An eletromechanical model of the vibrating microgyroscope was modeled and bandwidth characteristics of the gyroscope operates at DC 4V and AC 0.1V in a vacuum chamber of 100mtorr. The detection circuit consists of a discrete sense amplifier and a noise canceling circuit. Using the evaluated electromechanical model, an operating condition for high performance of the gyroscope is obtained.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 추계학술대회논문집
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• pp.159-162
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• 2007

뉴테이션(Nutation, 장동)은 자이로스코프와 같은 큰 축 대칭 물체의 회전축에 대해 작은 불규칙적인(어원적으로 "nodding") 운동이다. 위성체가 회전상태에 돌입하게 될 때 위성체가 순수한 회전 운동이 아닌 뉴테이션 운동을 일으킬 경우, 이를 제거하기 위하여 뉴테이션댐퍼(NutationDamper)를 사용한다. 유도탄에 들어가는 부품 중에서 자이로조립체 내에 들어 있는 뉴테이션댐퍼의 개발을 하고자 본 연구를 수행 하게 되었으며, 자이로조립체 내에서 뉴테이션댐퍼의 역할은 자이로조립체의 원주상에 환형 튜브 형상으로 장착되어 자이로조립체가 세차운동(Precession)을 할 때 부가적으로 수반되는 바람직하지 못한 떨림(Wobble motion)인 뉴테이션을 감쇠시키는 기능을 수행한다.

• 소음진동
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• 제5권3호
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• pp.403-411
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• 1995

Square beam type piezoelectric vibrating gyro is developed for the measurement of angular velocity, which is compact, small in size and mass- producible. It features that three pieces of piezoelectric ceramics and bonded onto one face of equilateral square bar type gyro head. Two of them are used as sentuators which drive the gyro head and measure Coriolis force. The third piece is used for the feedback signal in order to resonate the gyro head and measure Coriolis force. The third piece is used for the feedback signal in order to resonate the gyro head with its fundamental natural frequency. Matching two fundamental natural frequencies in the gyro head with its driving frequency is found critical in the design of vibration gyro. Calibration results show that the vibrating gyro developed has the dynamic characteristics of first-order system within the frequency range of interest, which can be easily compensated by a lead compensator.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1993년도 정기총회 및 추계학술대회 논문집 학회본부
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• pp.195-197
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• 1993

In this paper, a planar vibratory gyroscope is designed and fabricated in macro model. Elementary experiment and test are done for micro model. This gyroscope has a double gimbal structure with an active dimension $80{\times}120{\times}1\;mm^3$. Outer gimbal vibration is generated by electromagnetic force using ferrite E-core wounded by coil. Inner gimbal vibration is detected by inductive sensor. It is demonstrated' that mechanical and electrical symmetries are important for improvement of vibratory gyroscope.

• 대한기계학회논문집A
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• 제26권5호
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• pp.914-923
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• 2002

Recently, there has been considerable interest in micro gyroscopes made of silicon chips. It can be applied to many micro-electro-mechanical systems (MEMS): devices for stabilization, general rate control, directional pointing, autopilot systems, and missile control. This paper shows how the mechanical design of the gyroscope can be done using axiomatic design, followed by the application of the Taguchi robust design method to determine the dimensions of the parts so as to accommodate the dimensional variations introduced during manufacturing. Functional requirements are defined twofold. One is that the natural frequencies should have fixed values, and the other is that the system should be robust to large tolerances. According to the Independence Axiom, design parameters are classified into a few groups. Then, the detailed design process is performed fellowing the sequence indicated by the design matrix. The dimensions of the structure are determined to have constant values fur the difference of frequencies without consideration of the tolerances. It is noted that the Taguchi concept is utilized as a unit process of the entire axiomatic approach.