• Title/Summary/Keyword: 보정입자

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Deduction of Aerosol Composition and Absorption factors using AERONET sun/sky radiometer (AERONET 선포토미터 데이터를 이용한 에어로졸 조성 및 광흡수 특성 인자 도출)

  • Noh, Youngmin;Lee, Chulkyu;Choi, Sungchul
    • Korean Journal of Remote Sensing
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    • v.29 no.4
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    • pp.407-413
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    • 2013
  • The Modified Aerosol Factor (MAF) derived from spectral Single-Scattering Albedo (SSA) values was created to express the light absorption properties according to aerosol types. As a factor of the MAF, slope of a linear regression line for SSA at four wavelengths shows positive value for dust aerosol, while negative values were found for mixing with other types of aerosol. The negative values were shown by anthropogenic and smoke aerosols. The modified SSA at 1020 nm was also calculated. MAF was calculated by summing the slope and modified SSA. MAF was -1.0 for the anthropogenic and smoke aerosol and 1.5 for the dust particles. Those values were decreased by increasing light absorption property.

An ASIC Design for Photon Pulse Counting Particle Detection (광계수방식 물리입자 검출용 ASIC 설계)

  • Jung, Jun-Mo;Soh, Myung-Jin;Kim, Hyo-Sook;Han, AReum;Soh, Seul-Yi
    • Journal of IKEEE
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    • v.23 no.3
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    • pp.947-953
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    • 2019
  • The purpose of this paper is to explore an ASIC design for estimating sizes and concentrations of airborne micro-particles by the means of integrating, amplifying and digitizing electric charge signals generated by photo-sensors as it receives scattered photons by the presence of micro-particles, consisting of a pre-amplifier that detects and amplifies voltage or current signal from photo-sensor that generates charges (hole-electron pairs) when exposed to visible rays, infrared rays, ultraviolet rays, etc. according to the intensity of rays; a shaper for shaping the amplified signal to a semi-gaussian waveform; two discriminators and binary counters for outputting digital signals by comparing the magnitude of the shaped signal with an arbitrary reference voltages. The ASIC with the proposed architecture and functional blocks in this study was designed with a 0.18um standard CMOS technology from Global Foundries and the operation and performances of the ASIC has been verified by the silicons fabricated by using the process.

Estimation of Settling Efficiency in Sedimentation Basin Using Particle Tracking Method (입자추적기법을 이용한 침전지의 효율 평가)

  • Lee, Kil-Seong;Kim, Sang-Hoon
    • Journal of Korea Water Resources Association
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    • v.37 no.4
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    • pp.293-304
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    • 2004
  • Sedimentation basin plays an important role in urban water treatment, and there are many complicated phenomena which need to be understood for efficient design and control of it. Especially, the study on the improvement of settling efficiency is required. In this study, commercial CFD (Computational Fluid Dynamics) program, FLUENT, and particle tracking method were used to simulate the flow in sedimentation basin, and to predict the settling efficiency. Computational domain of real scale was made, and detail factors such as porous wall, and outlet trough were considered instead of being simplified. The simulation results were compared with the experimental data to calibrate the parameters of particle tracking method. Sensitivity analysis showed that the particle diameter had more significant effects on settling efficiency than the particle density. The computation results gave the best agreements with the experimental data, when the value of particle diameter was 26.5 ${\mu}{\textrm}{m}$.

Analysis of Effect on Camera Distortion for Measuring Velocity Using Surface Image Velocimeter (표면영상유속측정법을 이용한 유속 측정 시 카메라 왜곡 영향 분석)

  • Lee, Jun Hyeong;Yoon, Byung Man;Kim, Seo Jun
    • Ecology and Resilient Infrastructure
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    • v.8 no.1
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    • pp.1-8
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    • 2021
  • A surface image velocimeter (SIV) measures the velocity of a particle group by calculating the intensity distribution of the particle group in two consecutive images of the water surface using a cross-correlation method. Therefore, to increase the accuracy of the flow velocity calculated by a SIV, it is important to accurately calculate the displacement of the particle group in the images. In other words, the change in the physical distance of the particle group in the two images to be analyzed must be accurately calculated. In the image of an actual river taken using a camera, camera lens distortion inevitably occurs, which affects the displacement calculation in the image. In this study, we analyzed the effect of camera lens distortion on the displacement calculation using a dense and uniformly spaced grid board. The results showed that the camera lens distortion gradually increased in the radial direction from the center of the image. The displacement calculation error reached 8.10% at the outer edge of the image and was within 5% at the center of the image. In the future, camera lens distortion correction can be applied to improve the accuracy of river surface flow rate measurements.

