• Title/Summary/Keyword: 원소의 거동.

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내장형 선형 ICP(Inductively Coupled Plasma) system에서 자장이 플라즈마와 PR 식각특성에 미치는 영향

  • 김경남;이영준;경세진;염근영
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2003.05a
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    • pp.3-3
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    • 2003
  • 고밀도 플라즈마를 생산할 수 있는 대면적용 플라즈마 소스의 개발은 미세전자구조 산업에서부터 FPD 산업에 이르기까지 많은 영역에 걸쳐 필수 불가결한 기술요소가 되어가고 있 다. 이러한 대면적용 고밀도 플라즈마에의 적용을 위하여 새로운 유도결합형 플라즈마 소오스의 개발이 진행되고 있으며, 차세대 반도체 식각 및 세정 공정을 위하여 여러 형태의 안 테나가 연구되어지고 있다. 그러나 TFT -LCD에 적용이 가능하게끔 기존의 ICP 소오스를 직 접적으로 대면적화 하는 데에는 여러 가지 문제점들로 인해 그 한계점이 들어났다. 그 예로 안테나의 길이가 길어짐에 따른 안테나 저항 값이 커지며, 안테나 소스 길이자체가 사용하는 인가전력(13.56MHz)의 반파장에 해당되는 길이가 되었을 경우 생기는 심각한 정상파 효과, 유전물질의 두께 증가 및 그에 따른 재료비의 상승 및 관리상의 어려움들이 바로 그것 이라 할 수 있겠다. 그러므로, 본 연구에서는 차세대 TFT -LCD 대면적 공정에 적용 가능한 고밀도 플라즈마 를 발생시키기 위해서 내장형 유도결합형 선혈 안테나를 사용하였다. 내장형 유도결합형 선 혈 안테나가 가지고 있는 고유의 정전기적 결합효과를 최소화시키기 위해 직사각형모앙의 플라즈마 댐버(830mm*1,020mm)에서 영구자석을 사용하여 multi-cusp 자장효과 및 다양 한 자장의 배열에 따른 플라즈마 특성변화를 살펴보았다. 영구자석을 사용하여 외부자장을 인가하였을 때가, 그럴지 않은 때보다 RF 안테나 코일의 전압을 낮춰주었으며, 영구자석의 배열에 따라 코일의 인덕턴스의 값이 크게 변함을 알 수 있었다. 그리고 최적화된 자장의 배열은 플라즈마의 이온밀도를 증가시켰으며, 플라즈마의 균일도도 10% 이내로 유지됨을 알 수 있었다. 또한 영구자석에 의한 자장의 유무 및 공정압력과 인가전력에 따른 P Photoresist Film의 식각특성에 관해 살펴보았다.증을 위한 실험.측정장비의 구입 및 업계와의 공동활용, 국내.외 최신기술 정보자료의 수집과 신속제공, 국내.외 전문가 초청 활 용, 미래 지향적 목적활용 기초연구사업 수행, 미래기술 동향예측 및 홍보 등을 통해 서 국내 도금기술의 기술자립 및 고도화를 위한 여건마련을 위하여 노력하고 있다.빛 이때의 부식속도(선형분극법), 인위적인 피막 파괴 전,후 의 전위 변화 및 부식속도 측정법에 의한 국부부식 발달 저지능 등을 평가하여 각 실험결과를 비교분석하여 보았다. 수록 민감하여 304 의 IGSCC 와 매우 유사한 거동을 보인다. 본 강연에서는 304 와 600 의 고온 물에서 일어나는 IGSCC 민감도에 미치는 환경, 예민화처리, 합금원소의 영향을 고찰하고 이에 대한 최근의 연구 동향과 방식 방법을 다룬다.다.의 목적과 지식)보다 미학적 경험에 주는 영향이 큰 것으로 나타났으며, 모든 사람들에게 비슷한 미학적 경험을 발생시키는 것 이 밝혀졌다. 다시 말하면 모든 사람들은 그들의 문화적인 국적과 사회적 인 직업의 차이, 목적의 차이, 또한 환경의 의미의 차이에 상관없이 아름다 운 경관(High-beauty landscape)을 주거지나 나들이 장소로서 선호했으며, 아름답다고 평가했다. 반면에, 사람들이 갖고 있는 문화의 차이, 직업의 차 이, 목적의 차이, 그리고 환경의 의미의 차이에 따라 경관의 미학적 평가가 달라진 것으로 나타났다.corner$적 의도에 의한 경관구성의 일면을 확인할수 있지만 엄밀히 생각하여 보면 이러한 예의 경우도 최락의 총체적인 외형은 마찬가지로 $\ulcorner$순응$\lrcorner$의 범위를 벗어나지 않는다. 그렇기 때문에도 $\ulcorner$순응$\lrcorner$$\ulcorner$표현$\lrcorner$

