• Title/Summary/Keyword: 미소변위 측정

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PZT를 이용한 초정밀 회전형 스테이지 개발

  • Yun Deok-Won;Tak Tae-Yeol;Kim Jin-Ho;Han Chang-Su;Gang Eun-Gu;Hong Won-Pyo;Choe Heon-Jong
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2006.05a
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    • pp.150-155
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    • 2006
  • PZT는 높은 분해능을 구현할 수 있는 구동기이지만 그 구동 범위가 협소하다는 단점이 있다. 최근에는 이러한 단점을 극복하기 위한 여러가지 메커니즘들이 제안되고 있다. 본 논문에서는 PZT를 이용하여 넓은 범위의 높은 분해능을 갖는 회전형 스테이지를 개발하였다. 개발되어진 회전형 스테이지는 빔 형태의 예압구조를 이용하였으며 일정한 마찰력을 구현하기 위하여 알루미나와 오닉스를 사용하였다. 대 변위와 미소변위를 동시에 구동하기 위하여 Dual mode control을 적용하였다. 또한 레이지 간섭계를 이용하여 구동기의 최대속도와 분해능을 측정하였으며 Sinsweep를 이용하여 구동기의 주파수 응답을 구하였다.

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Deformation Characteristics of Diaphragm Wall Induced by Deep Excavation(II) -Numerical Analysis- (대규모 굴착공사에 따른 지중연속벽체의 변형특성(II) -수치해석-)

  • 김동준;이병철;김동수;양구승
    • Journal of the Korean Geotechnical Society
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    • v.17 no.4
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    • pp.107-115
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    • 2001
  • 해성토층 위에 준설매립된 수도권 해안매립지역에서 원형의 대심도 굴착공사로 인하여 발생하는 지중연속벽의 수평변위를 예측하기 위하여 수치해석을 수행하였고, 이러한 수치해석결과와 현장측정값을 비교하여 각각의 수치해석방법의 적용성을 평가하였다. 수치해석법으로는 지반반력해석, 선형 유한요소법 그리고 비선형 유한요소법이 수행되었다. 각각의 방법들에서는 미소변형률에서의 지반거동특성인 비선형성과 굴착으로 인한 구속압감소효과를 고려한 경우와 고려하지 않은 경우에 대하여 수치해석을 수행하여 각각 그 결과들을 비교.분석하였다. 이러한 분석결과 미소변형률에서의 비선형성과 굴착으로 인한 구속압감소 효과를 고려한 비선형 유한요소해석법이 가장 정확하게 수평변위를 예측할 수 있는 방법임을 알 수 있었다.

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A Study of a Variety of Sands in Stress-dilatancy Relationships (각 종 모래의 Stress-dilatancy 관계에 관한 연구)

  • 박춘식;장정욱
    • Journal of the Korean Geotechnical Society
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    • v.18 no.1
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    • pp.41-48
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    • 2002
  • Anisotropy of stiffness, from extremely small strains to post-failure strains, of isotropically consolidated air-pluviated sands in plane strain compression was studied by using the newly developed instrumentation fur small strain measurements, Seven types of sand of world-wide origins were tested, which have been extensively used for research purposes. Stress-strain relationships for a wide range of strain from about 0.0001% to the peak were obtained by measuring axial and lateral strains locally free from the effects of bedding and membrane penetration errors at the specimen boundaries. The result showed that the relationship between the principal stress ratio and the principal strain increment ratio was constant, being rarely affected by the over-consolidation ratio and the confining pressure. Although in the small strain the anisotropy hardly affected the relationship between the principal stress ratio and the principal strain increment ratio, the K value around the peak varied according to the $\delta$ value. In general, Rowe\`s stress-dilatancy equation works fairly well from the small strain to the peak.

Propagation of Crack in Concrete Subjected to Dynamic Loading (동적하중(動的荷重)을 받는 콘크리트의 구열(龜裂)성장)

  • Kang, Sung Hoo;Kim, Woo
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.8 no.2
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    • pp.135-145
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    • 1988
  • This study deals with the prediction of crack propagation in concrete mortar subjected to static and dynamic load. Total 54 CLWL-DCB(Crack-line-loaded-double-cantilever beam) concrete mortar specimens were tested to measure crack growth using ASTM 561-80. Main variables were sand to cement ratio and water to cement ratio. The resulting load(P)-COD(Crack Opening Displacement; $2V_1$) curves and COD-CTOD (Crack Tip Opening Displacement; $2V_2$) curves were analyzed to calculate effective crack length and physical crack length by way of ASTM 561-80 proposed. Replica crack length were also obtained directly during the test. The differences in crack propagation between under static load and under dynamic load were investigated.

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Micro Mass detection devices for Bio-Chip based on PZT Thick Film Cantilever (PZT 후막 캔틸레버를 이용한 바이오칩용 미세 무게 감지 소자)

  • Kim, Hyung-Joon;Kim, Yong-Bum;Choi, Ki-Yong;Kang, Ji-Yoon;Kim, Tae-Song
    • Proceedings of the KIEE Conference
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    • 2002.07c
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    • pp.1988-1990
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    • 2002
  • 마이크로 바이오칩용 미세 무게 감지 소자를 개발하기 위해 통상적인 MEMS 공정에 PZT sol solution을 함침하여 binder로서 적용하는 복합적인 스크린 인쇄 방법을 적용해 $800-850^{\circ}C}$의 비교적 저온에서 높은 소결밀도와 우수한 전기적인 특성을 가지는 PZT-0.12PCW 후막 구동형 캔틸레버 소자를 Pt/$TiO_2$/YSZ/$SiO_2$/Si 기판에 제조하였다. 제조된 PZT-0.12PCW 후막 구동형 캔틸레버 소자의 공진 주파수와 변위를 레이저 미소 변위 측정 시스템을 이용하여 공기 중 및 액체 중에서 측정함으로써 캔틸레버 크기에 따른 공진 특성 변화, 액체 내에서의 댐핑 효과 등을 분석할 수 있었다. 또한 Au를 증착하거나biotin-streptoavidin 반응을 통해 단백질을 고정화시켜 무게변화를 야기시킨 후 소자의 감도를 평가함으로써 PZT-0.12PCW 후막 구동형 캔틸레버를 우수한 성능의 바이오칩용 미세 무게 감지 소자로 응용할 수 있음을 알 수 있었다.