Calculation of Multiple Scattering in Water Cloud and Application in Remote Measurement of Cloud Physical Properties (구름에서의 다중산란효과 계산 및 이를 이용한 구름 물리변수 원격 추출 방법 연구)

  • Kim, Dukhyeon;Park, Sunho;Choi, Sungcheol
    • Korean Journal of Optics and Photonics
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    • v.25 no.1
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    • pp.1-7
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    • 2014
  • Multiple scattering effects in cloud are important error sources of the Mie scattering Lidar inversion method, which should be measured to correct the Lidar equation in single wavelength Mie Lidar. We have calculated the multiple scattering effects in liquid water clouds by using a Monte Carlo method, and we have applied these multiple scattering effects in measuring water cloud effective size and LWC (Liquid Water Content). When cloud effective size is less than $2.5{\mu}m$, we can easily extract cloud effective size and LWC by using two wavelength Lidar such as extinction coefficients measured at 355nm and 1064nm. For a larger size cloud, we can find that saturated degree of linear polarization is strongly correlated with cloud effective size, LWC, and extinction coefficients. From these correlations we know that we can measure LWC and cloud effective size if we use single wavelength Rotational Raman Lidar and Mie scattering polarization Lidar.

A Study on the Calibration Method for Dynamic Shock Sensor Using Hopkinson Pressure Bar System (홉킨슨 압력봉(Hopkinson pressure bar)을 이용한 동적 충격센서 보정기술 연구)

  • Oh, Se-Wook;Min, Gyeong-Jo;Cho, Sang-Ho
    • Explosives and Blasting
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    • v.38 no.1
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    • pp.23-29
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    • 2020
  • The measurement technique with dynamic shock sensor was widely used in academic experiment for blasting and impact. However, most of dynamic sensors are expensive so that it needs to be protected by external housing structures or damping devices. In this study, the calibration method for dynamic shock sensor under the distortion by external structures. Hopkinson pressure bar system was adopted to measure the input acceleration to the sensor, and it was compared to the acceleration measured by accelerometer with customized damping device. Consequently, it is conclued that this method can be useful to calibrate the dynamic shock sensor under the linear distortion.

Evaluation of Multi-objective PSO Algorithm for SWAT Auto-Calibration (다목적 PSO 알고리즘을 활용한 SWAT의 자동보정 적용성 평가)

  • Jang, Won Jin;Lee, Yong Gwan;Kim, Se Hoon;Kim, Yong Won;Kim, Seong Joon
    • Proceedings of the Korea Water Resources Association Conference
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    • 2018.05a
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    • pp.113-113
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    • 2018
  • 본 연구는 다목적 입자군집최적화(Particle Swarm Optimization, PSO) 알고리즘을 SWAT(Soil and Water Assessment Tool) 모형에 적용하여 자동보정 알고리즘의 적용 가능성을 평가하고자 한다. PSO 알고리즘은 Python을 활용해 다목적 함수를 고려할 수 있도록 새롭게 개발되었다. SWAT 모형의 유출 해석은 안성천의 공도 수위 관측소 상류유역($366.5km^2$)을 대상으로 하였으며, 공도 지점의 2000년부터 2017년까지의 일 유량 자료를 이용하여 검보정하였다. 모형을 위한 기상자료는 공도유역 주변 3개 기상관측소(수원, 천안, 이천)의 일별 강수량, 최고 및 최저기온, 평균 풍속, 상대습도 및 일사량을 구축하였다. SWAT 모형의 유출 해석은 결정계수(Coefficient of determination, $R^2$), RMSE(Root mean square error), Nash-Sutcliffe 모형효율계수(NSE) 및 IOA(index of agreement) 등을 활용하여, 기존 연구 결과와 PSO 알고리즘을 활용한 결과를 비교 분석하고자 한다. 본 연구에서 개발한 다목적 PSO 알고리즘을 활용한 SWAT모형의 유출 해석은 보다 높은 정확도를 얻을 수 있을 것으로 예상되며, Python으로 개발되어 SWAT모형 이외에도 널리 적용될 수 있을 것으로 판단된다.