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Fe-doped beta-tricalcium phosphate; crystal structure and biodegradable behavior with various heating temperature (Fe 이온 치환 beta-tricalcium phosphate의 하소 온도에 따른 미세구조 및 분해 특성)

  • Yoo, Kyung-Hyeon;Kim, Hyeonjin;Sun, Woo Gyeong;Yoon, Seog-Young
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.30 no.6
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    • pp.244-250
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    • 2020
  • β-Tricalcium phosphate (β-TCP, Ca3(PO4)2) is a kind of biodegradable calcium phosphate ceramics with chemical and mineral compositions similar to those of bone. It is a potential candidate for bone repair surgery. To improve the bioactivity and osteoinductivity of β-TCP, various ions doped calcium phosphate have been studied. Among them, Iron is a trace element and its deficiency in the human body causes various problems. In this study, we investigated the effect of Fe ions on the structural variation, degradation behavior of β-TCP. Fe-doped β-TCP powders were synthesized by the coprecipitation method, and the heat treatment temperature was set at 925 and 1100℃. The structural analysis was carried out by Rietveld refinement using the X-ray diffraction results. Fe ions existed in a different state (Fe2+ or Fe3+) with different heat treatment temperatures, and the substitution sites (Ca-(4) and Ca-(5)) also changed with temperature. The degradation rate was fastest at Fe-doped β-TCP with heated at 1100℃. The cell viability behavior was also enhanced with the substitution of Fe ions. Therefore, the substitution of Fe ion has accelerated the degradation of β-TCP and improved the biocompatibility. It could be more utilized in biomedical devices.

Effect of Re and Ru Addition on the Solidification and Solute Redistribution Behaviors of Ni-Base Superalloys (니켈계 초내열합금의 응고 및 용질원소의 편석 거동에 미치는 레늄 및 루테늄 첨가의 영향)

  • Seo, Seong-Moon;Jeong, Hi-Won;Lee, Je-Hyun;Yoo, Young-Soo;Jo, Chang-Yong
    • Korean Journal of Metals and Materials
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    • v.49 no.11
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    • pp.882-892
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    • 2011
  • The influence of rhenium (Re) and ruthenium (Ru) addition on the solidification and solute redistribution behaviors in advanced experimental Ni-base superalloys has been investigated. A series of model alloys with different levels of Re and Ru were designed based on the composition of Ni-6Al-8Ta and were prepared by vacuum arc melting of pure metallic elements. In order to identify the influence of Re and Ru addition on the thermo-physical properties, differential scanning calorimetry analyses were carried out. The results showed that Re addition marginally increases the liquidus temperature of the alloy. However, the ${\gamma}^{\prime}$ solvus was significantly increased at a rate of $8.2^{\circ}C/wt.%$ by the addition of Re. Ru addition, on the other hand, displayed a much weaker effect on the thermo-physical properties or even no effect at all. The microsegregation behavior of solute elements was also quantitatively estimated by an electron probe microanalysis on a sample quenched during directional solidification of primary ${\gamma}$ with the planar solid/liquid interface. It was found that increasing the Re content gradually increases the microsegregation tendency of Re into the dendritic core and ${\gamma}^{\prime}$ forming elements, such as Al and Ta, into the interdendritic area. The strongest effect of Ru addition was found to be Re segregation. Increasing the Ru content up to 6 wt.% significantly alleviated the microsegregation of Re, which resulted in a decrease of Re accumulation in the dendritic core. The influence of Ru on the microstructural stability toward the topologically close-packed phase formation was discussed based on Scheil type calculations with experimentally determined microsegregation results.