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Measurement of the small vibration using a fiber-optic displacement sensor (광섬유 변위 센서를 이용한 미소 진동의 측정에 관한 연구)

  • Park, Woo-Jong;Lee, Hyuk
    • Proceedings of the KIEE Conference
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    • 1993.11a
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    • pp.353-355
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    • 1993
  • A single-mode fiber-optic interferometer for measuring small vibrations was constructed. The interferometer is based on the Fabry-Perot configuration that uses a single mode bidirectional fiber coupler as a beam splitter and employs peak detection scheme in the signal processing. The instrument was used to measure the displacement of the translator clamped to a piezo crystal.

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A Study on the Small Disturbance Measurement of Liquid Film Thickness by $Moir\acute{e}$ Fringe ($Moir\acute{e}$ Fringe에 의한 액막 두께 미소 변위 측정 연구)

  • Jeon, H.S.;Kim, K.H.
    • Journal of ILASS-Korea
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    • v.2 no.4
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    • pp.29-35
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    • 1997
  • Liquid film thickness is measured by $moir\acute{e}$ topography which monitored liquid surface. $Moir\acute{e}$ fringe measurement techniques share the inherent simplicity found in optical interferometric techniques have the advantage of use over a greater range of displacement. $Moir\acute{e}$ fringe are the geometric interference patterns observed when two dense line grating are superposed. Light transmitted through a fixed line grating is deviated by the liquid film surface, producing a distored image of the grating. The $moir\acute{e}$ fringe produced by projection of this optically distored grating onto a second stationary grating permit visualization of the liquid surface and measurement of the liquid film thickness. This study measured the small amplitude of liquid film thickness to the $moir\acute{e}$ fringe pattern produced when spherical metal was dropped glycerin put)1 And the measurement of liquid film thickness flowing down an inclined plate are required to calculate the liquid slope in a position.

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Development of Displacement Measuring Sensor Module to Monitoring About Variation and Distortion for Bridge Infrastructure at Wireless Communication Environmental (교량구조물의 구조적 변형을 측정하는 무선통신기반 변위센서모듈 개발)

  • Ryu, Seung-Ki;Moon, Hak-Yong
    • The Journal of The Korea Institute of Intelligent Transport Systems
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    • v.9 no.5
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    • pp.87-95
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    • 2010
  • Lots of bridge structure generated the change of outward formation according to durability capability and decrepitude by long use. Especially, in case of the typhoon, snowing and earthquake is going to make rapidly more worse formation about the old structural facilitys. Also, outward formation by irregular and micro-distortion in bridge structure could not easily checked by normal diagnostics method. As a result, performance-capability of structure facility is getting to make a decline in standard of structure performance. Recently, real-time monitoring technology by wireless environment go into the study of irregular movement for structure facility. This paper presents the development of sensor to displacement checking about bridge structure. Sensing method of developed sensor put bring into the gyroscope technology using the acceleration speed and angular acceleration speed. This paper also will simulated to verified the monitoring capability of developed sensor against random vibration, frequency and distortion in simulated equipment.

Noncontact optical system for measurement of displacement and vibration (미소 변위 진동측정을 위한 광학 시스템 설계 및 제작)

  • Hwang, Woong;Kwon, Jin-Hyuk
    • Korean Journal of Optics and Photonics
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    • v.14 no.3
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    • pp.260-265
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    • 2003
  • A noncontact optical system that can measure displacement or vibration of an object is designed by employing the oblique ray method. By using a single convex lens which serves as both the input and output lenses, we made the optical system very compact and reliable. In addition, the bandwidth of the vibration measurement is more than 100 KHz by using the position-sensitive detector as the beam position sensor. The resolution and capture range of the system are $\pm$1 ${\mu}{\textrm}{m}$ and 1100 ${\mu}{\textrm}{m}$, respectively. As a sample test, the vibrations of a speaker and a rotating compact disc surface were measured.

The Behavior of Overall Strain Range in Undrained Triaxial Compression Tests for a Weathered Soil (풍화토의 비배수 삼축압축시험시 전체 변형률 영역의 거동에 관한 연구)

  • 안영대;오세붕;고동희;김동수
    • Journal of the Korean Geotechnical Society
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    • v.18 no.1
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    • pp.29-39
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    • 2002
  • In order to evaluate the behavior of overall range from small strain to failure, the triaxial compression tests with LVDTs were performed for local displacement measurements. According to the result it was possible to evaluate the total range behavior from 0.001% to 10% and both secant moduli of undisturbed and disturbed weathered soils had a similar result in the small slain level. The normalized shear moduli$(G/G_{max})$ in the undrained triaxial compression tests were similar to those of resonant column tests but the maximum shear moduli$(G/G_{max})$ were strongly affected by the ratio of saturation. As a result of parametric study a constitutive model with anisotropic hardening could predict the behavior of total strain range.