• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.557-557
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• 2007

최근 Ruthenium (Ru)은 높은 화학적 안정성, 누설전류에 대한 높은 저항성, 저유전체와의 높은 안정성 등과 같은 특성으로 인해 캐패시터의 하부전극으로 각광받고 있다. 이렇게 형성된 Ru 하부전극은 각 캐패시터간의 분리와 평탄화를 위해 CMP 공정이 도입되게 되었다. 이러한 CMP 공정후에는 화학적 또는 물리적 상호작용에 의해 웨이퍼 표면에 오염물이 발생할 수 있다. CMP 공정중에 공급되는 슬러리에는 부식액, pH 적정제, 연마입자등이 첨가되는데 이때 사용된 연마입자는 CMP 공정후 입자오염을 유발할 수 있다. 그러므로, CMP 공정후에는 이러한 오염으로 인해 cleaning 공정이 반드시 필요하게 되었다. 하지만, Post Ru CMP cleaning에 대한 연구는 아직 미비한 상태이다. 그리하여 본 연구에서는 post Ru CMP cleaning에 대한 연구와 cleaning solution 그리고 첨가제에 따른 영향을 살펴보았다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.90-93
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• 2000

In this study, the rise throughput and the stability in fabrication of device can be obtained by applying of CMP process to STI structure in 0.18um semiconductor device. To employ in STI CMP, the reverse moat process has been added thus the process became complex and the defects were seriously increased. Removal rates of each thin films in STI CMP was not equal hence the devices must to be effected, that is, the damage was occured in the device dimension in the case of excessive CMP process and the nitride film was remained on the device dimension in the case of insufficient CMP process than these defects affect the device characteristics. To resolve these problems, the development of slurry for CMP with high removal rate and high selectivity between each thin films was studied then it can be prevent the reasons of many defects by reasons of many defects by simplification of process that directly apply CMP process to STI structure without the reverse moat pattern process.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.239-242
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• 2004

We investigated the nanotopography impact on the post-chemical mechanical polishing (post-CMP) oxide thickness deviation(OTD) of ceria slurry with a surfactant. Not only the surfactant but also the slurry abrasive size influenced the nanotopography impact. The magnitude of the post-CMP OTD increased with adding the surfactant in the case of smaller abrasives, but it did not increase in the case of larger abrasives, while the magnitudes of the nanotopography heights are all similar. We created a one-dimensional numercal simulation of the nanotopography impact by taking account of the non-Prestonian behavior of the slurry, and good agreement with experiment results was obtained.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.571-572
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• 2006

Tungsten CMP needs interconnect of semiconductor device ULSI chip and metal plug formation, CMP technology is essential indispensable method for local planarization. This Slurry development also for tungsten CMP is important, slurry of metal wiring material that is used present is depending real condition abroad. It is target that this research makes slurry of efficiency that overmatch slurry that is such than existing because focus and use colloidal silica by abrasive particle to internal production technology development. Compared selectivity of slurry that is developed with competitor slurry using 8" tungsten wafer and 8" oxide wafer in this experiment. And removal rate measures about density change of $H_2O_2$ and Fe particle. Also, corrosion potential and current density measure about Fe ion and Fe particle. As a result, selectivity find 83:1, and expressed similar removal rate and corrosion potential and current density value comparing with competitor slurry.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.573-574
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• 2006

The planarization technology of Chemical-mechanical polishing(CMP), used for the manufacturing of multi-layer various material interconnects for Large-scale Integrated Circuits (LSI), is also readily adaptable as an enabling technology in MicroElectroMechanical System (MEMS) fabrication, particularly polysilicon surface micromachining. However, general LSI device CMP has partly distinction aspects, the pattern scale and material sorts in comparison with MEMS CMP. This study performed preliminary CMP tests to identify slurry characteristic used in general IC device. The experiment result is possible to verify slurry characteristic in MEMS structure material.