Interpretation of Firing Temperature and Material Similarity for Potteries from Ancient Tombs in Songpa Area, Seoul (서울 송파 지역 고분 출토 토기의 재료학적 동질성 및 소성온도 해석)

  • Lee, Gyu Hye;Yun, Jung Hyun;Lee, Chan Hee
    • Conservation Science in Museum
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    • v.28
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    • pp.17-34
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    • 2022
  • This study seeks to identify the material characteristics of earthenware excavated from the Bangi-dong Ancient Tomb No. 3 and the articulated stone-mound tomb of the Seokchon-dong ancient tombs in the Songpa region, and analyze the homogeneity and the firing temperature of the materials used at each excavated site. The remains have been studied relatively recently, and the groups of tombs in which they were found demonstrate the transition of ancient Korean burial systems, and at the same time, provide important archaeological data about those in power at the time. The earthenware pottery excavated from the two sites examined in the study were buried at different times, and it is assumed that they were made by procuring weathered soil of similar gneiss, judging from the behavior of the compatible and incompatible elements and the weathering tendency found by examining the main components. In addition, the examination of the mineral composition and microstructure of clay indicates that the earthenware from Seokchon-dong was fired at 950 degrees Celsius or lower at a relatively early stage. On the other hand, the earthenware from Bangi-dong Tomb No. 3 was confirmed to have experienced temperatures below 850 degrees Celsius and above 1,000 degrees Celsius. However, it is difficult to interpret the difference as the result of the changes in firing temperature throughout the eras. It is expected that it will be possible to interpret the changes in earthenware manufacturing techniques by comparing more diverse earthenware potteries and ancient soils.

Effect of Post Solidification Cooling Condition on the Mechanical Behavior of the 0.36Mn Containing Ductile Iron (0.36Mn이 함유된 구상흑연주철의 냉각조건에 따른 기계적 거동 고찰)

  • Kim, Suck-Dong;Kim, Sung-Gyoo
    • Journal of Korea Foundry Society
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    • v.41 no.4
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    • pp.349-356
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    • 2021
  • Effects of cooling condition after solidification on the microstructure and the mechanical properties of 0.36Mn containing ductile cast iron have been studied based on the minimized addition of Cu and Sn for vehicle component applications with better quality and cost competitiveness. Cu and Sn were selected for additional elements judging from the well-known fact of strong tendency of pearlite promotion followed by the tensile property improvement. After pouring of the Mg treated cast iron melt with various chemical compositions into the block specimens, two ways of post solidification cooling conditions were applied for comparison; both cooling in the mold and cooling in the air after dismantle at 800℃. The pearlite fraction of the mold-cooled specimens was analyzed as 27-44%, with the tensile strength and elongation of 513-568N/mm2 and 10.4-14.3%, respectively. Whilest, the air cooled specimens showed the pearlite fraction of 77~85%, with the tensile strength and elongation of 728~758N/mm2 and 3.2~6.0%, respectively. It is worthwhile to note that the remarkable improvement of both tensile strength and elongation of the ductile iron was achieved by the present air cooling condition with the minimized combined addition of Cu and Sn to the 0.36Mn containing ductile iron.

Stabilization/Solidification of Radioactive LiCl-KCl Waste Salt by Using SiO2-Al2O3-P2O5 (SAP) inorganic composite: Part 1. Dechlorination Behavior of LiCl-KCl and Characteristics of Consolidation (SiO2-Al2O3-P2O5 무기복합체를 이용한 LiCl-KCl 방사성 폐기물의 안정화/고형화: Part 1. LiCl-KCl의 탈염화 반응거동 및 고형화특성)

  • Cho, In-Hak;Park, Hwan-Seo;Ahn, Soo-Na;Kim, In-Tae;Cho, Yong-Zun
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.10 no.1
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    • pp.45-53
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    • 2012
  • The metal chloride wastes from a pyrochemical process to recover uranium and transuranic elements has been considered as a problematic waste difficult to apply to a conventional solidification method due to the high volatility and low compatibility with silicate glass. In this study, a dechlorination approach to treat LiCl-KCl waste for final disposal was adapted. In this study, a $SiO_2-Al_2O_3-P_2O_5$ (SAP) inorganic composite as a dechlorination agent was prepared by a conventional sol-gel process. By using a series of SAPs, the dechlorination behavior and consolidation of reaction products were investigated. Different from LiCl waste, the dechlorination reaction occurred mainly at two temperature ranges. The thermogravimetric test indicated that the first reaction range was about $400^{\circ}C$ for LiCl and the second was about $700^{\circ}C$ for KCl. The SAP 1071 (Si/Al/P=1/0.75/1 in molar) was found to be the most favorable SAP as a dechlorination agent under given conditions. The consolidation test revealed that the bulk shape and the densification of consolidated forms depended on the SAP/Salt ratios. The leaching test by PCT-A method was performed to evaluate the durability of consolidated forms. This study provided the basic information on the dechlorination approach. Based on the experimental results, the dechlorination method using a $SiO_2-Al_2O_3-P_2O_5$ (SAP) could be considered as one of alternatives for the immobilization of waste salt.