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Particle Deposition Characteristics with Electrostatic Effect on Semiconductor Wafers (정전효과를 고려한 반도체 웨이퍼의 입자침착 특성)

  • Lee, Kun-Hyung;Chae, Seung-Ki;Moon, Young-June
    • Proceedings of the SAREK Conference
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    • 2006.06a
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    • pp.779-785
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    • 2006
  • Particle transport and deposition characteristics on semiconductor wafers inside the chamber were experimentally investigated via a particle generation & deposition system and a wafer surface scanner. Especially the relation between particle size($0.083{\sim}0.495{\mu}m$) and particle deposition velocity with ESA(Electrostatic Attraction) effect was studied. Spot deposition technique with the deposition system using nozzle type outlets of the chamber was newly conducted to derive particle deposition velocity and all experiment results were compared with the previous study and were in a good agreement as well.

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Characterization of Asian dust using steric mode of sedimentation field-flow fractionation (Sd/StFFF) (Steric 모드의 침강장-흐름 분획법을 이용한 황사의 특성분석)

  • Eum, Chul Hun;Kim, Bon Kyung;Kang, Dong Young;Lee, Seungho
    • Analytical Science and Technology
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    • v.25 no.6
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    • pp.476-482
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    • 2012
  • Asian dust particles are known to have sizes ranging from a few nanometers up to about a few micrometers. The environmental and health effects depend on the size of the dust particles. The smaller, the farther they are transported, and the deeper they penetrate into the human respiratory system. Sedimentation field-flow fractionation (SdFFF) provides separation of nano to microparticles using a combination of centrifugal force and parabolic laminar flow in a channel. In this study, the steric mode of SdFFF (Sd/StFFF) was tested for size-based separation and characterization of Asian dust particles. Various SdFFF experimental parameters including flow rate, stop-flow time and field strength of the centrifugal field were optimized for the size analysis of Asian dust. The Sd/StFFF calibration curve showed a good linearity with $R^2$ value of 0.9983, and results showed an excellent capability of Sd/StFFF for a size-based separation of micron-sized particles.The optical microscopy (OM) was also used to study the size and the shape of the dust particles. The size distributions of the samples collected during a thick dust period were shifted towards larger sizes than those of the samples collected during thin dust periods. It was also observed that size distribution of the sample collected during dry period shifts further towards larger sizes than that of the samples collected during raining period, suggesting the sizes of the dust particle decrease during raining periods as the components adsorbed on the surface of the dust particles were removed by the rain water. Results show Sd/StFFFis a useful tool for size characterization of environmental particles such as the Asian dust.