• Journal of the Korea Concrete Institute
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• v.21 no.1
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• pp.3-11
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• 2009

The increased demand and consumption of coal has intensified problems associated with disposal of solid waste generated in utilization of coal. Major utilization of coal by-products has been in construction-related applications. Since fly ash accounts for the part of the production of utility waste, the majority of scientific investigations have focused on its utilization in a multitude of use, while little attention has been directed to the use of bottom ash. As a consequence of this neglect, a large amount of bottom ash has been stockpiled. However, the need to obtain safe and economical solution for its proper utilization has been more urgent. The study presented herein is designed to ascertain the performance characteristics of bottom ash, as autoclaved lightweight foamed concrete product. The laboratory test results indicated that tobermorite was generated when bottom ash was used as materials for hydro-thermal reaction. According to the analysis of variance, at the fresh state, water ratio affects on flow and slurry density of autoclaved lightweight foamed concrete, but foam ratio influences on slurry density, while, at the hardened state, foam ratio affects on the density of dry and the compressive strength but doesn't affect on flexural and tensile strength. In the results of response surface analysis, to obtain target performance, the most suitable mix condition for lightweight foamed concrete using bottom ash was water ratio of 70$\sim$80% and foaming ratio of 90$\sim$100%.

• Journal of the Korean Wood Science and Technology
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• v.38 no.3
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• pp.165-169
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• 2010

The cityward tendency of the population caused the building crowd and the skyscrapers, and destroyed the cityscape and ecosystem of the city. For this reason, many researchers studied to make more green spaces in the city. The roof greening is one of the methods to get the green spaces in the city. There are some problems in this method such as the safety load, growth of the plants on the artificial foundation, and so on. In this study, we evaluated the waste woodchips and the waste papers as a new materials for the artificial foundation. The new artificial foundation was made of the waste woodchips and the waste papers with the different ratio of mixture (woodchips, paper slurry, and fertilizer). The artificial foundation was applied to the planting of three different plants (creeping bentgrass, barley, and wheat). It was found that the growth of the plants with 1% of fertilizer was higher than other conditions. The best making condition of foundation was 40% pulp and 60% woodchips in the germination of all plants.

• Journal of the Korean Electrochemical Society
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• v.3 no.3
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• pp.136-140
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• 2000

A stainless steel separator for a molten carbonate fuel cell is usually coated with aluminum diffusive layer to protect its surface against corrosion by the molten carbonate at high temperatures. In this study, a relatively simple method was devised to form the aluminum diffusive layer on a stainless steel substrate. Slurry coating of aluminum on the substrate followed by heat treatment under reducing atmosphere at $650\~800^{\circ}C$ produced the aluminum diffusive layer of $25\~80{\mu}m$ thickness. The thickness of aluminum diffusive layer increased with increasing the temperature or duration of the heat-treatment. The corrosion resistance against molten carbonate under oxidizing atmosphere was significantly improved by aluminum diffusive layer formed by the sluny painting and heat treatment method. Moreover, the sample prepared in this study showed corrosion behavior similar to the sample with aluminum diffusive layer prepared by ion vapor deposition and heat treatment.

• Magazine of the Korea Concrete Institute
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• v.9 no.4
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• pp.125-135
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• 1997

경량기포콘크리트란 시멘트슬러리 속에 미리 생성된 기포를 혼합시켜 양생시킴으써 동일한 체적의 보통콘크리트보다 가볍게 만든 콘크리트를 의미한다. 따라서 경량기포콘크리트는시멘트풀 결합재내에 기포가 무작위로 분포된 복합재료이다. 본 연구의 목적은 이러한경량기포콘크리트의 탄성계수 추정식을 미시역학적 이론을 바탕으로 추정하는데 있다. 이르 위해 본 논문에서는 미시역학적인 미분법에 Hansen의 수정기법을 적용한 수정미분법을 사용하여 경량기포콘크리트의 탄성계수 추정식을 제안하였다. 제안된 추정식을 사용하여 얻어진 결과는 실험결과와 잘 일치하였고 기존의 어떤 추정식보다도 우수한 결과를 보였다.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.3 s.234
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• pp.425-431
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• 2005

The efficiency of complex slurry preparation route for developing the high performance SiC matrix of $RS-SiC_{f}/SiC$ composites has been investigated. The green bodies for RS-SiC materials prior to the infiltration of molten silicon were prepared with various C/SiC complex slurries, which associated with both the sizes of starting SiC particles and the blending conditions of starting SiC and C particles. The characterization of Rs-SiC materials was examined by means of SEM, EDS and three point bending test. Based on the mechanical property-microstructure correlation, the process optimization is also discussed. The flexural strength of Rs-SiC materials greatly depended on the content of residual Si. The decrease of starting SiC particle size in the C/SiC complex slurry was effective for improving the flexural strength of RS-SiC materials.