Characterization on the Behavior of Heavy Metals and Arsenic in the Weathered Tailings of Songcheon Mine (송천광산의 풍화광미 내 중금속 및 비소 거동 특성)

  • Lee, Woo-Chun;Kim, Young-Ho;Cho, Hyen-Goo;Kim, Soon-Oh
    • Journal of the Mineralogical Society of Korea
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    • v.23 no.2
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    • pp.125-139
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    • 2010
  • Behavior of heavy metals and arsenic in the tailings of Songcheon Au-Ag mine was characterized via both mineralogical and geochemical methods. Mineral composition of the tailings was investigated by X-ray diffractometry, energy-dispersive spectroscopy, and electron probe micro-analyzer (EPMA) and total concentrations of heavy metals and arsenic and their chemical forms were analyzed by total digestion of aqua regia and sequential extraction method, respectively. The results of mineralogical study indicate that the tailings included mineral particles of resinous shape mainly consisting of galena, sphalerite, pyrite, quartz, and scorodite, and specifically socordite was identified in the form of matrix. EPMA quantitative analyses were performed to evaluate the weatherability of each mineral, and the results suggest that it decreased in the sequence of arsenopyrite > galena > sphalerite > pyrite. The weathering pattern of galena was observed to show distinctive zonal structure consisting of secondary minerals such as anglesite and beudantite. In addition, almost all of arsenopyrite has been altered to scorodite existing asmatrix and galena, sphalerite, and pyrite which have lower weatherability than arsenopyrite were identified within the matrix of scorodite. During the process of alteration of arsenopyrite into scorodite, it is likely that a portion of arsenic was lixiviated and caused a great deal of detrimental effects to surrounding environment. The results of EPMA quantitative analyses verify that the stability of scorodite was relatively high and this stable scorodite has restrained the weathering of other primary minerals within tailings as a result of its coating of mineral surfaces. For this reason, Songcheon tailings show the characteristics of the first weathering stage, although they have been exposed to the surface environment for a long time. Based on the overall results of mineralogical and geochemical studies undertaken in this research, if the tailings are kept to be exposed to the surface environment and the weathering process is continuous, not only hazardous heavy metals, such as lead and arsenic seem to be significantly leached out because their larger portions are being partitioned in weakly-bound (highly-mobile) fractions, but the potential of arsenic leaching is likely to be high as the stability of scorodite is gradually decreased. Consequently, it is speculated that the environmental hazard of Songcheon mine is significantly high.

Shielding Design Optimization of the HANARO Cold Neutron Triple-Axis Spectrometer and Radiation Dose Measurement (냉중성자 삼축분광장치의 차폐능 최적화 설계 및 선량 측정)

  • Ryu, Ji Myung;Hong, Kwang Pyo;Park, J.M. Sungil;Choi, Young Hyeon;Lee, Kye Hong
    • Journal of Radiation Protection and Research
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    • v.39 no.1
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    • pp.21-29
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    • 2014
  • A new cold neutron triple-axis spectrometer (Cold-TAS) was recently constructed at the 30 MWth research reactor, HANARO. The spectrometer, which is composed of neutron optical components and radiation shield, required a redesign of the segmented monochromator shield due to the lack of adequate support of its weight. To shed some weight, lowering the height of the segmented shield was suggested while adding more radiation shield to the top cover of the monochromator chamber. To investigate the radiological effect of such change, we performed MCNPX simulations of a few different configurations of the Cold-TAS monochromator shield and obtained neutron and photon intensities at 5 reference points just outside the shield. Reducing the 35% of the height of the segmented shield and locating lead 10 cm from the bottom of the top cover made of polyethylene was shown to perform just as well as the original configuration as radiation shield excepting gamma flux at two points. Using gamma map by MCNPX, it was checked that is distribution of gamma. Increased flux had direction to the top and it had longer distance from top of segmented shield. However, because of reducing the 35% of the height, height of dissipated gamma was lower than original geometry. Reducing the 35% of the height of the segmented shield and locating lead 10cm from the bottom of the top cover was selected. After changing geometry, radiation dose was measured by TLD for confirming tester's safety at any condition. Neutron(0.21 ${\mu}Svhr^{-1}$) and gamma(3.69 ${\mu}Svhr^{-1}$) radiation dose were satisfied standard(6.25 ${\mu}Svhr^{-1}$).