하이브리드 SEM 시스템

  • Kim, Yong-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.109-110
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    • 2014
  • 주사전자현미경(Scanning Electron Microscopy: SEM)은 고체상태에서 미세조직과 형상을 관찰하는 데에 가장 다양하게 쓰이는 분석기기로서 최근에 판매되고 있는 고분해능 SEM은 수 나노미터의 분해능을 가지고 있다. 그리고 SEM의 초점심도가 크기 때문에 3차원적인 영상의 관찰이 용이해서 곡면 혹은 울퉁불퉁한 표면의 영상을 육안으로 관찰하는 것처럼 보여준다. 활용도도 매우 다양해서 금속파면, 광물과 화석, 반도체 소자와 회로망의 품질검사, 고분자 및 유기물, 생체시료 nnnnnnnnn와 유가공 제품 등 모든 산업영역에 걸쳐 있다(Fig. 1). 입사된 전자빔이 시료의 원자와 탄성, 비탄성 충돌을 할 때 2차 전자(secondary electron)외에 후방산란전자(back scattered electron), X선, 음극형광 등이 발생하게 되는 이것을 통하여 topography (시료의 표면 형상), morphology(시료의 구성입자의 형상), composition(시료의 구성원소), crystallography (시료의 원자배열상태)등의 정보를 얻을 수 있다. SEM은 2차 전자를 이용하여 시료의 표면형상을 측정하고 그 외에는 SEM을 플랫폼으로 하여 EDS (Energy Dispersive X-ray Spectroscopy), WDS (Wave Dispersive X-ray Spectroscope), EPMA (Electron Probe X-ray Micro Analyzer), FIB (Focus Ion Beam), EBIC (Electron Beam Induced Current), EBSD (Electron Backscatter Diffraction), PBMS (Particle Beam Mass Spectrometer) 등의 많은 분석장치들이 SEM에 부가적으로 장착되어 다양한 시료의 측정이 이루어진다. 이 중 결정구조, 조성분석을 쉽고 효과적으로 할 수 있게 하는 X선 분석장치인 EDS를 SEM에 일체화시킨 장비와 EDS 및 PBMS를 SEM에 장착하여 반도체 공정 중 발생하는 나노입자의 형상, 성분, 크기분포를 측정하는 PCDS(Particle Characteristic Diagnosis System)에 대해 소개하고자 한다. - EDS와 통합된 SEM 시스템 기본적으로 SEM과 EDS는 상호보완적인 기능을 통하여 매우 밀접하게 사용되고 있으나 제조사와 기술적 근간의 차이로 인해 전혀 다른 방식으로 운영되고 있다. 일반적으로 SEM과 EDS는 별개의 시스템으로 스캔회로와 이미지 프로세싱 회로가 개별적으로 구현되어 있지만 로렌츠힘에 의해 발생하는 전자빔의 왜곡을 보정을 위해 EDS 시스템은 SEM 시스템과 연동되어 운영될 수 밖에 없다. 따라서, 각각의 시스템에서는 필요하지만 전체 시스템에서 보면 중복된 기능을 가지는 전자회로들이 존재하게 되고 이로 인해 SEM과 EDS에서 보는 시료의 이미지의 차이로 인한 측정오차가 발생한다(Fig. 2). EDS와 통합된 SEM 시스템은 중복된 기능인 스캔을 담당하는 scanning generation circuit과 이미지 프로세싱을 담당하는 FPGA circuit 및 응용프로그램을 SEM의 회로와 프로그램을 사용하게 함으로 SEM과 EDS가 보는 시료의 이미지가 정확히 일치함으로 이미지 캘리브레이션이 필요없고 측정오차가 제거된 EDS 측정이 가능하다. - PCDS 공정 중 발생하는 입자는 반도체 생산 수율에 가장 큰 영향을 끼치는 원인으로 파악되고 있으며, 생산수율을 저하시키는 원인 중 70% 가량이 이와 관련된 것으로 알려져 있다. 현재 반도체 공정 중이나 반도체 공정 장비에서 발생하는 입자는 제어가 되고 있지 않은 실정이며 대부분의 반도체 공정은 저압환경에서 이루어지기에 이 때 발생하는 입자를 제어하기 위해서는 저압환경에서 측정할 수 있는 측정시스템이 필요하다. 최근 국내에서는 CVD (Chemical Vapor Deposition) 시스템 내 파이프내벽에서의 오염입자 침착은 심각한 문제점으로 인식되고 있다(Fig. 3). PCDS (Particle Characteristic Diagnosis System)는 오염입자의 형상을 측정할 수 있는 SEM, 오염입자의 성분을 측정할 수 있는 EDS, 저압환경에서 기체에 포함된 입자를 빔 형태로 집속, 가속, 포화상태에 이르게 대전시켜 오염입자의 크기분포를 측정할 수 있는 PBMS가 일체화 되어 반도체 공정 중 발생하는 나노입자 대해 실시간으로 대처와 조치가 가능하게 한다.

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