Occurrence Characteristics and Existing Forms of U-Th Containing Minerals in KAERI Underground Research Tunnel(KURT) Granite (한국원자력연구원 지하처분연구시설(KURT) 화강암의 U-Th 함유광물 산출특성 및 존재형태)

  • Cho, Wan Hyoung;Baik, Min Hoon;Park, Tae-Jin
    • Economic and Environmental Geology
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    • v.50 no.2
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    • pp.117-128
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    • 2017
  • Occurrence characteristics and existing forms of U-Th containing minerals in KURT (KAERI Underground Research Tunnel) granite are investigated to understand long-term behavior of radionuclides in granite considered as a candidate rock for the geological disposal of high-level radioactive waste. KURT granite primarily consists of quartz, feldspar and mica. zircon, REE(Rare Earth Element)-containing monazite and bastnaesite are also identified. Besides, secondary minerals such as sericite, microcline and chlorite including quartz vein and calcite vein are observed. These minerals are presumed to be accompanied by a post-hydrothermal process. U-Th containing minerals are mainly observed at the boundaries of quartz, feldspar and mica, mostly less than $30{\mu}m$ in size. Quantitative analysis results using EPMA (Electron Probe Micro-Analyzer) show that 74.2 ~ 96.5% of the U-Th containing minerals consist of $UO_2$ (3.39 ~ 33.19 wt.%), $ThO_2$ (41.61 ~ 50.24 wt.%) and $SiO_2$ (15.43 ~ 18.60 wt.%). Chemical structure of the minerals calculated using EPMA quantitative analysis shows that the U-Th minerals are silicate minerals determined as thorite and uranothorite. The U-Th containing silicate minerals are formed by a magmatic and hydrothermal process. Therefore, KURT granite formed by a magmatic differentiation is accompanied by an alteration and replacement owing to a hydrothermal process. U-Th containing silicate minerals in KURT granite are estimated to be recrystallized by geochemical factors and parameters such as temperature, pressure and pH owing to the hydrothermal process. By repeated dissolution/precipitation during the recrystallization process, U-Th containing silicate minerals such as thorite and uranothorite are formed according to the variation in the concentrated amount of U and Th.

Interpretation on Making Techniques of Some Ancient Ceramic Artifacts from Midwestern Korean Peninsula: Preliminary Study (한반도 중서부 출토 일부 고대 세라믹 유물의 제작기술 해석: 예비 연구)

  • Lee, Chan Hee;Jin, Hong Ju;Choi, Ji Soo;Na, Geon Ju
    • Journal of Conservation Science
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    • v.32 no.2
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    • pp.273-291
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    • 2016
  • Some ceramic artifacts representing time-wise from comb pattern pottery in the Neolithic Age to white porcelain in Joseon Dynasty were selected from 7 sites in the north and south area of Charyeong Mountain Range in order to making techniques interpretation and development process of ancient ceramics through physicochemical and mineralogical quantitative analysis. Studied pottery samples in the Prehistoric times showed trace of ring piling in soft-type, and pottery in the Three Kingdoms Period had both soft and hard-type but kettle-ware and storage-ware were made with ring piling, but table-ware was made by wheel spinning. Different from pottery after the Three Kingdom Period when refinement of source clay was high, pottery in the Neolithic Age and in the Bronze Age exhibited highly mineral content in sandy source clay, which showed a lot of larger temper than source clay. Groundmass of celadon and white porcelain almost did not reveal primary minerals but had high content of minerals by high temperature firing. Ceramic samples showed some different in major and minor elements according to sites irrespective of times. Geochemical behaviors are very similar indicating similar basic characteristics of source clay. However, loss-on-ignition showed 0.01 to 12.59wt.% range with a large deviation but it rapidly decreased moving from the Prehistoric times to the Three Kingdom Period. They have correlation with the weight loss due to firings, according to burning degree of source clay and detection of high temperature minerals, estimated firing temperatures are classified into 5 groups. Pottery in the Neolithic Age and in the Bronze Age belongs from 750 to $850^{\circ}C$ group; pottery in the Three Kingdom Period are variously found in 750 to $1,100^{\circ}C$ range of firing temperature; and it is believed celadon and white porcelain were baked in high temperature of 1,150 to $1,250^{\circ}C$. It seems difference between refinement of source clay and firing temperature based on production times resulted from change in raw material supply and firing method pursuant to development of production skill. However, there was difference in production methods even at the same period and it is thought that they were utilized according to use purpose and needs instead of evolved development simply to one direction.